Dalsjø, 2006 - Google Patents
Modeling of a resisitive contact RF-MEMS switch fabricated using DRIEDalsjø, 2006
View PDF- Document ID
- 4926502608146976679
- Author
- Dalsjø P
- Publication year
External Links
Snippet
In recent years there has been a dramatic increase in the number of wireless applications in both commercial and markets such as defense. Radio Frequency RF) Micro Electro Mechanical Systems (MEMS) with its low power consumption and excellent RF …
- 238000000708 deep reactive-ion etching 0 title abstract description 42
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
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