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Superconductivity in twisted bilayer WSe2

Abstract

Moiré materials have enabled the realization of flat electron bands and quantum phases that are driven by the strong correlations associated with flat bands1,2,3,4. Superconductivity has been observed, but only in graphene moiré materials5,6,7,8,9. The absence of robust superconductivity in moiré materials beyond graphene, such as semiconductor moiré materials4, has remained a mystery and challenged our current understanding of superconductivity in flat bands. Here we report the observation of robust superconductivity in both 3.5° and 3.65° twisted bilayer tungsten diselenide (WSe2), which hosts a hexagonal moiré lattice10,11. Superconductivity emerges near half-band filling and zero external displacement fields. The optimal superconducting transition temperature is about 200 mK in both cases and constitutes about 1–2% of the effective Fermi temperature; the latter is comparable to the value in high-temperature cuprate superconductors12 and suggests strong pairing. The superconductor borders on two distinct metals below and above half-band filling; it undergoes a continuous transition to a correlated insulator by tuning the external displacement field. The observed superconductivity on the verge of Coulomb-induced charge localization suggests roots in strong electron correlations12,13.

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Fig. 1: Electronic structure of tWSe2.
Fig. 2: Zero-resistance region around half-band filling.
Fig. 3: Superconductivity at half-band filling.
Fig. 4: Doping dependence of the superconducting state.
Fig. 5: Superconductor-to-insulator transition.

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Acknowledgements

We thank B. A. Bernevig, D. Chowdhury, S. Das Sarma, L. Fu, C. Jian, E.-A. Kim, K. T. Law, A. H. MacDonald and Q. Si for discussions; and J. Zhu and P. Knüppel for technical discussions. This work was supported by the US Department of Energy, Office of Science, Basic Energy Sciences, under award number DE-SC0019481 (transport measurements), the National Science Foundation DMR-1807810 (sample fabrication) and the Air Force Office of Scientific Research under award number FA9550-20-1-0219 (modelling). It was also funded in part by the Gordon and Betty Moore Foundation (grant number GBMF11563). We used the Cornell NanoScale Facility, an NNCI member supported by NSF Grant NNCI-2025233, for sample fabrication. The growth of the hBN crystals was supported by the Elemental Strategy Initiative of MEXT, Japan, and CREST (JPMJCR15F3), JST.

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Authors and Affiliations

Authors

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Y.X. and Z.H. fabricated the devices, performed the transport measurements and analysed the data. K.W. and T.T. grew the bulk hBN crystals. K.F.M. and J.S. designed the scientific objectives and oversaw the project. All authors discussed the results and commented on the paper.

Corresponding authors

Correspondence to Yiyu Xia, Zhongdong Han, Jie Shan or Kin Fai Mak.

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Nature thanks Sergio de la Barrera and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. Peer reviewer reports are available.

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Extended data figures and tables

Extended Data Fig. 1 Sample and device characterization.

a, Three-dimensional schematic of a tWSe2 dual-gated device. Both the top gate (TG) and bottom gate (BG) are made of hBN and few-layer graphite (Gr). The tWSe2 sample is contacted by Pt electrodes. The Pd contact gates (CG) and split gates (SG) turn on the Pt contacts and turn off the parallel channels, respectively. b, Optical micrograph of the 3.65° device. Specific features of interest are BG (enclosed by the black dashed line), TG (black solid line), uniform moiré region (red dashed line) and contact electrode 1–6. The scale bar is 4 µm. c,d, Filling factor dependence of two-terminal resistance R2t for different contact pairs at T = 1 K and B = 0 T. The sample is an insulator at ν ≈ 1 for E = 55 mV/nm (c). The variation in filling factor for the resistance peak is about 0.025, which corresponds to a disorder density of 1 × 1011 cm−2. The sample is a metal at ν ≈ 1 for E = 100 mV/nm (d) and the four-terminal resistance is below 350 Ω. The contact resistance is determined from R2t to be 10–40 kΩ.

Extended Data Fig. 2 Calibration of the moiré density.

a,b, Longitudinal resistance R as a function of E and ν at 50 mK under B = 0 T (a) and 12 T (b). Large bias current is used in the measurement and superconductivity is not observed in a. Landau levels are clearly observed in b. Landau levels with index νLL = 2-8 (denoted by dotted lines) in the layer-polarized region are spin- and valley-polarized (i.e. nondegenerate). In addition, the Zeeman-split vHS features under B = 12 T are marked by dashed lines; these features interrupt the quantum oscillations (the vertical stripes in b). The midpoint of the Zeeman-split features is in good agreement with the location of the single vHS feature under B = 0 T (dashed line in a). c, Landau level index νLL as a function of moiré lattice filling ν follows a linear dependence (blue line). The moiré density is determined from the slope to be nM (4.25 ± 0.03) × 1012 cm−2. d, R as a function of B and ν at 50 mK and E = 100 mV/nm. Two sets of Landau fan emerging from the moiré band edges (i.e. ν = 0 and ν = 2) are marked by the dashed lines. The results give the same moiré density as above. e, The derivative of the sample conductance with respect to \(\nu ({dG}/d\nu )\) as a function of ν and 1/B at 50 mK and E = 100 mV/nm. Hofstadter’s oscillations are observed as periodic crossings of Landau levels in 1/B, as denoted by the horizontal dashed lines. f, 1/B at the dashed lines in e as a function of the periodic index q. A linear fit to the data gives a 1/B period (5.8 ± 0.1) × 10−3 T−1, which corresponds to nM ≈ (4.22 ± 0.06) × 1012 cm−2. The value is in good agreement with that obtained from a-c.

Extended Data Fig. 3 Superconductivity in different measurement configurations.

a,b, Measurement configurations for four-terminal resistances: R46,23 (a) and R15,24 (b). A bias current is applied on the first two electrodes and the voltage drop is measured using the second two electrodes. The electrodes are labelled as in Extended Data Fig. 1b. Results in the main text are obtained using configuration a. c, Longitudinal resistance R as a function of E and ν at 50 mK and zero magnetic field using configuration b. d, Filling dependence of longitudinal resistance R for measurement configuration a and b at E ≈ 8 mV/nm and T = 50 mK. Independent of the measurement configuration, superconductivity is observed in tWSe2 near ν = 1.

Extended Data Fig. 4 Electronic band structure of 3.65°-tWSe2 from the continuum model.

a-c, Topmost moiré valence bands of the K-valley state for E = 0 mV/nm (a), 100 mV/nm (b) and 200 mV/nm (c). d-f, The corresponding electronic DOS as a function of filling ν. The vHS moves from ν < 1 at E = 0 mV/nm to ν > 1 at E = 200 mV/nm. The non-monotonic electric field dependence of DOS at the vHS is dependent on the lifetime broadening we include in the calculations.

Extended Data Fig. 5 Hall resistance.

a,b, Longitudinal resistance R (a) and Hall resistance Rxy (b) as a function of B and ν at T = 50 mK and E = 0 mV/nm. Large bias (above the critical current) is applied, and superconductivity is not observed. The strong Rxy response below filling 0.9 under small magnetic fields is an artifact because of the large magneto resistance and the coarse field step. The vHS manifests a peak in R (a) and a sign change in Rxy (b). The dashed lines are a guide to the eye of the location of the vHS for negative magnetic fields. The vHS is located at ν < 1 for B = 0 and rapidly disperses with B likely due to the combined Zeeman and orbital effects. c,d, Linecut of a,b at ν = 0.8 (c) and ν = 1.1 (d) with fine field scans. The measurement configuration is shown in the inset. We symmetrize and anti-symmetrize the response under positive and negative fields to obtain R and Rxy, respectively. Both forward and backward field scans are displayed. Magnetic hysteresis is not observed. Anomalous Hall effect is also not observed (Rxy = 0). The artifact in b is removed under fine field scans.

Extended Data Fig. 6 Determination of TP and Bc2.

a, Temperature dependence of the zero-bias resistance R at ν ≈ 1 (E ≈ 8 mV/nm and B = 0). The pairing temperature TP (≈ 250 mK, vertical dashed line) is defined as the temperature, at which the measured resistance (blue line) deviates from the projected normal-state resistance (orange line) by 20%. Blue line: polynomial fit to the data (symbols); orange line: linear fit to the normal-state resistance ranging from 300–400 mK. b, Magnetic-field dependence of the longitudinal resistance R at differing temperatures (ν ≈ 1 and E ≈ 8 mV/nm). c, Magnetic-field dependence of R at 50 mK. The critical field Bc2 (≈ 80 mT) is defined as the magnetic field, at which the orange and black dashed lines cross. Here the orange line is a linear fit to the normal-state resistance, and the black line is a fit of the unpinned vortex model, \(R\propto \frac{B}{{B}_{C2}}\), to experiment for B < BC2. d, Bias dependence of the differential resistance \(\frac{{dV}}{{dI}}\) at varying magnetic fields (ν = 1, E ≈ 8 mV/nm and T = 50 mK). The dashed line corresponds to Bc2.

Extended Data Fig. 7 Thermal activation analysis.

a, Arrhenius plot of the longitudinal resistance R at varying E (for ν = 1 and B = 0). The dashed lines show the thermal activation fit and the range of data where the fit is good. b, Extracted gap size T0 from a as a function of E near EC ≈ 11.7 mV/nm. The gap vanishes continuously as E approaches EC from above.

Extended Data Fig. 8 Superconductivity in a 3.5° device.

a,b, Longitudinal resistance R as a function of E and ν at 50 mK; b shows a zoom-in view of the boxed region in a. The dashed lines in a (a guide to the eye) separate the layer-hybridized and layer-polarized regions. The dotted lines in b are a guide to the eye of the zero-resistance region observed at 50 mK. c, Temperature dependence of zero-bias resistance R with two temperature scales, TBKT ≈ 160 mK and TP ≈ 210 mK. d, Differential resistance, \(\frac{{dV}}{{dI}}\), as a function of bias Iat different temperatures under zero applied magnetic field. The critical current vanishes continuously with increasing temperature. e, Differential resistance as a function of I under different magnetic fields at 50 mK. The critical current vanishes continuously with increasing magnetic field. f, Temperature dependence of zero-bias resistance R over a broad temperature range showing the temperature scale T*.

Extended Data Fig. 9 Van Hove singularity in a 4.6-degree device.

a,b, Longitudinal resistance R (a) and weak-field Hall resistance Rxy (b) as a function of E and ν at 1.5 K under B = 0.5 T. No correlated insulating state is observed at ν = 1 in this twist angle. The dotted line traces the vHS, where R shows a peak and Rxy changes sign. The dashed lines separate the layer-hybridized and layer-polarized regions. c, Electronic DOS versus E and ν. The vHS (ν ≈ 0.84 at E = 0) disperses towards higher ν with increasing E. The result is in good agreement with experiment.

Extended Data Fig. 10 Determination of Tcoh.

a, R as a function of T2 at varying filling factors for ν > 1. The dependence at low temperatures is described by R = R0 + AT2 (dashed line). At Tcoh, R deviates from the T2-dependence by 10% (arrows). The solids lines are polynomial fits to the data points. b, Filling factor dependence of Tcoh using 10% and 20% thresholds. The general trend is the same for the two thresholds.

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Xia, Y., Han, Z., Watanabe, K. et al. Superconductivity in twisted bilayer WSe2. Nature (2024). https://doi.org/10.1038/s41586-024-08116-2

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