[go: up one dir, main page]
More Web Proxy on the site http://driver.im/ skip to main content
10.1145/1118299.1118371acmconferencesArticle/Chapter ViewAbstractPublication PagesaspdacConference Proceedingsconference-collections
Article

Newton: a library-based analytical synthesis tool for RF-MEMS resonators

Published: 24 January 2006 Publication History

Abstract

Newton is a library-based CAD tool with an analytical synthesis engine which has been developed to support the direct synthesis of the physical design and an electromechanically equivalent model of RF-MEMS resonators based on process parameters and performance metrics. Newton provides accuracy comparable to finite element analysis while requiring a fraction of the computation and design time. A comparison of results from synthesis with Newton, design with FEA, and test results from fabricated devices is presented.

References

[1]
N. Zhou, J. V. Clark, and K. S. J. Pister, "Nodal analysis for MEMS design using SUGAR v0.5," Proc. of Modeling and Simulation of Microsystems, Semiconductors, Sensors, and Actuators, 1998.
[2]
R. Kamalian, N. Zhou, and A. M. Agogino, "A comparison of MEMS synthesis techniques," Proc. of 1st Pacific Rim Workshop on Transducers and Micro/Nano Technologies, 2002.
[3]
R. H. Kamalian, H. Takagi, and A. M. Agogino, "Optimized design of MEMS by evolutionary multi-objective optimization with interactive evolutionary computation," Proc. of the Genetic and Evolutionary Computation Conference, 2004.
[4]
N. R. Lo, et al., "Parameterized layout synthesis, extraction, and SPICE simulation for MEMS," Proc. of IEEE International Symposium on Circuits and Systems, 1996.
[5]
Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "60-MHz wine-glass micromechanical-disk reference oscillator," Proc. of IEEE Int. Solid-State Circuits Conf. Dig. of Tech. Papers, 2004.
[6]
C. T.-C. Nguyen, Micromechanical Signal Processors, Ph.D. Dissertation, University of California-Berkeley, 1994.
[7]
K. Wang, Microelectromechanical Resonators and Filters for Communications Applications, Ph.D. Dissertation, University of Michigan, 1999.
[8]
R. A. Anderson, "Flexural vibrations in uniform beams according to the Timoshenko theory," J. of Applied Mechanics, 1953.
[9]
W. Weaver, et al., Vibration Problems in Engineering, 5th ed., New York: John Wiley & Sons, 1990.
[10]
M. E. Frerking, Crystal Oscillator Design & Temperature Compensation, New York: Van Nostrand Reinhold Company, 1978.

Cited By

View all

Recommendations

Comments

Please enable JavaScript to view thecomments powered by Disqus.

Information & Contributors

Information

Published In

cover image ACM Conferences
ASP-DAC '06: Proceedings of the 2006 Asia and South Pacific Design Automation Conference
January 2006
998 pages
ISBN:0780394518

Sponsors

  • IEEE Circuits and Systems Society
  • SIGDA: ACM Special Interest Group on Design Automation
  • IEICE ESS: Institute of Electronics, Information and Communication Engineers, Engineering Sciences Society
  • IPSJ SIG-SLDM: Information Processing Society of Japan, SIG System LSI Design Methodology

Publisher

IEEE Press

Publication History

Published: 24 January 2006

Permissions

Request permissions for this article.

Check for updates

Qualifiers

  • Article

Acceptance Rates

Overall Acceptance Rate 466 of 1,454 submissions, 32%

Upcoming Conference

ASPDAC '25

Contributors

Other Metrics

Bibliometrics & Citations

Bibliometrics

Article Metrics

  • Downloads (Last 12 months)0
  • Downloads (Last 6 weeks)0
Reflects downloads up to 10 Dec 2024

Other Metrics

Citations

Cited By

View all

View Options

Login options

View options

PDF

View or Download as a PDF file.

PDF

eReader

View online with eReader.

eReader

Media

Figures

Other

Tables

Share

Share

Share this Publication link

Share on social media