Process equipment modeling: making optimal design decisions for next generation dispensing tools
Abstract
References
Recommendations
Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing
WSC '03: Proceedings of the 35th conference on Winter simulation: driving innovationThis paper describes a resident-entity based pilot simulation study of a class of tools used in 300mm semiconductor manufacturing known as the <i>wets</i> tools or the <i>wet benches.</i> These are <i>batch chamber tools</i> - they have several chambers ...
Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation
WSC '03: Proceedings of the 35th conference on Winter simulation: driving innovation300 mm semiconductor wafer fabrication facilities, like conventional semiconductor fabs, contain many different types of tools. In this paper we discuss a realistic way of representing cluster tools in a simulation model of the entire line. A more ...
Semiconductor process equipment modeling: using emulation to validate a cluster tool simulation model
WSC '00: Proceedings of the 32nd conference on Winter simulationGetting the most productivity per square foot of clean room space is a common goal for today's semiconductor fabs. Cluster tool throughput is an important factor in a tool's productivity index. Maximizing and accurately predicting throughput is a high ...
Comments
Please enable JavaScript to view thecomments powered by Disqus.Information & Contributors
Information
Published In
Sponsors
- IIE: Institute of Industrial Engineers
- INFORMS/CS: Institute for Operations Research and the Management Sciences/College on Simulation
- ASA: American Statistical Association
- ACM: Association for Computing Machinery
- SIGSIM: ACM Special Interest Group on Simulation and Modeling
- IEEE/CS: Institute of Electrical and Electronics Engineers/Computer Society
- NIST: National Institute of Standards and Technology
- (SCS): The Society for Modeling and Simulation International
- IEEE/SMCS: Institute of Electrical and Electronics Engineers/Systems, Man, and Cybernetics Society
Publisher
Winter Simulation Conference
Publication History
Check for updates
Qualifiers
- Article
Conference
Acceptance Rates
Contributors
Other Metrics
Bibliometrics & Citations
Bibliometrics
Article Metrics
- 0Total Citations
- 134Total Downloads
- Downloads (Last 12 months)0
- Downloads (Last 6 weeks)0
Other Metrics
Citations
View Options
Login options
Check if you have access through your login credentials or your institution to get full access on this article.
Sign in