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"Scheduling a Single-ARM Multi-Cluster Tool with a Condition-Based Cleaning ..."

Qinghua Zhu et al. (2023)

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DOI: 10.1109/JAS.2023.123327

access: closed

type: Journal Article

metadata version: 2023-09-20

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  dblp key:
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  - https://dblp.org/rec/journals/ieeejas/ZhuLWH23
Qinghua Zhu, Hongpeng Li, Cong Wang, Yan Hou:
Scheduling a Single-ARM Multi-Cluster Tool with a Condition-Based Cleaning Operation. IEEE CAA J. Autom. Sinica 10(10): 1965-1983 (2023)

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