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"Assessment of the Analytical Capabilities of Scanning Capacitance and ..."

Maria Stangoni, Mauro Ciappa, Wolfgang Fichtner (2005)

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DOI: 10.1016/J.MICROREL.2005.07.058

access: closed

type: Journal Article

metadata version: 2020-02-22

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Maria Stangoni, Mauro Ciappa, Wolfgang Fichtner:
Assessment of the Analytical Capabilities of Scanning Capacitance and Scanning Spreading Resistance Microscopy Applied to Semiconductor Devices. Microelectron. Reliab. 45(9-11): 1532-1537 (2005)

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