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"Numerical study of electrical characteristics in RF micro discharge."

A. Berkane, S. Rebiai (2015)

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DOI: 10.1109/ICOSC.2015.7153293

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-29

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A. Berkane, S. Rebiai:
Numerical study of electrical characteristics in RF micro discharge. ICSC 2015: 378-383

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