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Versatile mask generation techniques for custom microelectronic devices

Published: 19 June 1978 Publication History

Abstract

A paramount attribute for any computer-aided design methodology, involving custom microelectronic devices, is a rapid and cost effective mask generation technique. The microelectronic device can be characterized as a discrete topological schematic which has been geometrically scaled to imply a grid structure. This topological schematic is constructed from a set of symbols which explicitly define the electrical and logical functions of the device while implying the geometrical relationships related to the process technology. Each layout symbol can be mapped into specific geometrical shapes (layer by layer) which can be defined by sizing data and subsequently subjected to appropriate modification, depending on contextual relationships with the adjacent orthogonal and diagonal layout symbols. These symbol-to-geometrical mappings can be easily comprehended by device designers and the requisite algorithms are amenable to computer implementation. These mask generation techniques provide a cost-effective means of generating mask sets for custom microelectronic devices while also providing device design portability and is ideally suited for process experimentation.

References

[1]
R. P. Larsen, "Computer-Aided Preliminary Layout Design of Customized MOS Arrays", IEEE Transactions on Computers, Vol. C-20, No. 5, May 1971, pp 512-523.
[2]
R. P. Larsen, "Interactive Computer-Aided Editing of Custom MOS Device Layout Designs", Proceedings of the 1973 International Microelectronic Symposium, October 1973, San Francisco, CA., pp 2A-7-1 through 2A-7-10.
[3]
R. P. Larsen, "Designer's Manual for MANN 4 Program", Rockwell International publication, October 1974, 18 pages.

Cited By

View all
  • (1988)SLIM - The translation of symbolic layouts into mask dataPapers on Twenty-five years of electronic design automation10.1145/62882.62906(210-217)Online publication date: 1-Jun-1988
  • (1982)A symbolic design system for integrated circuitsProceedings of the 19th Design Automation Conference10.5555/800263.809245(460-466)Online publication date: 1-Jan-1982
  • (1982)A layout synthesis system for NMOS gate-cellsProceedings of the 19th Design Automation Conference10.5555/800263.809222(307-314)Online publication date: 1-Jan-1982
  • Show More Cited By

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cover image ACM Conferences
DAC '78: Proceedings of the 15th Design Automation Conference
June 1978
501 pages

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IEEE Press

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Published: 19 June 1978

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Overall Acceptance Rate 1,770 of 5,499 submissions, 32%

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Cited By

View all
  • (1988)SLIM - The translation of symbolic layouts into mask dataPapers on Twenty-five years of electronic design automation10.1145/62882.62906(210-217)Online publication date: 1-Jun-1988
  • (1982)A symbolic design system for integrated circuitsProceedings of the 19th Design Automation Conference10.5555/800263.809245(460-466)Online publication date: 1-Jan-1982
  • (1982)A layout synthesis system for NMOS gate-cellsProceedings of the 19th Design Automation Conference10.5555/800263.809222(307-314)Online publication date: 1-Jan-1982
  • (1982)Aw expanded logic equation list for checkoutProceedings of the 19th Design Automation Conference10.5555/800263.809220(291-299)Online publication date: 1-Jan-1982
  • (1981)ABLEProceedings of the 18th Design Automation Conference10.5555/800073.802318(322-329)Online publication date: 29-Jun-1981
  • (1980)SLIM-the translation of symbolic layouts into mask dataProceedings of the 17th Design Automation Conference10.1145/800139.804592(595-602)Online publication date: 23-Jun-1980
  • (1980)SIDS (A Symbolic Interactive Design System)Proceedings of the 17th Design Automation Conference10.1145/800139.804542(292-295)Online publication date: 23-Jun-1980
  • (1979)Unified Shapes Checker - a checking tool for LSIProceedings of the 16th Design Automation Conference10.5555/800292.811695(81-87)Online publication date: 25-Jun-1979

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