Yadav, 2009 - Google Patents
Methodology for developing a functional multiscale architecture model system towards future integrated circuitsYadav, 2009
View PDF- Document ID
- 4262827884731468801
- Author
- Yadav Y
- Publication year
External Links
Snippet
Detection of the biochemical species in the environmental pollution, industrial emission monitoring, medical diagnosis, public security, agriculture and a variety of industries has resulted in the emerging need for a generation of high density nanostructured sensor arrays …
- 238000000034 method 0 title abstract description 231
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y10/00—Nano-technology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y40/00—Manufacture or treatment of nano-structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y30/00—Nano-technology for materials or surface science, e.g. nano-composites
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Cabrini et al. | Nanofabrication handbook | |
US6270946B1 (en) | Non-lithographic process for producing nanoscale features on a substrate | |
Koh | Strategies for controlled placement of nanoscale building blocks | |
Coffey et al. | Patterning phase separation in polymer films with dip-pen nanolithography | |
Kwon et al. | Importance of molds for nanoimprint lithography: hard, soft, and hybrid molds | |
US20060014084A1 (en) | Method for providing nano-structures of uniform length | |
Cherniavskaya et al. | Edge transfer lithography of molecular and nanoparticle materials | |
Zhao et al. | Large-area, ultrathin metal-oxide semiconductor nanoribbon arrays fabricated by chemical lift-off lithography | |
Lin et al. | Multilength-scale chemical patterning of self-assembled monolayers by spatially controlled plasma exposure: nanometer to centimeter range | |
Xie et al. | Polymer nanostructures made by scanning probe lithography: recent progress in material applications | |
Park et al. | Light stamping lithography: microcontact printing without inks | |
KR100992834B1 (en) | Manufacturing method of nanowire multichannel field effect transistor device | |
McCarty | Molecular lithography for wafer-scale fabrication of molecular junctions | |
Chen et al. | Electrochemical Replication and Transfer for Low‐Cost, Sub‐100 nm Patterning of Materials on Flexible Substrates | |
Zhao et al. | Nanopattern-embedded micropillar structures for security identification | |
Viero et al. | Efficient prototyping of large-scale pdms and silicon nanofluidic devices using pdms-based phase-shift lithography | |
Myung et al. | “Lens” effect in directed assembly of nanowires on gradient molecular patterns | |
Noh et al. | 50 nm DNA nanoarrays generated from uniform oligonucleotide films | |
Lee et al. | Spontaneous registration of Sub-10 nm features based on subzero celsius spin-casting of self-assembling building blocks directed by chemically encoded surfaces | |
Shu et al. | Programmable nanoscale crack lithography for multiscale PMMA patterns | |
Yadav | Methodology for developing a functional multiscale architecture model system towards future integrated circuits | |
Duan et al. | Large‐Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries | |
Lin et al. | Self-aligned nanolithography in a nanogap | |
CN101645391B (en) | Manufacturing cross-structures of nanostructures | |
Becerra-Mora et al. | Electrochemical Erasing Using a Polymer Lithography Editor for the Fabrication of Photoactive Devices |