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Feng et al., 2013 - Google Patents

A spherically-shaped PZT thin film ultrasonic transducer with an acoustic impedance gradient matching layer based on a micromachined periodically structured …

Feng et al., 2013

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Document ID
4680620387670488854
Author
Feng G
Liu W
Publication year
Publication venue
Sensors

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Snippet

This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth …
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