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"Characterization of photonic devices by secondary electron potential contrast."

Marco Buzzo, Mauro Ciappa, Wolfgang Fichtner (2006)

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DOI: 10.1016/J.MICROREL.2006.07.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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Marco Buzzo, Mauro Ciappa, Wolfgang Fichtner:
Characterization of photonic devices by secondary electron potential contrast. Microelectron. Reliab. 46(9-11): 1536-1541 (2006)

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