[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Adorno et al., 2022 - Google Patents

Microphones

Adorno et al., 2022

Document ID
4281315367476475882
Author
Adorno S
Cerini F
Vercesi F
Publication year
Publication venue
Silicon Sensors and Actuators: The Feynman Roadmap

External Links

Snippet

Microphones convert sound (ie, acoustic pressure variation in the range 20 Hz–20 kHz) into electrical signal. MEMS microphones are fabricated for adopting microelectronics techniques and processes: Because of the possibility to guarantee high volumes with good …
Continue reading at link.springer.com (other versions)

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/005Electrostatic transducers using semiconductor materials
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/04Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/01Electrostatic transducers characterised by the use of electrets
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006Interconnection of transducer parts

Similar Documents

Publication Publication Date Title
Shah et al. Design approaches of MEMS microphones for enhanced performance
US6829131B1 (en) MEMS digital-to-acoustic transducer with error cancellation
Scheeper et al. A new measurement microphone based on MEMS technology
Littrell High performance piezoelectric MEMS microphones
US9832573B2 (en) Entrained microphones
Weigold et al. A MEMS condenser microphone for consumer applications
JP5130225B2 (en) Micromachining structure for receiving and / or generating an acoustic signal, method for manufacturing a micromachining structure, and use of the micromachining structure
Horowitz et al. Development of a micromachined piezoelectric microphone for aeroacoustics applications
Pedersen et al. A silicon condenser microphone with polyimide diaphragm and backplate
US20120099753A1 (en) Backplate for Microphone
Kressmann et al. Silicon condenser microphones with corrugated silicon oxide/nitride electret membranes
Segovia-Fernandez et al. Monolithic piezoelectric aluminum nitride MEMS-CMOS microphone
Ozdogan et al. Modeling and characterization of a pull-in free MEMS microphone
JP2011527152A (en) Piezoelectric MEMS microphone
Niu et al. Piezoelectric bimorph microphone built on micromachined parylene diaphragm
CN109417672A (en) MEMS device and method
Prasad et al. Development of MEMS acoustic sensor with microtunnel for high SPL measurement
Lang et al. Piezoelectric bimorph MEMS speakers
Chen et al. Edge-released, piezoelectric MEMS acoustic transducers in array configuration
Adorno et al. Microphones
Xu et al. A piezoelectric MEMS speaker with stretchable film sealing
Fawzy et al. Design and analysis of piezoelectric MEMS micro‐speaker based on scandium‐doped AlN thin film
Yi et al. Piezoelectric microspeaker with compressive nitride diaphragm
Rusconi et al. Micro speakers
US10757510B2 (en) High performance sealed-gap capacitive microphone with various gap geometries