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"Dataset for "Review of MEMS for photonic integrated circuits": table for ..."
Carlos Errando-Herranz et al. (2019)
- Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack:
Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures. IEEE DataPort, 2019
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