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"Monte Carlo study of surface and line-width roughness of resist film ..."

G. P. Patsis (2005)

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DOI: 10.1016/J.MATCOM.2004.10.006

access: closed

type: Journal Article

metadata version: 2020-03-04

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G. P. Patsis:
Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution. Math. Comput. Simul. 68(2): 145-156 (2005)

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