This Letter presents the effectiveness of an oxide trench array (OTA) as a passive temperature
compensation structure for aluminum nitride on silicon (AlN-on-Si) quasi-surface acoustic …

This paper presents the etch rate of lithium niobate (LiNbO 3 ) as a function of crystal
orientation. Etching is a fundamental technology needed for the fabrication of new sensors, …

This paper reports a passively temperature-compensated dual-frequency micromachined
resonator which has been experimentally demonstrated to perform accurate sensing of …

Surface acoustic wave (SAW) devices are used in many areas of telecommunications, and
other areas where precise filtering is need. New devices and specification require tighter …

We consider two memory nodes of a quantum network connected by flying qubits. We are
particularly interested in the case where a flying qubit produced by one node has to be …

From the early Christian era and throughout the Middle Ages, theologians exerted considerable
effort to achieve a synthesis bringing together Greek cosmology and the Creation story …

This paper presents a process technology to form thin diaphragms with sealed cavities in a
lithium niobate (LiNbO 3 ) wafer, which will be used for small and sensitive SAW-based …

This paper reports a highly sensitive aluminum nitride (AlN) based resonant uncooled infrared
(IR) detector utilizing photo-sensitive and piezoelectric properties of polycrystalline AlN. …

The use of length sensors is crucial in providing feedback control in the field of soft robotics.
One such type of length sensor utilises the attenuation of light along a highly extensible …

In this paper, we present a novel process for the fabrication of thin diaphragms in lithium
niobate (LiNbO 3) wafers for various sensor applications. The process uses a thermal inversion …