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"Shape-based optimization of a plasma etching process."

Jordan M. Berg, Nan Zhou (2000)

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DOI: 10.1109/CDC.2000.914089

access: closed

type: Conference or Workshop Paper

metadata version: 2022-03-30

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Jordan M. Berg, Nan Zhou:
Shape-based optimization of a plasma etching process. CDC 2000: 2023-2028

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