Idle vehicle circulation policies in a semiconductor FAB

• Bahri, N., Reiss, J., & Doherty, B. (2001). A comparison of unified vs. segregated automated material handling. In Proceedings of IEEE International Symposium on Semiconductor Manufacturing, pp. 3–6.

• Brooks Automation Inc. (2006). AutoMod 12.1 User’s Guide.

• Bruno G., Ghiani G., Improta G. (2000) Dynamic positioning of idle automated guided vehicles. Journal of Intelligent Manufacturing 11: 209–215 doi:10.1023/A:1008947018074

  Article  Google Scholar 

• Chang S.-H., Egbelu P.J. (1996) Dynamic relative positioning of AGVs in a loop layout to minimize mean system response time. International Journal of Production Research 34: 1655–1673 doi:10.1080/00207549608904989

  Article  Google Scholar 

• Egbelu P.J. (1993) Positioning of automated guided vehicles in a loop layout to improve response time. European Journal of Operational Research 71: 32–44 doi:10.1016/0377-2217(93)90258-O

  Article  Google Scholar 

• Gademann A.J.R.M., van de Velde S.L. (2000) Positioning automated guided vehicles in a loop layout. European Journal of Operational Research 127: 565–573 doi:10.1016/S0377-2217(99)00341-0

  Article  Google Scholar 

• Ganesharajah T., Hall N.G., Sriskandarajah C. (1998) Design and operational issues in AGV-served manufacturing systems. Annals of Operations Research 76: 109–154 doi:10.1023/A:1018936219150

  Article  Google Scholar 

• Hu C.-H., Egbelu P.J. (2000) A framework for the selection of idle home locations in an automated guided vehicle system. International Journal of Production Research 38: 543–562 doi:10.1080/002075400189293

  Article  Google Scholar 

• Kim K.H. (1995) Positioning of automated guided vehicles in a loop layout to minimize the mean vehicle response time. International Journal of Production Economics 39: 201–214 doi:10.1016/0925-5273(95)00022-G

  Article  Google Scholar 

• Kim B., Oh S., Shin J., Jung M., Chae J., Lee S. (2007) Effectiveness of vehicle reassignment in a large scale overhead hoist transport system. International Journal of Production Research 45: 789–802 doi:10.1080/00207540600675819

  Article  Google Scholar 

• Koo P.-H., Jang J., Shu J. (2005) Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first. International Journal of Flexible Manufacturing Systems 17: 23–38 doi:10.1007/s10696-005-5992-6

  Article  Google Scholar 

• Kuo C.-H. (2002) Modelling and performance evaluation of an overhead hoist transport system in a 300 mm fabrication plant. International Journal of Advanced Manufacturing Technology 20: 153–161 doi:10.1007/s001700200137

  Article  Google Scholar 

• Le-Anh T., De Koster M.B.M. (2006) A review of design and control of automated guided vehicle systems. European Journal of Operational Research 171: 1–23 doi:10.1016/j.ejor.2005.01.036

  Article  Google Scholar 

• Lee S. (2007) Locating idle vehicles in tandem-loop automated guided vehicle systems to minimize the maximum response time. IEMS 6: 125–135

  Google Scholar 

• Lee C., Ventura J.A. (2001) Optimal dwell point location of automated guided vehicles to minimize mean response time in a loop layout. International Journal of Production Research 39: 4013–4031 doi:10.1080/00207540010005060

  Article  Google Scholar 

• Lin J.T., Wang F.K., Yang C.J. (2005) The performance of the number of vehicles in a dynamic connecting transport AMHS. International Journal of Production Research 43: 2263–2276 doi:10.1080/00207540500034133

  Article  Google Scholar 

• Montoya-Torres J.R. (2006) A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs. Production Planning and Control 17: 648–663 doi:10.1080/09537280600900774

  Article  Google Scholar 

• Qiu L., Hsu W., Huang S., Wang H. (2002) Scheduling and routing algorithms for AGVs: A survey. International Journal of Production Research 40: 745–760 doi:10.1080/00207540110091712

  Article  Google Scholar 

• Ventura J.A., Lee C. (2003) Optimally locating multiple dwell points in a single loop guide path system. IIE Transactions 35: 727–737 doi:10.1080/07408170304346

  Article  Google Scholar 

• Vis I.F.A. (2006) Survey of research in the design and control of automated guided vehicle systems. European Journal of Operational Research 170: 677–709 doi:10.1016/j.ejor.2004.09.020

  Article  Google Scholar 

Download references