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"Statistical control of VLSI fabrication processes."

Purnendu K. Mozumder, Andrzej J. Strojwas (1990)

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DOI: 10.1109/5.52220

access: closed

type: Journal Article

metadata version: 2022-06-22

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Purnendu K. Mozumder, Andrzej J. Strojwas:
Statistical control of VLSI fabrication processes. Proc. IEEE 78(2): 436-455 (1990)

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