Sugimura et al., 1996 - Google Patents
Electrochemical nanolithography using scanning probe microscopy: fabrication of patterned metal structures on silicon substratesSugimura et al., 1996
- Document ID
- 4453772543115228407
- Author
- Sugimura H
- Nakagiri N
- Publication year
- Publication venue
- Thin Solid Films
External Links
Snippet
The application of scanning probe anodization to nanolithography is described. The electrochemical processing of material surfaces at nanometer scale both laterally and vertically was conducted by scanning probe anodization, which used the tip-sample junction …
- 239000002184 metal 0 title abstract description 7
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y10/00—Nano-technology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y30/00—Nano-technology for materials or surface science, e.g. nano-composites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y40/00—Manufacture or treatment of nano-structures
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