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"Nanomechanical mass sensor for monitoring deposition rates through ..."

Julien Arcamone et al. (2009)

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DOI: 10.1109/NEMS.2009.5068534

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - conf/nems/ArcamoneSVUABBBP09
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  persistent URL:
  - https://dblp.org/rec/conf/nems/ArcamoneSVUABBBP09
Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc A. F. van den Boogaart, Juergen Brugger, Francesc Pérez-Murano:
Nanomechanical mass sensor for monitoring deposition rates through confined apertures. NEMS 2009: 94-97

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