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"Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and ..."

Norbert Dumas et al. (2010)

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DOI: 10.1007/S10836-009-5122-6

access: closed

type: Journal Article

metadata version: 2024-02-05

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Norbert Dumas, Florence Azaïs, Frédérick Mailly, Pascal Nouet:
Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration. J. Electron. Test. 26(1): 111-125 (2010)

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