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Analyzing electrostatic modulation of signal transduction efficiency in MoS2 nanoelectromechanical resonators with interferometric readout

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Abstract

Optical interferometry is a highly sensitive method for detecting the miniscule resonant motion in two-dimensional (2D) nanoelectromechanical systems (NEMS). However, the technique to control the interferometry signal strength has not been fully understood. In this work, we present analytical modeling of an effective method for tuning motion-to-signal responsivity in interferometric detection of 2D molybdenum disulfide (MoS2) NEMS resonators. We show that the responsivity can be tuned very efficiently, all the way from maximum to 0, by varying the vacuum gap underneath the 2D membrane electrostatically. We further show that the gate voltage corresponding to 0 responsivity, which means no motion signal can be detected, varies with the MoS2 thickness, diameter, pre-strain, and initial vacuum gap. Our findings provide an important guideline for optimizing measurement conditions when detecting motion in 2D NEMS structures using laser interferometry.

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Acknowledgements

This work was supported by the Ministry of Science and Technology of the People’s Republic of China (Grant Nos. 2018YFE0115500, 2019YFE0120300), National Natural Science Foundation of China (Grant Nos. 62004026, 62004032), Science and Technology Department of Sichuan Province (Grant Nos. 2021JDTD0028, 2021YJ0517), Science and Technology Commission of Shanghai Municipality (STCSM) Natural Science Project General Program (Grant No. 21ZR1433800), and Shanghai Sailing Program (Grant No. 19YF1424900).

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Author notes

  1. Zhu J K and Zhang P C have the same contribution to this work.

Authors and Affiliations

  1. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China

    Jiankai Zhu & Zenghui Wang

  2. University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, 200240, China

    Pengcheng Zhang & Rui Yang

Authors
  1. Jiankai Zhu
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  2. Pengcheng Zhang
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  3. Rui Yang
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  4. Zenghui Wang
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Corresponding authors

Correspondence to Rui Yang or Zenghui Wang.

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Zhu, J., Zhang, P., Yang, R. et al. Analyzing electrostatic modulation of signal transduction efficiency in MoS2 nanoelectromechanical resonators with interferometric readout. Sci. China Inf. Sci. 65, 122409 (2022). https://doi.org/10.1007/s11432-021-3297-x

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  • DOI: https://doi.org/10.1007/s11432-021-3297-x

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