Abstract
A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic application. Micro needle layer made of polydimethylsiloxane (PDMS) is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester (PET) film. The PDMS material renders the device adequate flexibility as it can be rolled into a cylinder. The single cell size in the fabricated 4 × 4 sensors array is 0.7 × 0.5 cm2 and the initial capacitance of each cell is 0.86 pF. The fabricated cell shows a sensitivity of 3.26%/mN within the full scale range of 1 kPa. The micro needle structure gives better repeatability and stability. The maximum error during each measurement is about 3.2%, while the minimum error is about 1.2%.
概要
创新点
面向机器人触觉恢复的广大市场需求, 本文提出了一种具有微针结构的柔性触觉传感器. 微针结构作为电介质层, 被夹在上下电极层之间, 形成平行板电容. 微针采用PDMS(聚二甲基硅氧烷)材料, 以保障器件的柔软性和可伸缩性. 微针结构的使用增加了器件的稳定性, 延长了器件的使用寿命. 在制成的4 × 4 检测阵列中, 单个检测单元大小为0.7 cm × 0.5 cm, 电容初值为0.86 pF. 经多次压按测试, 结果显示该阵列的测量范围为1 kPa, 检测精度为3.26 %/mN. 相同压力在多次检测中, 最大输出偏移为3.2%, 最小为1.2%.
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Hu, X., Zhang, X., Liu, M. et al. A flexible capacitive tactile sensor array with micro structure for robotic application. Sci. China Inf. Sci. 57, 1–6 (2014). https://doi.org/10.1007/s11432-014-5191-8
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DOI: https://doi.org/10.1007/s11432-014-5191-8