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"Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in ..."

Jian Wang et al. (2010)

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DOI: 10.1109/NEMS.2010.5592202

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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Jian Wang, Ying Huang, Wengang Wu, Yilong Hao:
Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment. NEMS 2010: 255-258

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