A two-dimensional ƒ-θ micro optical lens scanner with electrostatic comb-drive XY-stage

LETTER

Kanagawa Academy of Science and Technology">Kazuhiro Takahashi, Gwangju Institute of Science and Technology">Ho Nam Kwon, Currently with SONY Corp.">Kunihiko Saruta, Makoto Mita, Hiroyuki Fujita, Kanagawa Academy of Science and Technology">Hiroshi Toshiyoshi

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Keywords: MEMS, 2D optical scanner, micro lens, electrostatic micro actuator, double gimbal XY-stage

JOURNAL FREE ACCESS

2005 Volume 2 Issue 21 Pages 542-547

DOI https://doi.org/10.1587/elex.2.542

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Abstract

We report the design, fabrication and electromechanical performance of a newly developed micro electromechanical XY-scanner for micro-optical spatial light modulation using the silicon micromachining technology. A two-dimensional stage is integrated with a silicon micro lens to scan a transmitting infrared light of 1.55-micron-wavelength by the mechanism of the ƒ-θ lens scanner. Mechanical displacement of up to ± 10 microns (optical angle of ± 0.57 degrees) was obtained with a drive voltage of 30V; optical simulation has suggested that the scanner can be used to construct a free-space optical crossconnect of 9-input by 9-output port counts.

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