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"Impact of Thermomechanical Stresses on Ultra-thin Si Stacked Structure."

Yoriko Mizushima et al. (2014)

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DOI: 10.1109/3DIC.2014.7152161

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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  dblp key:
  - conf/3dic/MizushimaKNKMFO14
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  - https://dblp.org/rec/conf/3dic/MizushimaKNKMFO14
Yoriko Mizushima, Young-Suk Kim, Tomoji Nakamura, Shoichi Kodama, Nobuhide Maeda, Koji Fujimoto, Takayuki Ohba:
Impact of Thermomechanical Stresses on Ultra-thin Si Stacked Structure. 3DIC 2014: 1-5

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