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"Similarity matching of wafer bin maps for manufacturing intelligence to ..."
Chia-Yu Hsu, Wei-Ju Chen, Ju-Chien Chien (2020)
- Chia-Yu Hsu, Wei-Ju Chen, Ju-Chien Chien:
Similarity matching of wafer bin maps for manufacturing intelligence to empower Industry 3.5 for semiconductor manufacturing. Comput. Ind. Eng. 142: 106358 (2020)
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