More Web Proxy on the site http://driver.im/

default search action

combined dblp search
author search
venue search
publication search

ask others

"Fabrication and evaluation of silicon micromechanical resonator using ..."

Nguyen Van Toan et al. (2014)

> Home

Details and statistics

DOI: 10.1109/NEMS.2014.6908747

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/ToanKSSO14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/ToanKSSO14
Nguyen Van Toan, Tomohiro Kubota, Halubai Seknar, Seiji Samukawa, Takahito Ono:
Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology. NEMS 2014: 1-5

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.