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"On-chip high speed microrobot made of Ni-Si composite structure with ..."

Masaya Hagiwara et al. (2011)

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DOI: 10.1109/MHS.2011.6102169

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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  - conf/mhs/HagiwaraKIMYA11
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Masaya Hagiwara, Tomohiro Kawahara, Toru Iijima, Taisuke Masuda, Yoko Yamanishi, Fumihito Arai:
On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. MHS 2011: 108-112

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