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"A New Analysis on Reduction of Undesired Beam Bending in Electrostatic ..."

Banibrata Mukherjee, Kenkere Balashantha Murthy Mruthyunjaya Swamy, Siddhartha Sen (2020)

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DOI: 10.1109/TIM.2019.2903609

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - journals/tim/MukherjeeSS20
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  - https://dblp.org/rec/journals/tim/MukherjeeSS20
Banibrata Mukherjee, Kenkere Balashantha Murthy Mruthyunjaya Swamy, Siddhartha Sen:
A New Analysis on Reduction of Undesired Beam Bending in Electrostatic Comb Drive MEMS Actuator. IEEE Trans. Instrum. Meas. 69(2): 488-500 (2020)

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