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Kong et al., 2019 - Google Patents

Microstructure and mechanical properties of Ti-Al-Cr-N films: Effect of current of additional anode

Kong et al., 2019

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Document ID
4826342824189501472
Author
Kong Y
Tian X
Gong C
Tian Q
Yang D
Wu M
Li M
Golosov D
Publication year
Publication venue
Applied Surface Science

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Abstract Ti-Al-Cr-N films were fabricated on the surface of Si (100) wafers and M2 high speed steel by electrically enhanced discharge cathodic arc technology. The effect of the current of additional anode on plasma discharge, microstructure, hardness and adhesion …
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