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"Comparison of thermoreflectance and scanning thermal microscopy for ..."

Stéphane Grauby et al. (2008)

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DOI: 10.1016/J.MICROREL.2007.04.008

access: closed

type: Journal Article

metadata version: 2021-10-14

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Stéphane Grauby, M. Amine Salhi, Luis David Patiño Lopez, Wilfrid Claeys, Benoît Charlot, Stefan Dilhaire:
Comparison of thermoreflectance and scanning thermal microscopy for microelectronic device temperature variation imaging: Calibration and resolution issues. Microelectron. Reliab. 48(2): 204-211 (2008)

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