Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range

Regular Section

The Institute of Electronics, Information and Communication Engineers">Takuma NISHIMOTO, The Institute of Electronics, Information and Communication Engineers">Kiichi YAMASHITA, The Institute of Electronics, Information and Communication Engineers">Kenichi OHHATA

Author information

Keywords: MEMS, RF-MEMS, variable capacitor

JOURNAL RESTRICTED ACCESS

2008 Volume E91.B Issue 2 Pages 572-574

DOI https://doi.org/10.1093/ietcom/e91-b.2.572

Details

Abstract

A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2V; it achieves a tuning range of 4.8:1 (capacitance: 630-130fF) in the range of 0 to 3.2V and at a frequency of 7.5GHz.

Corresponding author

Register with J-STAGE for free!