Patel et al., 2009 - Google Patents
A sacrificial SU-8 mask for direct metallization on PDMSPatel et al., 2009
View PDF- Document ID
- 4581922980056298496
- Author
- Patel J
- Kaminska B
- Gray B
- Gates B
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
A new fabrication technology utilizing SU-8 as a sacrificial mask for metallization of the PDMS surface is presented. The sacrificial SU-8 layer process offers superior performance for reliable and repeatable metallization on the PDMS layer. Sacrificial SU-8 masks from 45 …
- 229920000435 poly(dimethylsiloxane) 0 title abstract description 115
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