Ma et al., 2016 - Google Patents
Electrostatically actuated MEMS relay arrays for high-power applicationsMa et al., 2016
- Document ID
- 4475143067058950126
- Author
- Ma B
- You Z
- Ruan Y
- Chang S
- Zhang G
- Publication year
- Publication venue
- Microsystem Technologies
External Links
Snippet
Micro-electromechanical systems (MEMS) relays should have high current-carrying capability and high device reliability for high-power applications. The current-carrying capability of MEMS relays is mainly limited by the thickness of metal contacts fabricated by …
- 238000000034 method 0 abstract description 24
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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