Abstract
In this research work, a 2-inch p-type silicon (Si) wafer with high dielectric constant (11.9) was used as a substrate to minimize substrate conductivity losses, thereby improving the antenna radiation efficiency. A thin gold (Au) film with dimensions of \(350\times 260\times 2\,\upmu \mathrm{m}^{3}\) was deposited on the substrate. Four thin slots having the same dimensions of \(20\times 5\times 2\,\upmu \mathrm{m}^{3}\) were cut from the gold patch to create four different notches, thus forming a horn-shaped multiband microantenna. To evaluate the performance of this useful structure, a horn-shaped patch antenna was designed to achieve operation in multiple frequency bands, namely the C band (6.75 GHz), Ku band (14.734 and 17.76 GHz), and K band (22.45 GHz). To validate the design, various parameters such as the return loss and radiation patterns were obtained experimentally for the fabricated antenna and compared with results from the Ansoft high-frequency structure simulator (HFSS) tool. The simulated and experimental results were found to show good agreement. Ideally, the slots in the horn-shaped patch antenna should be made very thin to achieve a wide impedance bandwidth of 31 %, for \({\vert }{S}_{11}{\vert } \le -10\,\hbox {dB}\) from 6.75 to 23.15 GHz with high gain and unidirectional radiation pattern for all resonant frequencies.
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The authors would like to acknowledge and thank the Centre of Excellence in Nano Electronics (CEN) under the India Nanotechnology User Program (INUP), Indian Institute of Technology, Bombay for their support and facilities in carrying out this research work.
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Arora, R., Rana, S.B., Arya, S. et al. Performance evaluation of micromachined fabricated multiband horn-shaped slotted patch antenna. J Comput Electron 15, 1028–1039 (2016). https://doi.org/10.1007/s10825-016-0872-8
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DOI: https://doi.org/10.1007/s10825-016-0872-8