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"Fabrication and Evaluation of MEMS Piezoelectric Vibration Sensor with ..."

Lan Zhang et al. (2019)

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DOI: 10.1109/NEMS.2019.8915646

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-09

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  dblp key:
  - conf/nems/ZhangTLNOIK19
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Lan Zhang, Ryohei Takei, Jian Lu, Daiji Noda, Ryo Ohta, Toshihiro Itoh, Takeshi Kobayashi:
Fabrication and Evaluation of MEMS Piezoelectric Vibration Sensor with Energy Harvesting Function. NEMS 2019: 163-166

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