Frontiers of silicon-on-insulator

GK Celler, S Cristoloveanu - Journal of Applied Physics, 2003 - pubs.aip.org
Silicon-on-insulator (SOI) wafers are precisely engineered multilayer semiconductor/dielectric
structures that provide new functionality for advanced Si devices. After more than three …

Silicon on Insulator Technology.

S Cristoloveanu - 1999 - books.google.com
Silicon-on-insulator (SOI) technology, more specifically silicon-on-sapphire, was originally
invented for the niche of radiation-hard circuits. In the last 25 years, a variety of SOI structures …

[PDF][PDF] Silicon on insulator technology review

RK Singh, A Saxena, M Rastogi - International Journal of …, 2011 - academia.edu
An effort to reduce the power consumption of the circuit, the supply voltage can be reduced
leading to reduction of dynamic and static power consumption. This paper introduces one of …

[PDF][PDF] The advancement of silicon-on-insulator (SOI) devices and their basic properties.

TE Rudenko, AN Nazarov… - … , Quantum Electronics & …, 2020 - researchgate.net
Silicon-on-insulator (SOI) is most promising present-day silicon technology. The use of SOI
provides significant benefits over traditional bulk silicon technology in fabrication of many …

[BOOK][B] Fully depleted silicon-on-insulator: nanodevices, mechanisms and characterization

S Cristoloveanu - 2021 - books.google.com
Fully Depleted Silicon-On-Insulator provides an in-depth presentation of the fundamental
and pragmatic concepts of this increasingly important technology. There are two main …

Fabrication and characterization of silicon-on-insulator wafers

T Kim, J Lee - Micro and Nano Systems Letters, 2023 - Springer
Silicon-on-insulator (SOI) wafers offer significant advantages for both Integrated circuits (ICs)
and microelectromechanical systems (MEMS) devices with their buried oxide layer …

Silicon-on-insulator waveguides

XC Tong Ph. D, XC Tong - Advanced Materials for Integrated Optical …, 2014 - Springer
While developed for the needs of microelectronics, the silicon-on-insulator (SOI) wafers are
excellent substrates for optical waveguides. SOI is a kind of structures formed by a thin layer …

Fully depletion of advanced silicon on insulator MOSFETs

MK Md Arshad, N Othman, U Hashim - Critical Reviews in Solid …, 2015 - Taylor & Francis
Scaling of the transistor has been tremendous successful in the beginning with reduction of
the gate oxide thickness and increase of doping concentration. Moving into smaller …

Electronic transport in nanometre-scale silicon-on-insulator membranes

P Zhang, E Tevaarwerk, BN Park, DE Savage… - Nature, 2006 - nature.com
The widely used ‘silicon-on-insulator’ (SOI) system consists of a layer of single-crystalline
silicon supported on a silicon dioxide substrate. When this silicon layer (the template layer) is …

Fabrication of silicon-on-insulator with high uniform top Si for silicon photonics applications

N Gao, M Chen, H Xu, Z Xue, N Zhang, L Fei… - Materials Science in …, 2020 - Elsevier
Silicon-on-insulator (SOI) is the most suitable platform for silicon photonics applications owing
to its unique structure and excellent compatibility. To satisfy the requirement of uniformity, …