Nikitin et al., 1998 - Google Patents
Deposition of thin ferromagnetic films for application in magnetic sensor microsystemsNikitin et al., 1998
- Document ID
- 406468443228838234
- Author
- Nikitin P
- Valeiko M
- Toporov A
- Ghorbanzadeh A
- Beloglazov A
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
A number of soft ferromagnetic compositions have been used to fabricate thin-film cores for magnetic sensor microsystems. Techniques based on magnetron sputtering and laser ablation deposition have been extensively explored. The properties of the films have been …
- 230000005291 magnetic 0 title abstract description 44
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Comprising only the magnetic material without bonding agent
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