Intelligent Precision Motion Control

Precision engineering [3] has been steadily gathering momentum over the last century in terms of research, development, and application to product innovation. The driving force in this development appears to arise from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. In the new millenium, ultra precision manufacture is poised to progress further and it is expected to enter the nanometer scale regime (nanotechnology). Increasing packing density on integrated circuits and sustained breakthrough in minimum feature dimensions on semiconductor set the pace in the electronics industry. Emerging technologies such as MEMS (Micro-Electro-Mechanical Systems), otherwise known as MicroSystems Technology (MST) in Europe expand further the scope of miniaturisation and integration of electrical and mechanical components.

Authors and Affiliations

1. Department of Electrical and Computer Engineering, National University of Singapore, Singapore

   Kok Kiong Tan & Sunan Huang

2. Singapore Institute of Manufacturing, 71 Nanyang Drive, 638075, Singapore

   Ser Yong Lim & Wei Lin

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