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"Tracking Control of the Z-Tilts Error Compensation Stage of the ..."

Van-Tsai Liu et al. (2007)

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DOI: 10.1007/978-3-540-74171-8_61

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-03

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Van-Tsai Liu, Chien-Hung Liu, Tsai-Yuan Chen, Chun-Liang Lin, Yu-Chen Lin:
Tracking Control of the Z-Tilts Error Compensation Stage of the Nano-measuring Machine Using Capacitor Insertion Method. ICIC (1) 2007: 616-625

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