WO2021051467A1 - Semiconductor laser - Google Patents
Semiconductor laser Download PDFInfo
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- WO2021051467A1 WO2021051467A1 PCT/CN2019/112278 CN2019112278W WO2021051467A1 WO 2021051467 A1 WO2021051467 A1 WO 2021051467A1 CN 2019112278 W CN2019112278 W CN 2019112278W WO 2021051467 A1 WO2021051467 A1 WO 2021051467A1
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- light
- semiconductor laser
- emitting module
- collimating lens
- axis collimating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
- G02B27/0922—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers the semiconductor light source comprising an array of light emitters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4075—Beam steering
Definitions
- the embodiments of the present application relate to the field of laser technology, and in particular to a semiconductor laser.
- the semiconductor laser 100 includes two or more parallel arranged in a row.
- the light emitting module 110 includes a semiconductor laser chip 111, a fast axis collimating lens 112, a slow axis collimating lens 113, and a reflecting mirror 114 arranged in sequence.
- the laser light emitted by the semiconductor laser chip 111 passes through the fast axis collimating lens 112 and the slow axis in sequence.
- the axis collimator lens 113 and the reflecting mirror 114 reach the above-mentioned focusing lens 120.
- the housing 140 is provided with two or more carrying steps 141 that are staggered from each other in the height direction of FIG. 2. Among the two adjacent carrying steps 141, the carrying step 141 on the side close to the focusing lens 120 is lower than the one far away from the focusing lens 120.
- the light-emitting modules 110 correspond to the supporting steps 141 one-to-one, and are respectively arranged on the supporting steps 141, so that the laser light emitted by the light-emitting modules 110 are staggered with each other, so as to avoid being located on the side close to the focusing lens 120
- the reflecting mirror 114 shields the laser light emitted by the light emitting module 110 on the side away from the focusing lens 120.
- the semiconductor laser needs to correspondingly increase the number of semiconductor laser chips, but increasing the semiconductor laser chip will cause As a result, the size of the collimated beam in the height direction ( Figure 2) is too large.
- the NA value the size of the cone angle when the laser enters the fiber
- the quality is low.
- the purpose of this application is to provide a semiconductor laser to solve the current technical problems of the low brightness and quality of the emitted laser light of the semiconductor laser.
- a semiconductor laser including:
- Polarization beam combiner with transmission end face, reflection end face and exit end face;
- the first light-emitting module is configured to emit laser light, and the laser light emitted by the first light-emitting module transmits through the polarization beam combiner from the transmission end surface to the emission end surface;
- the second light-emitting module is configured to emit laser light.
- the laser light emitted by the second light-emitting module enters the polarization beam combiner from the reflecting end surface, is reflected in the polarization beam combiner, and then is emitted from the emission end surface ;
- a focusing lens for receiving and focusing the laser light emitted from the emitting end surface
- the optical fiber is used to receive the laser light emitted from the focusing lens.
- the first light-emitting module includes a first semiconductor laser chip, a first fast-axis collimating lens, and a first slow-axis collimating lens arranged in sequence, and the first semiconductor laser chip emits The laser light may pass through the first fast-axis collimating lens and the first slow-axis collimating lens in sequence.
- the first light-emitting module further includes a first reflector, and the first reflector and the first fast-axis collimating lens are respectively provided on the first slow-axis collimating lens On both sides
- the first reflecting mirror is used for receiving the laser light emitted from the first slow axis collimating lens, and reflecting the received laser light to the transmission end surface.
- the second light emitting module includes a second semiconductor laser chip, a second fast axis collimating lens, and a second slow axis collimating lens arranged in sequence, and the second semiconductor laser chip emits The laser light can pass through the second fast axis collimating lens and the second slow axis collimating lens in sequence.
- the second light emitting module further includes a second reflector, and the second reflector and the second fast axis collimating lens are respectively provided on the second slow axis collimating lens On both sides
- the second reflecting mirror is used for receiving the laser light emitted from the second slow axis collimating lens, and reflecting the received laser light to the reflecting end surface.
- the second light-emitting module further includes a second reflector, and the second reflector and the second fast-axis collimating lens are respectively disposed on both sides of the second slow-axis collimating lens, and the second reflector
- the mirror is used to receive the laser light emitted from the second slow axis collimating lens and reflect the received laser light to the reflector;
- the reflector is used for receiving the laser light emitted from the second mirror and reflecting the received laser light to the reflecting end surface.
- the number of the first light-emitting modules is more than two, and each of the first semiconductor laser chips of the two or more first light-emitting modules is along the height direction of the polarization beam combiner Staggered arrangement, the second light emitting module corresponds to the first light emitting module one-to-one, and the first semiconductor laser chip and the second semiconductor laser chip corresponding to each other are located at the same height relative to the polarization beam combiner.
- the first light-emitting module and the second light-emitting module are arranged opposite to each other, and along the direction from the first reflector to the polarization beam combiner, the second light-emitting module and the second light-emitting module are opposite to each other.
- the first light-emitting modules are staggered with each other.
- the first semiconductor laser chip and the second semiconductor laser chip are arranged opposite to each other;
- the first semiconductor laser chip and the second semiconductor laser chip are staggered from each other;
- the first semiconductor laser chip and the second semiconductor laser chip are arranged opposite to each other;
- the first semiconductor laser chip and the second semiconductor laser chip are staggered from each other;
- the second semiconductor laser chip is located between the first semiconductor laser chip and the first slow axis collimating lens.
- the semiconductor laser provided in this application includes a polarization beam combiner, a first light-emitting module, a second light-emitting module, a focusing lens, and an optical fiber.
- the polarization beam combiner is provided with a transmission end face, a reflection end face and an emission end face; the laser light emitted by the first light-emitting module can be transmitted through the polarization beam combiner from the transmission end face to the emission end face; the laser light emitted by the second light-emitting module can be The reflection from the reflection end surface to the emission end surface passes through the polarization beam combiner.
- the light-emitting modules are arranged in parallel in a row for beam combination.
- the semiconductor laser provided in the embodiment of the present application is equivalent to dividing the light-emitting module into two modules, namely: the first light-emitting module and the second light-emitting module.
- Module wherein the laser light emitted by the first light-emitting module is transmitted through the polarization beam combiner from the transmission end face of the polarization beam combiner, and the laser light emitted by the second light-emitting module enters the polarization beam combiner from the reflection end face, and is inside the polarization beam combiner Reflected and ejected through the exit end face.
- Figure 1 is a top view of a conventional semiconductor laser
- Fig. 2 is a front view of the conventional semiconductor laser in Fig. 1;
- FIG. 3 is a top view of a semiconductor laser provided by one of the embodiments of the application.
- Fig. 4 is a front view of the semiconductor laser in Fig. 3;
- Fig. 5 is a schematic diagram of the polarization beam combiner in Fig. 3;
- FIG. 6 is a schematic diagram of the staggered arrangement of each first light-emitting module and each second light-emitting module in FIG. 3;
- FIG. 7 is a top view of a semiconductor laser provided by another embodiment of the application.
- the "installation” includes welding, screwing, clamping, bonding, etc. to fix or restrict a certain element or device to a specific position or place, and the element or device can be held in a specific position or place. It can also move within a limited range without moving, and the element or device can be disassembled or cannot be disassembled after being fixed or restricted to a specific position or place, which is not limited in the embodiment of the present application.
- FIGS. 3 to 4 respectively show a top view and a front view of a semiconductor laser provided by one of the embodiments of the present application.
- the semiconductor laser 200 includes a first light emitting module 210, a second light emitting module 220, and a polarization beam combiner 230, a focusing lens 240, an optical fiber 250, a reflector 270, and a housing 260 for installing the above-mentioned components.
- the first light-emitting module 210 and the second light-emitting module 220 are both used to emit laser light.
- the laser light emitted by the first light-emitting module 210 passes through the polarization beam combiner 230 in a transmission manner and reaches the focusing lens 240.
- the second light-emitting module 220 The emitted laser light passes through the reflector 270 and the polarization beam combiner 230 in a reflective manner and reaches the above-mentioned focusing lens 240.
- the focusing lens 240 couples the laser light emitted by the first light-emitting module 210 and the second light-emitting module 220 and focuses and guides them to Fiber 250.
- the first light-emitting module 210 includes a first semiconductor laser chip 211, a first fast-axis collimating lens 212, a first slow-axis collimating lens 213, and a first semiconductor laser chip 211, which are arranged in sequence.
- Reflecting mirror 214, the laser light emitted by the first semiconductor laser chip 211 may sequentially pass through the first fast axis collimating lens 212, the first slow axis collimating lens 213, and the first reflecting mirror 214 to the polarization beam combiner 230.
- the first fast axis collimating lens 212 and the first slow axis collimating lens 213 are both used to collimate the laser light emitted by the first light emitting module 210; the first mirror 214 and the first fast axis collimating lens 212 They are located on both sides of the first slow-axis collimating lens 213, and the first reflecting mirror 214 is used to receive the laser light emitted from the first slow-axis collimating lens 213 and reflect the laser light to the polarization beam combiner 230, that is, to The laser light emitted by a semiconductor laser chip 211 undergoes commutation processing.
- the first light emitting module 210 may not include the first reflector 214, that is, the laser light emitted by the first semiconductor laser chip 211 directly passes through the first fast axis collimating lens. 212 and the first slow axis collimating lens 213 reach the polarization beam combiner 230.
- the number of the first light emitting module 210 may be one or more than two. In this embodiment, the number of the first light emitting module 210 is three, and the three first light emitting modules 210 are arranged in parallel in a row.
- the housing 260 is provided with three The height of the first supporting step 261 relative to the bottom of the housing 260 is different.
- the height of the three first supporting steps 261 gradually decreases from the end away from the polarization beam combiner 230 to the end close to the polarization beam combiner 230, and the three first light-emitting modules 210 are separately arranged at On the three first supporting steps 261, the light emitted by the three first light-emitting modules 210 through the respective first reflecting mirrors 214 are staggered with each other.
- the light emitted by the first light-emitting modules can also be staggered with each other in other ways, as long as the first mirror points to the polarization beam combiner along the direction perpendicular to the first reflector, so that the first light-emitting modules point to the polarization beam combiner.
- the first mirrors of a light-emitting module can be staggered; for example, in some embodiments of the present application, the first light-emitting modules are arranged in a row in parallel, and are installed on the same height plane relative to the bottom of the housing, and then along the vertical The first mirror points to the direction of the polarization beam combiner, so that the first mirrors of the first light-emitting modules are staggered with each other, so that the laser light emitted by the first light-emitting modules is staggered with each other; another example: In some embodiments, the first light-emitting modules are arranged in a row in parallel along the height direction of the housing, so that the first mirrors of the first light-emitting modules are staggered with each other, so that the laser light emitted by the first light-emitting modules is staggered.
- the second light-emitting module 220 is arranged opposite to the first light-emitting module 210 and is similar to the first light-emitting module 210.
- the second light-emitting module 220 includes second semiconductor lasers arranged in sequence. Chip 221, the second fast axis collimating lens 222, the second slow axis collimating lens 223 and the second mirror 224, the laser light emitted by the second semiconductor laser chip 221 can pass through the second fast axis collimating lens 222, the second The slow axis collimating lens 223 and the second reflecting mirror 224.
- the second light emitting module 220 may not include the second reflector 224, that is, the laser light emitted by the second semiconductor laser chip 221 directly passes through the second fast axis collimating lens 222 and the second slow axis collimating lens 223 reach the reflector 270.
- the number of the second light emitting module 220 may be one or more than two. In this embodiment, the number of the second light emitting module 220 is three, and the three second light emitting modules 220 are arranged in parallel in a row.
- each second carrier can make the light emitted by each second light-emitting module 220 through the respective second reflector 224 stagger each other; at the same time, because the second light-emitting module 220 and the first light-emitting module 210 corresponding to each other are relatively polarized and combined
- the height of the laser light from the second light-emitting module 220 reflected by the reflector 270 to the polarization beam combiner 230 is the same as that of the laser light emitted by the first light-emitting module 210 reaching the polarization beam combiner 230 at the same height.
- the light emitted by the second light-emitting modules can also be staggered with each other in other ways, as long as the second light-emitting module is perpendicular to the direction of the second reflector pointing to the reflector.
- the two mirrors can be staggered separately; for example, in some embodiments of the present application, the second light-emitting modules are arranged in a row in parallel, and are installed on the same height plane relative to the bottom of the housing, and then along the vertical direction from the second mirror Point to the direction of the reflector, so that the second mirrors of the second light-emitting modules are staggered with each other, so as to realize the staggering of the laser light emitted by the second light-emitting modules; for another example: in some other embodiments of the present application, the second mirrors of the second light-emitting modules are staggered.
- the two light-emitting modules are arranged in a row in parallel along the height direction of the casing, so that the second reflection mirrors of the second light-emitting modules are staggered with each other, so as to realize the staggering of the laser light emitted by the second light-emitting modules.
- the reflector 270 is used to receive the laser light emitted from each of the second light-emitting modules 220 and reflect the laser light received to the polarization beam combiner 230.
- the polarization beam combiner 230 is formed by glueing and fixing two triangular prisms arranged oppositely. , It is provided with a transmissive end surface 231, a reflective end surface 232, and an exit end surface 233.
- the transmissive end surface 231 is used to receive the laser light emitted from the first light-emitting module 210
- the reflective end surface 232 is used to receive the laser light emitted from the second light-emitting module 220 and reflected by the reflector 270.
- This application utilizes the characteristics that the P-polarized light in the laser can be transmitted through the polarization beam combiner 230, and the S-polarized light in the laser can be reflected through the polarization beam combiner 230, and combined with the characteristics of a very high proportion of P light in the laser light emitted by the semiconductor laser
- the light emitted by the first light-emitting module 210 is guided to the above-mentioned transmission end surface 231, and most of the light beams can be transmitted through the polarization beam combiner 230; at the same time, the light beams emitted by the second light-emitting module 220 are guided through the reflector 270 to By reflecting the end surface 232, the S light in the laser can be reflected at the junction of the two triangular prisms, and then emitted through the exit end surface 233.
- a half-wave plate 234 is provided at the reflective end face 232, which is used to modulate the P-polarized light in the laser light emitted by the second light-emitting module 220 into S-polarized light, so that the second light-emitting module 220 emits and enters the polarization combination.
- the incident angle (and reflection angle) of the laser light emitted by the first semiconductor laser chip 211 and the first mirror 214 in this embodiment is 45 degrees, and the laser light reflected by the first mirror 214 is perpendicular
- the polarization beam combiner 230 is incident on the transmission end surface 231; in the same way, the incident angle (and reflection angle) of the laser light emitted by the second semiconductor laser chip 221, the second mirror 224 and the reflector 270 are both 45 degrees, that is, the second reflection
- the mirror 224 and the reflector 270 are arranged in parallel, and the laser light reflected by the reflector 270 enters the polarization beam combiner 230 perpendicular to the reflection end surface 232.
- the focusing lens 240 and the optical fiber 250 are installed in the housing 260, and are sequentially arranged on the side of the emission end surface 233 away from the transmission end surface 231.
- the focusing lens 240 is used to focus the light beam output from the polarization beam combiner 230 and guide it to the incident port of the optical fiber 250, and the end of the optical fiber 250 away from the focusing lens 240 can output the coupled laser light.
- first reflector 214 and the second reflector 224 are often made by coating a reflective film on a glass material, and the energy of the laser is very high, part of the laser light may pass through the corresponding reflector and reach the opposite light-emitting module. ;
- the laser light emitted by the first light emitting module 210 located opposite from being transmitted through the first reflector 214 and then pass through the second reflector 224 and the second slow axis collimation of the second light emitting module 220 that are located opposite to and corresponding to it in turn
- the straight lens 223 and the second fast axis collimating lens 222 reach the second semiconductor laser chip 221, thereby causing damage to the second semiconductor laser chip 221.
- each first light-emitting module 210 and each second light-emitting module 220 The directions along the first mirror 214 pointing to the polarization beam combiner 230 are staggered.
- FIG. 6 shows a schematic diagram of each first light-emitting module 210 and each second light-emitting module 220 being staggered.
- the figure only shows one first light-emitting module 210.
- the energy of the laser beam is mainly concentrated in the central part, and the ratio of the energy on both sides is very low.
- the distribution of the laser light penetrating the first mirror 214 is also the same as that described above.
- the collimating lens 223 and the second fast axis collimating lens 222 have extremely low energy reaching the second semiconductor laser chip 221, and will not cause damage to the second semiconductor laser chip 221.
- the distance between the first light-emitting module and the second light-emitting module can be adjusted appropriately on the basis of the figure, so that the left and right edge beams of the laser cannot be incident on the corresponding mirror, slow-axis collimating lens and fast light-emitting module of the opposite light-emitting module.
- each first light-emitting module 210 and each second light-emitting module 220 can avoid damage to the first semiconductor laser chip 211 and the second semiconductor laser chip 221, and prolong the overall service life of the semiconductor laser 200.
- each first semiconductor laser chip 211 passes through the corresponding first fast-axis collimating lens 212, first slow-axis collimating lens 213, and The first mirror 214 then sequentially transmits through the transmission end face 231 and the exit end face 233 of the polarization beam combiner, and then transmits through the focusing lens 240, and finally reaches the entrance port of the optical fiber 250 and outputs from the exit port of the optical fiber 250; each second semiconductor
- the laser light emitted by the laser chip 221 sequentially passes through the corresponding second fast axis collimating lens 222, the second slow axis collimating lens 223 and the second mirror 224, and then is reflected through the reflector 270, and then modulated into S by the half-wave plate 234
- the polarized light then enters the polarization beam combiner 230 from the reflective end face 232 and is reflected at the junction of the two prisms and exit
- the semiconductor laser includes a first light emitting module 210, a second light emitting module 220, a polarization beam combiner 230, a focusing lens 240, and an optical fiber 250.
- the polarization beam combiner 230 is provided with a transmission end face 231, a reflection end face 232, and an emission end face 233; the laser light emitted by the first light emitting module 210 can be transmitted through the polarization beam combiner 230 from the transmission end face 231 to the emission end face 233 as a whole;
- the laser light emitted by the two light-emitting modules 220 can be reflected in the polarization beam combiner 230 from the reflection end surface 232 to the emission end surface 233 through the polarization beam combiner 230.
- the semiconductor laser provided in the embodiment of the present application is equivalent to dividing the light-emitting module into two modules, namely: the first light-emitting module 210 and The second light-emitting module 220 is then combined by the polarization beam combiner 230.
- the laser light emitted by the first light-emitting module 210 is transmitted through the polarization beam combiner 230 from the transmission end surface of the polarization beam combiner 230, and the laser light emitted by the second light-emitting module 220 enters the polarization beam combiner 230 from the reflection end surface 232 and enters the polarization beam combiner 230.
- the combined polarization beam reflects internally, and then exits from the exit end face 233.
- the number of the first light-emitting module 210 and the second light-emitting module 220 is less than the number of the light-emitting modules in the semiconductor lasers currently on the market, so the first light-emitting module 210 and the second light-emitting module 220
- the laser light emitted to the polarization beam combiner 230 and the focusing lens 240 is more concentrated than a conventional semiconductor laser; and by simply adjusting the height position of the first light-emitting module 210 and the second light-emitting module 220 relative to the polarization beam combiner 230,
- the laser beams emitted by the first light emitting module 210 and the second light emitting module 220 from the emission end surface 233 to the focusing lens 240 can be substantially coincident, thereby reducing the NA Value (the cone angle of the laser entering the fiber), which can make the laser
- the reflector may not be present.
- the laser light emitted by the second light-emitting module directly enters the polarization beam combiner through the half-wave plate; each semiconductor laser chip is incident on the corresponding reflector.
- the angle may also be other angles other than 45 degrees; the first light-emitting module may not be arranged on the first carrying step as a whole, but only the first semiconductor laser chip is arranged on the first carrying step.
- the first fast axis The collimating lens, the first slow-axis collimating lens and the first reflecting mirror are all fixed on the bottom of the casing, or the first semiconductor laser chip and the first reflecting mirror are arranged on the above-mentioned first carrying step, correspondingly, the first fast The axis collimating lens and the first slow axis collimating lens are fixed at the bottom of the housing, as long as the light beams falling on the first mirrors are staggered along the height direction of the polarization beam combiner, the second light-emitting module and the first The light-emitting modules are the same and are not limited here.
- FIG. 7 shows a top view of a semiconductor laser 300 provided by another embodiment of the present application.
- the semiconductor laser 300 includes a first light-emitting module 310, a second light-emitting module 320, and a polarizer.
- the main difference between the semiconductor laser 300 and the semiconductor laser 200 in the previous embodiment is:
- the overall structure of the first light-emitting module 210 and the second light-emitting module 220 in the first embodiment are arranged opposite to each other along the direction in which the first semiconductor laser chip points to the first reflector; while the first light-emitting module 310 and the second light-emitting module in this embodiment are opposite to each other.
- the overall structure of the module 320 partially overlaps along the direction in which the first semiconductor laser chip points to the first reflector.
- the first light-emitting module 310 includes a first semiconductor laser chip 311, a first fast-axis collimating lens 312, a first slow-axis collimating lens 313, and a first mirror 314 that are arranged in sequence;
- the second light-emitting module 320 includes sequentially The second semiconductor laser chip 321, the second fast axis collimating lens 322, the second slow axis collimating lens 323 and the second mirror 324 are arranged.
- the first semiconductor laser chip 311 and the second semiconductor laser chip 321 are disposed oppositely, and both are located on the side of the polarization beam combiner 330 where the half-wave plate is provided.
- Each first semiconductor laser chip 311 and the second semiconductor laser chip 321 is staggered along the direction in which the first reflector 314 points to the polarization beam combiner 330, and the corresponding first semiconductor laser chip 311 and the second semiconductor laser chip 321 are located at the same height relative to the polarization beam combiner 330.
- Each of the first slow-axis collimating lens 313 and the second slow-axis collimating lens 323, each of the first mirrors 314, and each of the second mirrors 324 are fixed on the bottom of the housing 260.
- the first semiconductor laser chip 311 is located on the second semiconductor laser chip between 321 and the second slow-axis collimating lens 323, the second semiconductor laser chip 321 is located between the first semiconductor laser chip 311 and the first slow-axis collimating lens 313.
- the semiconductor laser 300 provided in this embodiment is similar to the semiconductor laser 200 in the above-mentioned embodiment, and the NA value can be reduced through the arrangement of the rows.
- each first light-emitting module 310 and each first light-emitting module 310 are connected to each other.
- the staggered arrangement of the two light-emitting modules 320 can prevent the laser light emitted by the opposite semiconductor laser chip from damaging the opposite semiconductor laser chip.
- the semiconductor laser 300 provided in this embodiment connects the first light-emitting module 310 and the second light-emitting module along the direction of the first semiconductor laser chip 311 to the first mirror 314.
- the arrangement of 320 is partially overlapped, so that the space occupied by the first light-emitting module 310 and the second light-emitting module 320 as a whole can be smaller, and the internal structure of the semiconductor laser 300 is arranged more compactly, thereby helping to reduce the size of the semiconductor laser 300. volume.
- the size of the spot profile of the final light beam output by the optical fiber 350 is proportional to the focal length of the focusing lens and inversely proportional to the focal length of the collimating lens, in order to minimize the profile of the spot, a collimating lens with a larger focal length is required.
- a larger focal length means a larger outer diameter of the collimating lens.
- the size of the first slow-axis collimating lens 313 needs to be correspondingly increased, and further, in order to prevent the larger-sized first slow-axis collimating lens from interfering with the adjacent second light-emitting module In the optical path of the laser light emitted by the second semiconductor laser 321, the distance between the adjacent first light-emitting module 310 and the second light-emitting module 320 needs to be increased, so that the size of the semiconductor laser will increase accordingly.
- the first slow axis collimating lens 313 is disposed on the side of the second semiconductor laser chip 321 away from the second slow axis collimating lens 323, and the second slow axis collimating lens 323 is disposed on the first semiconductor laser chip 321.
- the laser chip 311 is far away from the side of the first slow-axis collimating lens 313, which can avoid intervening adjacent light-emitting modules when replacing the first slow-axis collimating lens and/or the second slow-axis collimating lens with a lens with a large focal length. In the optical path, thereby further reducing the volume of the semiconductor laser.
- the semiconductor laser provided in this embodiment can increase the aperture and focal length of the first slow axis collimating lens and/or the second slow axis collimating lens as much as possible under the same volume, thereby making the output spot size Smaller, higher beam quality.
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Abstract
A semiconductor laser, comprising: a polarization beam combiner (230, 330) provided with a transmission end face (231), a reflection end face (232) and an emission end face (233); a first light-emitting module (210, 310), laser light emitted thereby being transmitted through the polarization beam combiner (230, 330) from the transmission end face (231) to the emission end face (233); a second light-emitting module (220, 320), laser light emitted thereby entering the polarization beam combiner (230, 330) from the reflection end face (232), being reflected in the polarization beam combiner (230, 330), and then being emitted from the emission end face (233); a focusing lens (240, 340) used for receiving laser light emitted from the emission end face (233); and an optical fiber (250, 350) used for receiving laser light emitted from the focusing lens (240, 340). By simply adjusting positions of the first light-emitting module (210, 310) and the second light-emitting module (220, 320) with respect to the polarization beam combiner (230, 330), laser beams emitted by the two modules and emitted from the emission end face (233) can basically coincide, so that the brightness and quality of the laser light are high.
Description
本申请实施例涉及激光器技术领域,尤其涉及一种半导体激光器。The embodiments of the present application relate to the field of laser technology, and in particular to a semiconductor laser.
随着科技的快速发展,半导体激光器的应用得到大面积的推广。近年来,为提升半导体激光器的使用性能,其功率不断提高;而相应的,用户在期望半导体激光器功率提高的同时,还能够保证其具有高光束质量以及高亮度的性能。With the rapid development of science and technology, the application of semiconductor lasers has been widely promoted. In recent years, in order to improve the performance of semiconductor lasers, its power has been continuously increased; and correspondingly, users expect to increase the power of semiconductor lasers while ensuring that they have high beam quality and high brightness performance.
目前市场上的半导体激光器大多采用空间合束结构,具体可参见图1及图2,其分别示出了传统半导体激光器结构的俯视图和主视图,该半导体激光器100包括两个以上平行排列成一排的发光模块110、用于接收发光模块110发出的激光并对其进行聚焦的聚焦透镜120、用于接收自聚焦透镜120出射的激光的光纤130,以及用于安装上述各部件的壳体140。其中,发光模块110包括依次排列的半导体激光芯片111、快轴准直透镜112、慢轴准直透镜113以及反射镜114,半导体激光芯片111发出的激光依次经过上述快轴准直透镜112、慢轴准直透镜113以及反射镜114到达上述聚焦透镜120处。壳体140上设有沿图2高度方向彼此错开的两个以上承载台阶141,其中,相邻的两承载台阶141之间,靠近聚焦透镜120一侧的承载台阶141低于远离聚焦透镜120一侧的承载台阶141,上述各发光模块110与各承载台阶141一一对应且分别设于上述承载台阶141上,以使各发光模块110发射的激光彼此错开,从而避免位于靠近聚焦透镜120一侧的反射镜114遮挡远离聚焦透镜120一侧的发光模块110发射的激光。本申请的发明人在实现本申请的过程中发现:在该传统半导体激光器结构的框架下,为了提高半导体激光器的输出功率,该半导体激光器需要相应增加半导体激光芯片的数量,但是增加半导体激光芯片会造成准直光束在高度方向(图2)上的尺寸过大,相应的,NA值(激光进入光纤时锥角的大小)也相应增大,从而导致光纤130出射的光束亮度提升不明显,光束质量较低。At present, most of the semiconductor lasers on the market adopt a spatial beam combining structure. For details, see Figures 1 and 2, which respectively show a top view and a front view of a traditional semiconductor laser structure. The semiconductor laser 100 includes two or more parallel arranged in a row. The light emitting module 110, the focusing lens 120 for receiving and focusing the laser light emitted by the light emitting module 110, the optical fiber 130 for receiving the laser light emitted from the focusing lens 120, and the housing 140 for installing the above-mentioned components. Wherein, the light emitting module 110 includes a semiconductor laser chip 111, a fast axis collimating lens 112, a slow axis collimating lens 113, and a reflecting mirror 114 arranged in sequence. The laser light emitted by the semiconductor laser chip 111 passes through the fast axis collimating lens 112 and the slow axis in sequence. The axis collimator lens 113 and the reflecting mirror 114 reach the above-mentioned focusing lens 120. The housing 140 is provided with two or more carrying steps 141 that are staggered from each other in the height direction of FIG. 2. Among the two adjacent carrying steps 141, the carrying step 141 on the side close to the focusing lens 120 is lower than the one far away from the focusing lens 120. The light-emitting modules 110 correspond to the supporting steps 141 one-to-one, and are respectively arranged on the supporting steps 141, so that the laser light emitted by the light-emitting modules 110 are staggered with each other, so as to avoid being located on the side close to the focusing lens 120 The reflecting mirror 114 shields the laser light emitted by the light emitting module 110 on the side away from the focusing lens 120. In the process of realizing this application, the inventor of the present application discovered that in the framework of the traditional semiconductor laser structure, in order to increase the output power of the semiconductor laser, the semiconductor laser needs to correspondingly increase the number of semiconductor laser chips, but increasing the semiconductor laser chip will cause As a result, the size of the collimated beam in the height direction (Figure 2) is too large. Correspondingly, the NA value (the size of the cone angle when the laser enters the fiber) is also increased correspondingly, resulting in an insignificant increase in the brightness of the beam emitted by the optical fiber 130. The quality is low.
发明内容Summary of the invention
本申请旨在提供一种半导体激光器,以解决目前的半导体激光器的出射激光亮度及质量较低的技术问题。The purpose of this application is to provide a semiconductor laser to solve the current technical problems of the low brightness and quality of the emitted laser light of the semiconductor laser.
本申请解决其技术问题采用以下技术方案:This application uses the following technical solutions to solve its technical problems:
一种半导体激光器,包括:A semiconductor laser, including:
偏振合束器,设有透射端面、反射端面和出射端面;Polarization beam combiner with transmission end face, reflection end face and exit end face;
第一发光模块,用于发射激光,所述第一发光模块发射的激光自所述透射端面至所述出射端面透射经过所述偏振合束器;The first light-emitting module is configured to emit laser light, and the laser light emitted by the first light-emitting module transmits through the polarization beam combiner from the transmission end surface to the emission end surface;
第二发光模块,用于发射激光,所述第二发光模块发射的激光自所述反射端面进入所述偏振合束器,并于所述偏振合束器内反射,然后自所述出射端面射出;The second light-emitting module is configured to emit laser light. The laser light emitted by the second light-emitting module enters the polarization beam combiner from the reflecting end surface, is reflected in the polarization beam combiner, and then is emitted from the emission end surface ;
聚焦透镜,用于接收自所述出射端面射出的激光,并进行聚焦;A focusing lens for receiving and focusing the laser light emitted from the emitting end surface;
光纤,用于接收自所述聚焦透镜射出的激光。The optical fiber is used to receive the laser light emitted from the focusing lens.
作为上述技术方案的进一步改进方案,所述第一发光模块包括依次排列的第一半导体激光芯片、第一快轴准直透镜以及第一慢轴准直透镜,所述第一半导体激光芯片发出的激光可依次经过所述第一快轴准直透镜以及第一慢轴准直透镜。As a further improvement of the above technical solution, the first light-emitting module includes a first semiconductor laser chip, a first fast-axis collimating lens, and a first slow-axis collimating lens arranged in sequence, and the first semiconductor laser chip emits The laser light may pass through the first fast-axis collimating lens and the first slow-axis collimating lens in sequence.
作为上述技术方案的进一步改进方案,所述第一发光模块还包括第一反射镜,所述第一反射镜与所述第一快轴准直透镜分别设于所述第一慢轴准直透镜的两侧;As a further improvement of the above technical solution, the first light-emitting module further includes a first reflector, and the first reflector and the first fast-axis collimating lens are respectively provided on the first slow-axis collimating lens On both sides
所述第一反射镜用于接收自所述第一慢轴准直透镜出射的激光,并将接收的所述激光反射至所述透射端面。The first reflecting mirror is used for receiving the laser light emitted from the first slow axis collimating lens, and reflecting the received laser light to the transmission end surface.
作为上述技术方案的进一步改进方案,所述第二发光模块包括依次排列的第二半导体激光芯片、第二快轴准直透镜以及第二慢轴准直透镜,所述第二半导体激光芯片发出的激光可依次经过所述第二快轴准直透镜以及第二慢轴准直透镜。As a further improvement of the above technical solution, the second light emitting module includes a second semiconductor laser chip, a second fast axis collimating lens, and a second slow axis collimating lens arranged in sequence, and the second semiconductor laser chip emits The laser light can pass through the second fast axis collimating lens and the second slow axis collimating lens in sequence.
作为上述技术方案的进一步改进方案,所述第二发光模块还包括第二反射镜,所述第二反射镜与所述第二快轴准直透镜分别设于所述第二慢轴准直透镜的两侧;As a further improvement of the above technical solution, the second light emitting module further includes a second reflector, and the second reflector and the second fast axis collimating lens are respectively provided on the second slow axis collimating lens On both sides
所述第二反射镜用于接收自所述第二慢轴准直透镜出射的激光,并将接收的所述激光反射至所述反射端面。The second reflecting mirror is used for receiving the laser light emitted from the second slow axis collimating lens, and reflecting the received laser light to the reflecting end surface.
作为上述技术方案的进一步改进方案,还包括反射器;As a further improvement of the above technical solution, it also includes a reflector;
所述第二发光模块还包括第二反射镜,所述第二反射镜与所述第二快轴准直透镜分别设于所述第二慢轴准直透镜的两侧,所述第二反射镜用于接收自所述第二慢轴准直透镜出射的激光,并将接收的所述激光反射至所述反射器;The second light-emitting module further includes a second reflector, and the second reflector and the second fast-axis collimating lens are respectively disposed on both sides of the second slow-axis collimating lens, and the second reflector The mirror is used to receive the laser light emitted from the second slow axis collimating lens and reflect the received laser light to the reflector;
所述反射器用于接收自所述第二反射镜出射的激光,并将接收的所述激光反射至所述反射端面。The reflector is used for receiving the laser light emitted from the second mirror and reflecting the received laser light to the reflecting end surface.
作为上述技术方案的进一步改进方案,所述第一发光模块的数量为两个以上,所述两个以上第一发光模块的各所述第一半导体激光芯片沿所述偏振合束器的高度方向错开设置,所述第二发光模块与所述第一发光模块一一对应,相互对应的所述第一半导体激光芯片与所述第二半导体激光芯片相对所述偏振合束器位于同一高度。As a further improvement of the above technical solution, the number of the first light-emitting modules is more than two, and each of the first semiconductor laser chips of the two or more first light-emitting modules is along the height direction of the polarization beam combiner Staggered arrangement, the second light emitting module corresponds to the first light emitting module one-to-one, and the first semiconductor laser chip and the second semiconductor laser chip corresponding to each other are located at the same height relative to the polarization beam combiner.
作为上述技术方案的进一步改进方案,所述第一发光模块与所述第二发光模块相对设置,沿自所述第一反射镜指向偏振合束器的方向,所述第二发光模块与所述第一发光模块之间相互错开。As a further improvement of the above technical solution, the first light-emitting module and the second light-emitting module are arranged opposite to each other, and along the direction from the first reflector to the polarization beam combiner, the second light-emitting module and the second light-emitting module are opposite to each other. The first light-emitting modules are staggered with each other.
作为上述技术方案的进一步改进方案,所述第一半导体激光芯片与所述第二半导体激光芯片相对设置;As a further improvement of the above technical solution, the first semiconductor laser chip and the second semiconductor laser chip are arranged opposite to each other;
沿自所述第一反射镜指向所述偏振合束器的方向,所述第一半导体激光芯片与所述第二半导体激光芯片之间相互错开;Along the direction from the first reflecting mirror to the polarization beam combiner, the first semiconductor laser chip and the second semiconductor laser chip are staggered from each other;
沿自所述第一半导体激光芯片指向所述第一慢轴准直透镜的方向,所述第一半导体激光芯片位于所述第二半导体激光芯片与所述第二慢轴准直透镜 之间。Along the direction from the first semiconductor laser chip to the first slow axis collimating lens, the first semiconductor laser chip is located between the second semiconductor laser chip and the second slow axis collimating lens.
作为上述技术方案的进一步改进方案,所述第一半导体激光芯片与所述第二半导体激光芯片相对设置;As a further improvement of the above technical solution, the first semiconductor laser chip and the second semiconductor laser chip are arranged opposite to each other;
沿自所述第一反射镜指向所述偏振合束器的方向,所述第一半导体激光芯片与所述第二半导体激光芯片之间相互错开;Along the direction from the first reflecting mirror to the polarization beam combiner, the first semiconductor laser chip and the second semiconductor laser chip are staggered from each other;
沿自所述第一半导体激光芯片指向所述第一慢轴准直透镜的方向,所述第二半导体激光芯片位于所述第一半导体激光芯片与所述第一慢轴准直透镜之间。Along the direction from the first semiconductor laser chip to the first slow axis collimating lens, the second semiconductor laser chip is located between the first semiconductor laser chip and the first slow axis collimating lens.
本申请的有益效果是:The beneficial effects of this application are:
本申请提供的半导体激光器包括偏振合束器、第一发光模块、第二发光模块、聚焦透镜以及光纤。其中,偏振合束器设有透射端面、反射端面和出射端面;第一发光模块发射的激光能够自上述透射端面至上述出射端面透射经过上述偏振合束器;上述第二发光模块发射的激光能够自上述反射端面至上述出射端面反射经过上述偏振合束器。The semiconductor laser provided in this application includes a polarization beam combiner, a first light-emitting module, a second light-emitting module, a focusing lens, and an optical fiber. Wherein, the polarization beam combiner is provided with a transmission end face, a reflection end face and an emission end face; the laser light emitted by the first light-emitting module can be transmitted through the polarization beam combiner from the transmission end face to the emission end face; the laser light emitted by the second light-emitting module can be The reflection from the reflection end surface to the emission end surface passes through the polarization beam combiner.
相比目前市场上的半导体激光器中的各发光模块平行排列成一排进行合束,本申请实施例提供的半导体激光器相当于将发光模块分成两个模块,即是:第一发光模块与第二发光模块,其中,第一发光模块发出的激光从偏振合束器的透射端面透射经过该偏振合束器,而第二发光模块发出的激光从反射端面进入偏振合束器,于偏振合束器内反射并经由出射端面射出。借助发光模块分组的设计,第一发光模块和第二发光模块的数量相对目前市场上的半导体激光器中的发光模块均要少,故第一发光模块和第二发光模块发射至聚焦透镜上的激光均要更为集中,而通过简单调节第一发光模块与第二发光模块相对偏振合束器的位置,可以使第一发光模块与第二发光模块发出且由出射端面射出的激光束基本重合,进而减小NA值(激光进入光纤的锥角),从而可使光纤输出的激光亮度更高,光束质量更好。Compared with the current semiconductor lasers on the market, the light-emitting modules are arranged in parallel in a row for beam combination. The semiconductor laser provided in the embodiment of the present application is equivalent to dividing the light-emitting module into two modules, namely: the first light-emitting module and the second light-emitting module. Module, wherein the laser light emitted by the first light-emitting module is transmitted through the polarization beam combiner from the transmission end face of the polarization beam combiner, and the laser light emitted by the second light-emitting module enters the polarization beam combiner from the reflection end face, and is inside the polarization beam combiner Reflected and ejected through the exit end face. With the help of the design of light-emitting module grouping, the number of the first light-emitting module and the second light-emitting module is less than that of the current semiconductor lasers on the market, so the first light-emitting module and the second light-emitting module emit laser light on the focusing lens. Both need to be more concentrated, and by simply adjusting the position of the first light-emitting module and the second light-emitting module relative to the polarization beam combiner, the laser beams emitted by the first light-emitting module and the second light-emitting module and emitted from the exit end face can basically coincide. Then reduce the NA value (the cone angle of the laser entering the fiber), so that the laser output from the fiber can be brighter and the beam quality is better.
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中 所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图示出的结构获得其他的附图。In order to more clearly describe the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings that need to be used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative work, other drawings may be obtained based on the structure shown in these drawings.
图1为传统的半导体激光器的俯视图;Figure 1 is a top view of a conventional semiconductor laser;
图2为图1中传统的半导体激光器的主视图;Fig. 2 is a front view of the conventional semiconductor laser in Fig. 1;
图3为本申请其中一实施例提供的半导体激光器的俯视图;FIG. 3 is a top view of a semiconductor laser provided by one of the embodiments of the application;
图4为图3中的半导体激光器的主视图;Fig. 4 is a front view of the semiconductor laser in Fig. 3;
图5为图3中偏振合束器的示意图;Fig. 5 is a schematic diagram of the polarization beam combiner in Fig. 3;
图6为图3中各第一发光模块与各第二发光模块错开设置的示意图;FIG. 6 is a schematic diagram of the staggered arrangement of each first light-emitting module and each second light-emitting module in FIG. 3;
图7为本申请另一实施例提供的半导体激光器的俯视图。FIG. 7 is a top view of a semiconductor laser provided by another embodiment of the application.
为了便于理解本申请,下面结合附图和具体实施例,对本申请进行更详细的说明。需要说明的是,当元件被表述“固定于”/“固接于”另一个元件,它可以直接在另一个元件上、或者其间可以存在一个或多个居中的元件。当一个元件被表述“连接”另一个元件,它可以是直接连接到另一个元件、或者其间可以存在一个或多个居中的元件。本说明书所使用的术语“垂直的”、“水平的”、“左”、“右”、“内”、“外”以及类似的表述只是为了说明的目的。In order to facilitate the understanding of the application, the application will be described in more detail below in conjunction with the drawings and specific embodiments. It should be noted that when an element is expressed as being "fixed to"/"fixed to" another element, it can be directly on the other element, or there can be one or more central elements in between. When an element is said to be "connected" to another element, it can be directly connected to the other element, or there may be one or more intervening elements in between. The terms "vertical", "horizontal", "left", "right", "inner", "outer" and similar expressions used in this specification are for illustrative purposes only.
除非另有定义,本说明书所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的,不是用于限制本申请。本说明书所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the technical field of this application. The terminology used in the description of this application is only for the purpose of describing specific embodiments, and is not used to limit the application. The term "and/or" used in this specification includes any and all combinations of one or more related listed items.
此外,下面所描述的本申请不同实施例中所涉及的技术特征只要彼此之间未构成冲突就可以相互结合。In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.
在本说明书中,所述“安装”包括焊接、螺接、卡接、粘合等方式将某一元件或装置固定或限制于特定位置或地方,所述元件或装置可在特定位置或地方保持不动也可在限定范围内活动,所述元件或装置固定或限制于特定位置或地方后可进行拆卸也可不能进行拆卸,在本申请实施例中不作限制。In this specification, the "installation" includes welding, screwing, clamping, bonding, etc. to fix or restrict a certain element or device to a specific position or place, and the element or device can be held in a specific position or place. It can also move within a limited range without moving, and the element or device can be disassembled or cannot be disassembled after being fixed or restricted to a specific position or place, which is not limited in the embodiment of the present application.
请参阅图3至图4,其分别示出了本申请其中一实施例提供的半导体激光 器的俯视图及主视图,该半导体激光器200包括第一发光模块210、第二发光模块220、偏振合束器230、聚焦透镜240、光纤250、反射器270,以及用于安装上述各部件的壳体260。第一发光模块210与第二发光模块220均用于发射激光,其中,第一发光模块210的发出的激光以透射的方式经过偏振合束器230并到达聚焦透镜240处,第二发光模块220发出的激光以反射的方式依次经过反射器270和偏振合束器230并到达上述聚焦透镜240处,聚焦透镜240对第一发光模块210与第二发光模块220发出的激光进行耦合并聚焦引导至光纤250。Please refer to FIGS. 3 to 4, which respectively show a top view and a front view of a semiconductor laser provided by one of the embodiments of the present application. The semiconductor laser 200 includes a first light emitting module 210, a second light emitting module 220, and a polarization beam combiner 230, a focusing lens 240, an optical fiber 250, a reflector 270, and a housing 260 for installing the above-mentioned components. The first light-emitting module 210 and the second light-emitting module 220 are both used to emit laser light. The laser light emitted by the first light-emitting module 210 passes through the polarization beam combiner 230 in a transmission manner and reaches the focusing lens 240. The second light-emitting module 220 The emitted laser light passes through the reflector 270 and the polarization beam combiner 230 in a reflective manner and reaches the above-mentioned focusing lens 240. The focusing lens 240 couples the laser light emitted by the first light-emitting module 210 and the second light-emitting module 220 and focuses and guides them to Fiber 250.
对于上述第一发光模块210,请参照图3,该第一发光模块210包括依次排列的第一半导体激光芯片211、第一快轴准直透镜212、第一慢轴准直透镜213以及第一反射镜214,第一半导体激光芯片211发出的激光可依次经过第一快轴准直透镜212、第一慢轴准直透镜213以及第一反射镜214到达偏振合束器230。其中,第一快轴准直透镜212及第一慢轴准直透镜213均用于为第一发光模块210发出的激光进行准直处理;第一反射镜214与第一快轴准直透镜212分别位于第一慢轴准直透镜213的两侧,第一反射镜214用于接收自第一慢轴准直透镜213出射的激光并将该激光反射至偏振合束器230,即是对第一半导体激光芯片211发出的激光进行换向处理。可以理解的是,在本申请的其他实施例中,第一发光模块210也可以不包括第一反射镜214,即是:第一半导体激光芯片211发出的激光直接经过第一快轴准直透镜212及第一慢轴准直透镜213到达偏振合束器230处。For the above-mentioned first light-emitting module 210, please refer to FIG. 3. The first light-emitting module 210 includes a first semiconductor laser chip 211, a first fast-axis collimating lens 212, a first slow-axis collimating lens 213, and a first semiconductor laser chip 211, which are arranged in sequence. Reflecting mirror 214, the laser light emitted by the first semiconductor laser chip 211 may sequentially pass through the first fast axis collimating lens 212, the first slow axis collimating lens 213, and the first reflecting mirror 214 to the polarization beam combiner 230. Wherein, the first fast axis collimating lens 212 and the first slow axis collimating lens 213 are both used to collimate the laser light emitted by the first light emitting module 210; the first mirror 214 and the first fast axis collimating lens 212 They are located on both sides of the first slow-axis collimating lens 213, and the first reflecting mirror 214 is used to receive the laser light emitted from the first slow-axis collimating lens 213 and reflect the laser light to the polarization beam combiner 230, that is, to The laser light emitted by a semiconductor laser chip 211 undergoes commutation processing. It can be understood that in other embodiments of the present application, the first light emitting module 210 may not include the first reflector 214, that is, the laser light emitted by the first semiconductor laser chip 211 directly passes through the first fast axis collimating lens. 212 and the first slow axis collimating lens 213 reach the polarization beam combiner 230.
第一发光模块210的数量可以是一个,也可以是两个以上,在本实施例中,第一发光模块210的数量为三个,该三个第一发光模块210之间平行排列成一排。The number of the first light emitting module 210 may be one or more than two. In this embodiment, the number of the first light emitting module 210 is three, and the three first light emitting modules 210 are arranged in parallel in a row.
为避免靠近偏振合束器230一侧的第一反射镜214遮挡住远离偏振合束器230一侧的第一反射镜214反射出的激光,而影响光路的正常传播,壳体260设有三个第一承载台阶261,该三个第一承载台阶261相对壳体260底部的高度均不相同。在本实施例中,自远离偏振合束器230的一端向靠近偏振合束器230的一端,该三个第一承载台阶261的高度逐渐降低,上述三个第一发光模块210分别单独设置于该三个第一承载台阶261上,以使三个第一发光模块210经过各自的第一反射镜214出射的光线彼此错开。可以理解的 是,在本申请其他实施例中,还可以通过其他方式实现将各第一发光模块出射的光线彼此错开,只要沿垂直于第一反射镜指向偏振合束器的方向,使各第一发光模块的第一反射镜各自错开即可;例如:在本申请的一些实施例中,各第一发光模块平行排成一排,且相对壳体底部安装于同一高度平面,然后沿垂直于自第一反射镜指向偏振合束器的方向,使各第一发光模块的第一反射镜之间彼此错开,从而实现各第一发光模块出射的激光彼此错开;又例如:在本申请的又一些实施例中,各第一发光模块沿壳体的高度方向平行排列成一排,使各第一发光模块的第一反射镜之间彼此错开,从而实现各第一发光模块出射的激光错开。In order to prevent the first mirror 214 on the side close to the polarization beam combiner 230 from blocking the laser light reflected by the first mirror 214 on the side away from the polarization beam combiner 230 and affecting the normal propagation of the light path, the housing 260 is provided with three The height of the first supporting step 261 relative to the bottom of the housing 260 is different. In this embodiment, the height of the three first supporting steps 261 gradually decreases from the end away from the polarization beam combiner 230 to the end close to the polarization beam combiner 230, and the three first light-emitting modules 210 are separately arranged at On the three first supporting steps 261, the light emitted by the three first light-emitting modules 210 through the respective first reflecting mirrors 214 are staggered with each other. It is understandable that in other embodiments of the present application, the light emitted by the first light-emitting modules can also be staggered with each other in other ways, as long as the first mirror points to the polarization beam combiner along the direction perpendicular to the first reflector, so that the first light-emitting modules point to the polarization beam combiner. The first mirrors of a light-emitting module can be staggered; for example, in some embodiments of the present application, the first light-emitting modules are arranged in a row in parallel, and are installed on the same height plane relative to the bottom of the housing, and then along the vertical The first mirror points to the direction of the polarization beam combiner, so that the first mirrors of the first light-emitting modules are staggered with each other, so that the laser light emitted by the first light-emitting modules is staggered with each other; another example: In some embodiments, the first light-emitting modules are arranged in a row in parallel along the height direction of the housing, so that the first mirrors of the first light-emitting modules are staggered with each other, so that the laser light emitted by the first light-emitting modules is staggered.
对于上述第二发光模块220,请参照图3,该第二发光模块220与第一发光模块210相对设置,与第一发光模块210相似,该第二发光模块220包括依次排列的第二半导体激光芯片221、第二快轴准直透镜222、第二慢轴准直透镜223以及第二反射镜224,第二半导体激光芯片221发出的激光可依次经过第二快轴准直透镜222、第二慢轴准直透镜223以及第二反射镜224。其中,第二快轴准直透镜222及第二慢轴准直透镜223均用于为第二发光模块220发出的激光进行准直处理;第二反射镜224与第二快轴准直透镜222分别位于所述第二慢轴准直透镜223的两侧,该第二反射镜224用于接收自第二慢轴准直透镜223出射的激光并将该激光反射至反射器270,即是对第二半导体激光芯片221发出的激光进行换向处理。可以理解的是,在本申请的其他实施例中,第二发光模块220也可以不包括第二反射镜224,即是:第二半导体激光芯片221发出的激光直接经过第二快轴准直透镜222及第二慢轴准直透镜223到达反射器270处。For the above-mentioned second light-emitting module 220, please refer to FIG. 3. The second light-emitting module 220 is arranged opposite to the first light-emitting module 210 and is similar to the first light-emitting module 210. The second light-emitting module 220 includes second semiconductor lasers arranged in sequence. Chip 221, the second fast axis collimating lens 222, the second slow axis collimating lens 223 and the second mirror 224, the laser light emitted by the second semiconductor laser chip 221 can pass through the second fast axis collimating lens 222, the second The slow axis collimating lens 223 and the second reflecting mirror 224. Among them, the second fast axis collimating lens 222 and the second slow axis collimating lens 223 are both used for collimating the laser light emitted by the second light emitting module 220; the second mirror 224 and the second fast axis collimating lens 222 They are located on both sides of the second slow-axis collimating lens 223, and the second reflecting mirror 224 is used to receive the laser light emitted from the second slow-axis collimating lens 223 and reflect the laser light to the reflector 270, that is, to The laser light emitted by the second semiconductor laser chip 221 undergoes commutation processing. It can be understood that in other embodiments of the present application, the second light emitting module 220 may not include the second reflector 224, that is, the laser light emitted by the second semiconductor laser chip 221 directly passes through the second fast axis collimating lens 222 and the second slow axis collimating lens 223 reach the reflector 270.
第二发光模块220的数量可以是一个,也可以是两个以上,在本实施例中,第二发光模块220的数量为三个,该三个第二发光模块220之间平行排列成一排。The number of the second light emitting module 220 may be one or more than two. In this embodiment, the number of the second light emitting module 220 is three, and the three second light emitting modules 220 are arranged in parallel in a row.
为避免靠近反射器270一侧的第二反射镜224遮挡住远离反射器270一侧的第二反射镜224反射出的激光,而影响光路的正常传播,壳体260设有三个第二承载台阶,该三个第二承载台阶与上述三个第一承载台阶261一一对应,且相互对应的第二承载台与第一承载台阶261相对壳体260的底部位于同一高度,具体可参照图3中虚线示出的部分,相邻两虚线之间为相互对 应的第一承载台阶261(图3中虚线下半部)与第二承载台(图3中虚线上半部)。各第二承载台的设置能够使各第二发光模块220经过各自的第二反射镜224出射的光线彼此错开;同时,由于相互对应的第二发光模块220与第一发光模块210相对偏振合束器230也处于同一高度,则第二发光模块220经过反射器270反射至偏振合束器230的激光的高度位置,与同一高度的第一发光模块210出射的到达偏振合束器230的激光的高度相同,即是:各第一发光模块210发出的激光与第二发光模块发出的激光到达反射器270上的高度范围相同,则经过偏振合束器230出射后的高度范围也相同,从而能够避免增加半导体激光芯片数量的同时,NA值增大、激光出光亮度及质量不理想的弊端。以六个发光模块为例,本实施例提供的半导体激光器200的NA值为传统半导体激光器100的NA值的近一半,故本实施例提供的半导体激光器200的出光质量及亮度均优于传统半导体激光器100。In order to prevent the second mirror 224 on the side close to the reflector 270 from blocking the laser light reflected by the second mirror 224 on the side away from the reflector 270 and affecting the normal propagation of the light path, the housing 260 is provided with three second carrying steps The three second bearing steps correspond to the above three first bearing steps 261 one-to-one, and the second bearing platform and first bearing step 261 corresponding to each other are located at the same height relative to the bottom of the housing 260. For details, refer to FIG. 3 The part shown by the dashed line in the middle, between the two adjacent dashed lines are the first bearing step 261 (the lower half of the dashed line in FIG. 3) and the second bearing platform (the upper half of the dashed line in FIG. 3) corresponding to each other. The arrangement of each second carrier can make the light emitted by each second light-emitting module 220 through the respective second reflector 224 stagger each other; at the same time, because the second light-emitting module 220 and the first light-emitting module 210 corresponding to each other are relatively polarized and combined The height of the laser light from the second light-emitting module 220 reflected by the reflector 270 to the polarization beam combiner 230 is the same as that of the laser light emitted by the first light-emitting module 210 reaching the polarization beam combiner 230 at the same height. The height is the same, that is: the height range of the laser light emitted by each first light-emitting module 210 and the laser light emitted by the second light-emitting module reaching the reflector 270 is the same, and the height range after passing through the polarization beam combiner 230 is also the same, so that it can Avoid the disadvantages of increasing the number of semiconductor laser chips, increasing the NA value, and unsatisfactory laser light brightness and quality. Taking six light-emitting modules as an example, the NA value of the semiconductor laser 200 provided in this embodiment is nearly half of the NA value of the traditional semiconductor laser 100, so the light quality and brightness of the semiconductor laser 200 provided in this embodiment are better than those of the traditional semiconductor laser. The laser 100.
应当理解,在本申请其他实施例中,还可以通过其他方式实现将各第二发光模块出射的光线彼此错开,只要沿垂直于第二反射镜指向反射器的方向,各第二发光模块的第二反射镜各自错开即可;例如:在本申请的一些实施例中,各第二发光模块平行排成一排,且相对壳体底部安装于同一高度平面,然后沿垂直于自第二反射镜指向反射器的方向,使各第二发光模块的第二反射镜之间彼此错开,从而实现各第二发光模块出射的激光错开;又例如:在在本申请的又一些实施例中,各第二发光模块沿壳体的高度方向平行排列成一排,使各第二发光模块第二反射镜之间彼此错开,从而实现各第二发光模块出射的激光错开。It should be understood that in other embodiments of the present application, the light emitted by the second light-emitting modules can also be staggered with each other in other ways, as long as the second light-emitting module is perpendicular to the direction of the second reflector pointing to the reflector. The two mirrors can be staggered separately; for example, in some embodiments of the present application, the second light-emitting modules are arranged in a row in parallel, and are installed on the same height plane relative to the bottom of the housing, and then along the vertical direction from the second mirror Point to the direction of the reflector, so that the second mirrors of the second light-emitting modules are staggered with each other, so as to realize the staggering of the laser light emitted by the second light-emitting modules; for another example: in some other embodiments of the present application, the second mirrors of the second light-emitting modules are staggered. The two light-emitting modules are arranged in a row in parallel along the height direction of the casing, so that the second reflection mirrors of the second light-emitting modules are staggered with each other, so as to realize the staggering of the laser light emitted by the second light-emitting modules.
对于上述反射器270,请参照图3,反射器270用于接收自各第二发光模块220出射的激光,并将其接收的激光反射至偏振合束器230。For the above-mentioned reflector 270, please refer to FIG. 3. The reflector 270 is used to receive the laser light emitted from each of the second light-emitting modules 220 and reflect the laser light received to the polarization beam combiner 230.
对于上述偏振合束器230,参照图5,其示出了偏振合束器230的示意图,同时结合图3与图4,该偏振合束器230由相对设置的两个三棱镜胶接固定而成,其设有透射端面231、反射端面232和出射端面233。其中,透射端面231用于接收自第一发光模块210出射的激光,反射端面232用于接收自上述第二发光模块220出射并经过反射器270反射的激光,上述第一发光模块210与第二发光模块220发出并进入偏振合束器230的激光自上述出射端面233射出。在本实施例中,上述两个三棱镜的横截面呈等腰三角形状,胶接后的 偏振合束器230的横截面呈矩形,透射端面231、反射端面232和出射端面233均为上述三棱镜的侧面,其中,透射端面231平行于出射端面233且两者相对设置,反射端面232垂直于出射端面233且与该出射端面233均设于同一三棱镜。For the above-mentioned polarization beam combiner 230, refer to FIG. 5, which shows a schematic diagram of the polarization beam combiner 230. Combined with FIG. 3 and FIG. 4, the polarization beam combiner 230 is formed by glueing and fixing two triangular prisms arranged oppositely. , It is provided with a transmissive end surface 231, a reflective end surface 232, and an exit end surface 233. The transmissive end surface 231 is used to receive the laser light emitted from the first light-emitting module 210, and the reflective end surface 232 is used to receive the laser light emitted from the second light-emitting module 220 and reflected by the reflector 270. The laser light emitted from the light emitting module 220 and entered into the polarization beam combiner 230 is emitted from the above-mentioned emission end surface 233. In this embodiment, the cross-sections of the above-mentioned two triangular prisms are in the shape of isosceles triangles, the cross-section of the polarized beam combiner 230 after glueing is rectangular, and the transmission end surface 231, the reflection end surface 232 and the exit end surface 233 are all of the above-mentioned triangular prisms. On the side surface, the transmissive end surface 231 is parallel to the exit end surface 233 and the two are disposed opposite to each other, and the reflective end surface 232 is perpendicular to the exit end surface 233 and is disposed in the same prism with the exit end surface 233.
本申请利用激光中的P偏振光能够透射通过偏振合束器230、激光中的S偏正光能够以反射形式通过偏振合束器230的特点,同时结合半导体激光器发射的激光中P光比例非常高的特性,将第一发光模块210出射的光线引导至上述透射端面231,则大部分的光束能够透射经过该偏振合束器230;同时将第二发光模块220发出的光束经过反射器270引导至反射端面232,则激光中的S光能够于两三棱镜交界处发生反射,然后经过出射端面233射出。This application utilizes the characteristics that the P-polarized light in the laser can be transmitted through the polarization beam combiner 230, and the S-polarized light in the laser can be reflected through the polarization beam combiner 230, and combined with the characteristics of a very high proportion of P light in the laser light emitted by the semiconductor laser The light emitted by the first light-emitting module 210 is guided to the above-mentioned transmission end surface 231, and most of the light beams can be transmitted through the polarization beam combiner 230; at the same time, the light beams emitted by the second light-emitting module 220 are guided through the reflector 270 to By reflecting the end surface 232, the S light in the laser can be reflected at the junction of the two triangular prisms, and then emitted through the exit end surface 233.
进一步地,反射端面232处设有半波片234,其用于将第二发光模块220发射的激光中的P偏振光调制成S偏振光,从而使由第二发光模块220发射并进入偏振合束器230的激光中的大部分光束以反射的形式从出射端面233射出偏振合束器230。Further, a half-wave plate 234 is provided at the reflective end face 232, which is used to modulate the P-polarized light in the laser light emitted by the second light-emitting module 220 into S-polarized light, so that the second light-emitting module 220 emits and enters the polarization combination. Most of the light beams in the laser beam of the beamer 230 exit the polarization beam combiner 230 from the exit end surface 233 in a reflected form.
更进一步地,为简化光路,本实施例中第一半导体激光芯片211发射的激光与第一反射镜214的入射角(及反射角)为45度,同时由第一反射镜214反射的激光垂直于透射端面231入射偏振合束器230;同理,第二半导体激光芯片221发射的激光与第二反射镜224及反射器270的入射角(及反射角)均为45度,即第二反射镜224与反射器270之间平行设置,同时由反射器270反射的激光垂直于反射端面232入射偏振合束器230。结合上述透射端面231、反射端面232及出射端面233的位置关系可知,第一发光模块210与第二发光模块220经过偏振合束器230出射的光束沿同一方向传播。Furthermore, in order to simplify the optical path, the incident angle (and reflection angle) of the laser light emitted by the first semiconductor laser chip 211 and the first mirror 214 in this embodiment is 45 degrees, and the laser light reflected by the first mirror 214 is perpendicular The polarization beam combiner 230 is incident on the transmission end surface 231; in the same way, the incident angle (and reflection angle) of the laser light emitted by the second semiconductor laser chip 221, the second mirror 224 and the reflector 270 are both 45 degrees, that is, the second reflection The mirror 224 and the reflector 270 are arranged in parallel, and the laser light reflected by the reflector 270 enters the polarization beam combiner 230 perpendicular to the reflection end surface 232. Combining the above-mentioned positional relationship between the transmissive end surface 231, the reflective end surface 232, and the exit end surface 233, it can be seen that the light beams emitted by the first light emitting module 210 and the second light emitting module 220 through the polarization beam combiner 230 propagate in the same direction.
对于上述聚焦透镜240与光纤250,请继续参照图3,该聚焦透镜240与光纤250安装与壳体260,且依次设于出射端面233背离上述透射端面231的一侧。其中,聚焦透镜240用于对自偏振合束器230输出的光束进行聚焦处理并引导至光纤250的入射端口,光纤250远离聚焦透镜240的一端可输出耦合后的激光。For the above-mentioned focusing lens 240 and the optical fiber 250, please continue to refer to FIG. 3. The focusing lens 240 and the optical fiber 250 are installed in the housing 260, and are sequentially arranged on the side of the emission end surface 233 away from the transmission end surface 231. The focusing lens 240 is used to focus the light beam output from the polarization beam combiner 230 and guide it to the incident port of the optical fiber 250, and the end of the optical fiber 250 away from the focusing lens 240 can output the coupled laser light.
进一步地,由于第一反射镜214与第二反射镜224往往是在玻璃材料上镀反射膜制成,而激光的能量非常高,故部分激光可能会穿过相应的反射镜到达对面的发光模块;为避免相对设置的第一发光模块210发出的激光透射 穿过第一反射镜214,然后依次经过与其相对设置且对应的第二发光模块220中的第二反射镜224、第二慢轴准直透镜223以及第二快轴准直透镜222到达第二半导体激光芯片221,从而引起第二半导体激光芯片221的损坏,本申请实施例中将各第一发光模块210与各第二发光模块220沿第一反射镜214指向偏振合束器230的方向相互错开设置。Furthermore, since the first reflector 214 and the second reflector 224 are often made by coating a reflective film on a glass material, and the energy of the laser is very high, part of the laser light may pass through the corresponding reflector and reach the opposite light-emitting module. ; In order to prevent the laser light emitted by the first light emitting module 210 located opposite from being transmitted through the first reflector 214, and then pass through the second reflector 224 and the second slow axis collimation of the second light emitting module 220 that are located opposite to and corresponding to it in turn The straight lens 223 and the second fast axis collimating lens 222 reach the second semiconductor laser chip 221, thereby causing damage to the second semiconductor laser chip 221. In the embodiment of the present application, each first light-emitting module 210 and each second light-emitting module 220 The directions along the first mirror 214 pointing to the polarization beam combiner 230 are staggered.
具体的,请参照图6,其示出了各第一发光模块210与各第二发光模块220错开设置的示意图,为便于理解,该附图仅示出了一个第一发光模块210,请同时结合图1至图5,沿第一反射镜214指向偏振合束器230的透射端面231的方向,相互对应(即相对壳体底部高度相同)的第一承载台阶261与第二承载台阶之间错开,以使承载于其上的相对应的第一发光模块210与各第二发光模块220也错开。以第一发光模块210发出的激光为例,该激光光束能量主要集中于中央部位,两侧能量的比例很低,穿透第一反射镜214的激光分布也如上述情况,图中以三束光束示意;由于沿上述方向(第一反射镜214指向透射端面的方向),第一发光模块210与第二发光模块220相互错开,故中央的光束穿过第一反射镜214之后将传播至两第二发光模块220之间的间隙,左侧的光束则将被该第一发光模块210左侧的第一承载台阶和第二承载台阶阻挡而到达不了对面的第二半导体激光芯片221处,右侧的光束比例极小,即使其能够到达第二反射镜224,其也将被第二反射镜224阻挡,退一步的,即使右侧的光束能够穿过第二反射镜224、第二慢轴准直透镜223、第二快轴准直透镜222,则到达第二半导体激光芯片221的能量也极小,并不会对第二半导体激光芯片221造成损伤。此外,还可在图示的基础上适当调整第一发光模块与第二发光模块错开的间距,让激光左右的边缘光束无法入射到对面发光模块相应的的反射镜、慢轴准直透镜和快轴准直透镜上。同理,第二发光模块220发出的激光穿过第二反射镜224的情况也第一发光模块210基本相同,在此不赘述。综上所述,各第一发光模块210与各第二发光模块220的错开设置能够避免第一半导体激光芯片211与第二半导体激光芯片221的损坏,延长了该半导体激光器200的整体使用寿命。Specifically, please refer to FIG. 6, which shows a schematic diagram of each first light-emitting module 210 and each second light-emitting module 220 being staggered. For ease of understanding, the figure only shows one first light-emitting module 210. Please also 1 to 5, along the direction of the first reflector 214 pointing to the transmission end face 231 of the polarization beam combiner 230, between the first supporting step 261 and the second supporting step corresponding to each other (that is, the same height relative to the bottom of the housing) Staggered, so that the corresponding first light-emitting module 210 and each second light-emitting module 220 carried thereon are also staggered. Taking the laser light emitted by the first light-emitting module 210 as an example, the energy of the laser beam is mainly concentrated in the central part, and the ratio of the energy on both sides is very low. The distribution of the laser light penetrating the first mirror 214 is also the same as that described above. Schematic of the light beam; since the first light-emitting module 210 and the second light-emitting module 220 are staggered in the above direction (the first mirror 214 points to the direction of the transmission end surface), the central light beam will propagate to the two after passing through the first mirror 214 In the gap between the second light-emitting module 220, the light beam on the left side will be blocked by the first and second supporting steps on the left side of the first light-emitting module 210 and cannot reach the second semiconductor laser chip 221 on the opposite side. The proportion of the light beam on the side is extremely small. Even if it can reach the second mirror 224, it will be blocked by the second mirror 224. Take a step back, even if the light beam on the right side can pass through the second mirror 224 and the second slow axis. The collimating lens 223 and the second fast axis collimating lens 222 have extremely low energy reaching the second semiconductor laser chip 221, and will not cause damage to the second semiconductor laser chip 221. In addition, the distance between the first light-emitting module and the second light-emitting module can be adjusted appropriately on the basis of the figure, so that the left and right edge beams of the laser cannot be incident on the corresponding mirror, slow-axis collimating lens and fast light-emitting module of the opposite light-emitting module. Axis collimating lens. Similarly, the situation in which the laser light emitted by the second light-emitting module 220 passes through the second reflector 224 is basically the same as that of the first light-emitting module 210, which will not be repeated here. In summary, the staggered arrangement of each first light-emitting module 210 and each second light-emitting module 220 can avoid damage to the first semiconductor laser chip 211 and the second semiconductor laser chip 221, and prolong the overall service life of the semiconductor laser 200.
以下结合各附图对本申请提供的半导体激光器的工作原理进行简要说明:The working principle of the semiconductor laser provided in this application will be briefly described below in conjunction with the drawings:
需要使用该激光时,触发相应开关(图中未示出),则各第一半导体激 光芯片211发出的激光依次经过相应的第一快轴准直透镜212、第一慢轴准直透镜213和第一反射镜214,然后依次透射经过偏振合束器的透射端面231及出射端面233,之后透射经过聚焦透镜240,最后到达光纤250的入射端口并从光纤250的出射端口输出;各第二半导体激光芯片221发出的激光依次经过相应的第二快轴准直透镜222、第二慢轴准直透镜223和第二反射镜224,然后反射经过反射器270,再通过半波片234调制成S偏正光,之后由反射端面232进入偏振合束器230并于两三棱镜交界处反射并经由出射端面233射出,接下来透射经过聚焦透镜240,最后到达光纤250的入射端口并从光纤250的出射端口输出。When the laser needs to be used, the corresponding switch (not shown in the figure) is triggered, and the laser light emitted by each first semiconductor laser chip 211 passes through the corresponding first fast-axis collimating lens 212, first slow-axis collimating lens 213, and The first mirror 214 then sequentially transmits through the transmission end face 231 and the exit end face 233 of the polarization beam combiner, and then transmits through the focusing lens 240, and finally reaches the entrance port of the optical fiber 250 and outputs from the exit port of the optical fiber 250; each second semiconductor The laser light emitted by the laser chip 221 sequentially passes through the corresponding second fast axis collimating lens 222, the second slow axis collimating lens 223 and the second mirror 224, and then is reflected through the reflector 270, and then modulated into S by the half-wave plate 234 The polarized light then enters the polarization beam combiner 230 from the reflective end face 232 and is reflected at the junction of the two prisms and exits through the exit end face 233, then passes through the focusing lens 240, and finally reaches the entrance port of the fiber 250 and exits the exit port of the fiber 250 Output.
该半导体激光器包括第一发光模块210、第二发光模块220、偏振合束器230、聚焦透镜240以及光纤250。其中,偏振合束器230设有透射端面231、反射端面232和出射端面233;第一发光模块210发射的激光能够自上述透射端面231至上述出射端面233整体透射经过偏振合束器230;第二发光模块220发射的激光能够自上述反射端面232至上述出射端面233于偏振合束器230内反射经过该偏振合束器230。The semiconductor laser includes a first light emitting module 210, a second light emitting module 220, a polarization beam combiner 230, a focusing lens 240, and an optical fiber 250. Wherein, the polarization beam combiner 230 is provided with a transmission end face 231, a reflection end face 232, and an emission end face 233; the laser light emitted by the first light emitting module 210 can be transmitted through the polarization beam combiner 230 from the transmission end face 231 to the emission end face 233 as a whole; The laser light emitted by the two light-emitting modules 220 can be reflected in the polarization beam combiner 230 from the reflection end surface 232 to the emission end surface 233 through the polarization beam combiner 230.
相比目前市场上的半导体激光器中的各发光模块平行排列成一排进行合束的结构,本申请实施例提供的半导体激光器相当于将发光模块分成两个模块,即是:第一发光模块210与第二发光模块220,然后再经由偏振合束器230进行合束。其中,第一发光模块210发出的激光从偏振合束器230的透射端面透射经过该偏振合束器230,而第二发光模块220发出的激光从反射端面232进入偏振合束器230并在该偏振合束其内反射,之后自出射端面233射出。借助上述发光模块的分排设计,第一发光模块210和第二发光模块220的数量相对目前市场上的半导体激光器中的发光模块数量都要少,故第一发光模块210和第二发光模块220发射至偏振合束器230及聚焦透镜240上的激光均要比传统的半导体激光器更为集中;而通过简单调节第一发光模块210与第二发光模块220相对偏振合束器230的高度位置,如上述实施例中第一承载台阶261及第二承载台阶的设计,可以使第一发光模块210与第二发光模块220自出射端面233出射至聚焦透镜240的激光束基本重合,进而减小NA值(激光进入光纤的锥角),从而可使光纤输出的激光亮度更高,光束质量更好。Compared with the structure in which the light-emitting modules in the semiconductor lasers currently on the market are arranged in parallel in a row for beam combination, the semiconductor laser provided in the embodiment of the present application is equivalent to dividing the light-emitting module into two modules, namely: the first light-emitting module 210 and The second light-emitting module 220 is then combined by the polarization beam combiner 230. Wherein, the laser light emitted by the first light-emitting module 210 is transmitted through the polarization beam combiner 230 from the transmission end surface of the polarization beam combiner 230, and the laser light emitted by the second light-emitting module 220 enters the polarization beam combiner 230 from the reflection end surface 232 and enters the polarization beam combiner 230. The combined polarization beam reflects internally, and then exits from the exit end face 233. With the help of the above-mentioned arrangement design of the light-emitting modules, the number of the first light-emitting module 210 and the second light-emitting module 220 is less than the number of the light-emitting modules in the semiconductor lasers currently on the market, so the first light-emitting module 210 and the second light-emitting module 220 The laser light emitted to the polarization beam combiner 230 and the focusing lens 240 is more concentrated than a conventional semiconductor laser; and by simply adjusting the height position of the first light-emitting module 210 and the second light-emitting module 220 relative to the polarization beam combiner 230, Like the design of the first carrying step 261 and the second carrying step in the above embodiment, the laser beams emitted by the first light emitting module 210 and the second light emitting module 220 from the emission end surface 233 to the focusing lens 240 can be substantially coincident, thereby reducing the NA Value (the cone angle of the laser entering the fiber), which can make the laser output from the fiber have higher brightness and better beam quality.
应当理解:在本申请的其他实施例中,反射器也可以没有,相应的,第二发光模块发出的激光直接经过半波片进入偏振合束器;各半导体激光芯片于相应的反射镜的入射角也可以是45度以外的其他角度;第一发光模块也可以不整体均设于第一承载台阶上,而只有第一半导体激光芯片设于第一承载台阶上,相应的,第一快轴准直透镜、第一慢轴准直透镜及第一反射镜均固定于壳体的底部,或者第一半导体激光芯片及第一反射镜设于上述第一承载台阶上,相应的,第一快轴准直透镜和第一慢轴准直透镜固定于壳体底部,只要使落在各第一反射镜上的光束沿偏振合束器的高度方向相互错开即可,第二发光模块与第一发光模块相同,在此不一一限定。It should be understood that in other embodiments of the present application, the reflector may not be present. Correspondingly, the laser light emitted by the second light-emitting module directly enters the polarization beam combiner through the half-wave plate; each semiconductor laser chip is incident on the corresponding reflector. The angle may also be other angles other than 45 degrees; the first light-emitting module may not be arranged on the first carrying step as a whole, but only the first semiconductor laser chip is arranged on the first carrying step. Correspondingly, the first fast axis The collimating lens, the first slow-axis collimating lens and the first reflecting mirror are all fixed on the bottom of the casing, or the first semiconductor laser chip and the first reflecting mirror are arranged on the above-mentioned first carrying step, correspondingly, the first fast The axis collimating lens and the first slow axis collimating lens are fixed at the bottom of the housing, as long as the light beams falling on the first mirrors are staggered along the height direction of the polarization beam combiner, the second light-emitting module and the first The light-emitting modules are the same and are not limited here.
请参照图7,其示出了本申请另一实施例提供的半导体激光器300的俯视图,请同时结合图1至图6,该半导体激光器300包括第一发光模块310、第二发光模块320、偏振合束器330、聚焦透镜340、光纤350、反射器370,以及用于安装上述各部件的壳体360。该半导体激光器300与上一实施例中的半导体激光器200的主要不同在于:Please refer to FIG. 7, which shows a top view of a semiconductor laser 300 provided by another embodiment of the present application. Please also refer to FIGS. 1 to 6. The semiconductor laser 300 includes a first light-emitting module 310, a second light-emitting module 320, and a polarizer. The beam combiner 330, the focusing lens 340, the optical fiber 350, the reflector 370, and the housing 360 for installing the above-mentioned components. The main difference between the semiconductor laser 300 and the semiconductor laser 200 in the previous embodiment is:
第一实施例中的第一发光模块210与第二发光模块220整体结构沿第一半导体激光芯片指向第一反射镜的方向相对设置;而本实施例中的第一发光模块310与第二发光模块320整体结构沿第一半导体激光芯片指向第一反射镜的方向部分重合。The overall structure of the first light-emitting module 210 and the second light-emitting module 220 in the first embodiment are arranged opposite to each other along the direction in which the first semiconductor laser chip points to the first reflector; while the first light-emitting module 310 and the second light-emitting module in this embodiment are opposite to each other. The overall structure of the module 320 partially overlaps along the direction in which the first semiconductor laser chip points to the first reflector.
具体的,第一发光模块310包括依次排列的第一半导体激光芯片311、第一快轴准直透镜312、第一慢轴准直透镜313和第一反射镜314;第二发光模块320包括依次排列的第二半导体激光芯片321、第二快轴准直透镜322、第二慢轴准直透镜323和第二反射镜324。其中,第一半导体激光芯片311与第二半导体激光芯片321相对设置,且两者均位于偏振合束器330设有半波片的一侧,各第一半导体激光芯片311与第二半导体激光芯片321沿第一反射镜314指向偏振合束器330的方向错开,相对应的第一半导体激光芯片311与第二半导体激光芯片321相对偏振合束器330位于同一高度。各第一慢轴准直透镜313及第二慢轴准直透镜323、各第一反射镜314及各第二反射镜324固定于壳体260底部。沿第一半导体激光芯片311(或第二半导体激光芯片321)指向第一慢轴准直透镜313(或第二慢轴准直透镜)的方向,第一半导体激光芯片311位于第二半导体激光芯片321与第二慢轴准直透镜323之 间,第二半导体激光芯片321位于第一半导体激光芯片311与第一慢轴准直透镜313之间。Specifically, the first light-emitting module 310 includes a first semiconductor laser chip 311, a first fast-axis collimating lens 312, a first slow-axis collimating lens 313, and a first mirror 314 that are arranged in sequence; the second light-emitting module 320 includes sequentially The second semiconductor laser chip 321, the second fast axis collimating lens 322, the second slow axis collimating lens 323 and the second mirror 324 are arranged. Among them, the first semiconductor laser chip 311 and the second semiconductor laser chip 321 are disposed oppositely, and both are located on the side of the polarization beam combiner 330 where the half-wave plate is provided. Each first semiconductor laser chip 311 and the second semiconductor laser chip 321 is staggered along the direction in which the first reflector 314 points to the polarization beam combiner 330, and the corresponding first semiconductor laser chip 311 and the second semiconductor laser chip 321 are located at the same height relative to the polarization beam combiner 330. Each of the first slow-axis collimating lens 313 and the second slow-axis collimating lens 323, each of the first mirrors 314, and each of the second mirrors 324 are fixed on the bottom of the housing 260. Along the direction of the first semiconductor laser chip 311 (or the second semiconductor laser chip 321) pointing to the first slow axis collimating lens 313 (or the second slow axis collimating lens), the first semiconductor laser chip 311 is located on the second semiconductor laser chip Between 321 and the second slow-axis collimating lens 323, the second semiconductor laser chip 321 is located between the first semiconductor laser chip 311 and the first slow-axis collimating lens 313.
与传统的半导体激光器100相比,本实施例提供的半导体激光器300与上述实施例中的半导体激光器200相似,其通过分排的设置能够减小NA值,同时各第一发光模块310与各第二发光模块320的错开设置能够避免相对的半导体激光芯片发射出的激光损坏对面的半导体激光芯片。Compared with the conventional semiconductor laser 100, the semiconductor laser 300 provided in this embodiment is similar to the semiconductor laser 200 in the above-mentioned embodiment, and the NA value can be reduced through the arrangement of the rows. At the same time, each first light-emitting module 310 and each first light-emitting module 310 are connected to each other. The staggered arrangement of the two light-emitting modules 320 can prevent the laser light emitted by the opposite semiconductor laser chip from damaging the opposite semiconductor laser chip.
与第一实施例提供的半导体激光器200相比,本实施例提供的半导体激光器300通过在沿第一半导体激光芯片311指向第一反射镜314的方向上将第一发光模块310与第二发光模块320排布为部分重合,可使第一发光模块310与第二发光模块320整体占用的空间更小,使该半导体激光器300的内部结构排布更为紧凑,从而有利于减小半导体激光器300的体积。Compared with the semiconductor laser 200 provided in the first embodiment, the semiconductor laser 300 provided in this embodiment connects the first light-emitting module 310 and the second light-emitting module along the direction of the first semiconductor laser chip 311 to the first mirror 314. The arrangement of 320 is partially overlapped, so that the space occupied by the first light-emitting module 310 and the second light-emitting module 320 as a whole can be smaller, and the internal structure of the semiconductor laser 300 is arranged more compactly, thereby helping to reduce the size of the semiconductor laser 300. volume.
此外,由于最终光纤350输出的光束的光斑轮廓大小与聚焦透镜的焦距呈正比,与准直透镜的焦距成反比,故为尽量的减小光斑的轮廓,需要采用焦距更大的准直透镜,而焦距更大则意味着准直透镜的外径更大。以第一慢轴准直透镜为例,沿第一半导体激光芯片311指向第一反射镜314的方向,当第一慢轴准直透镜313位于第一半导体激光芯片311与第二半导体激光芯片321之间时,为减小光斑的轮廓,第一慢轴准直透镜313的尺寸需相应变大,进一步的,为避免尺寸变大的第一慢轴准直透镜介入相邻的第二发光模块中的第二半导体激光器321发射的激光的光路,需要将相邻的第一发光模块310与第二发光模块320之间的间距调大,如此则会使该半导体激光器的尺寸相应变大。而本实施例中通过将第一慢轴准直透镜313设于第二半导体激光芯片321远离第二慢轴准直透镜323的一侧,将第二慢轴准直透镜323设于第一半导体激光芯片311远离第一慢轴准直透镜313的一侧,能够避免在将第一慢轴准直透镜和/或第二慢轴准直透镜更换为大焦距的透镜时,介入相邻发光模块中的光路,从而进一步实现减小半导体激光器的体积。即是:本实施例中提供的半导体激光器能够在相同的体积情况下尽量地增大第一慢轴准直透镜和/或第二慢轴准直透镜的孔径及焦距,进而使输出的光斑尺寸更小,光束质量更高。In addition, since the size of the spot profile of the final light beam output by the optical fiber 350 is proportional to the focal length of the focusing lens and inversely proportional to the focal length of the collimating lens, in order to minimize the profile of the spot, a collimating lens with a larger focal length is required. A larger focal length means a larger outer diameter of the collimating lens. Taking the first slow axis collimating lens as an example, along the direction of the first semiconductor laser chip 311 pointing to the first mirror 314, when the first slow axis collimating lens 313 is located between the first semiconductor laser chip 311 and the second semiconductor laser chip 321 In order to reduce the profile of the light spot, the size of the first slow-axis collimating lens 313 needs to be correspondingly increased, and further, in order to prevent the larger-sized first slow-axis collimating lens from interfering with the adjacent second light-emitting module In the optical path of the laser light emitted by the second semiconductor laser 321, the distance between the adjacent first light-emitting module 310 and the second light-emitting module 320 needs to be increased, so that the size of the semiconductor laser will increase accordingly. In this embodiment, the first slow axis collimating lens 313 is disposed on the side of the second semiconductor laser chip 321 away from the second slow axis collimating lens 323, and the second slow axis collimating lens 323 is disposed on the first semiconductor laser chip 321. The laser chip 311 is far away from the side of the first slow-axis collimating lens 313, which can avoid intervening adjacent light-emitting modules when replacing the first slow-axis collimating lens and/or the second slow-axis collimating lens with a lens with a large focal length. In the optical path, thereby further reducing the volume of the semiconductor laser. That is, the semiconductor laser provided in this embodiment can increase the aperture and focal length of the first slow axis collimating lens and/or the second slow axis collimating lens as much as possible under the same volume, thereby making the output spot size Smaller, higher beam quality.
最后应说明的是:以上实施例仅用以说明本申请的技术方案,而非对其限制;在本申请的思路下,以上实施例或者不同实施例中的技术特征之间也 可以进行组合,步骤可以以任意顺序实现,并存在如上所述的本申请的不同方面的许多其它变化,为了简明,它们没有在细节中提供;尽管参照前述实施例对本申请进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, not to limit them; under the idea of this application, the above embodiments or the technical features in different embodiments can also be combined. The steps can be implemented in any order, and there are many other variations in different aspects of the application as described above. For the sake of brevity, they are not provided in the details; although the application has been described in detail with reference to the foregoing embodiments, it is common in the art The technical personnel should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or equivalently replace some of the technical features; and these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the implementations of this application Examples of the scope of technical solutions.
Claims (10)
- 一种半导体激光器,其特征在于,包括:A semiconductor laser, characterized in that it comprises:偏振合束器,设有透射端面、反射端面和出射端面;Polarization beam combiner with transmission end face, reflection end face and exit end face;第一发光模块,用于发射激光,所述第一发光模块发射的激光自所述透射端面至所述出射端面透射经过所述偏振合束器;The first light-emitting module is configured to emit laser light, and the laser light emitted by the first light-emitting module transmits through the polarization beam combiner from the transmission end surface to the emission end surface;第二发光模块,用于发射激光,所述第二发光模块发射的激光自所述反射端面进入所述偏振合束器,并于所述偏振合束器内反射,然后自所述出射端面射出;The second light-emitting module is configured to emit laser light. The laser light emitted by the second light-emitting module enters the polarization beam combiner from the reflecting end surface, is reflected in the polarization beam combiner, and then is emitted from the emission end surface ;聚焦透镜,用于接收自所述出射端面射出的激光,并进行聚焦;以及A focusing lens for receiving and focusing the laser light emitted from the emitting end surface; and光纤,用于接收自所述聚焦透镜射出的激光。The optical fiber is used to receive the laser light emitted from the focusing lens.
- 根据权利要求1所述的半导体激光器,其特征在于,所述第一发光模块包括依次排列的第一半导体激光芯片、第一快轴准直透镜以及第一慢轴准直透镜,所述第一半导体激光芯片发出的激光可依次经过所述第一快轴准直透镜以及第一慢轴准直透镜。The semiconductor laser according to claim 1, wherein the first light-emitting module comprises a first semiconductor laser chip, a first fast-axis collimating lens, and a first slow-axis collimating lens arranged in sequence, and the first The laser light emitted by the semiconductor laser chip may sequentially pass through the first fast axis collimating lens and the first slow axis collimating lens.
- 根据权利要求2所述的半导体激光器,其特征在于,所述第一发光模块还包括第一反射镜,所述第一反射镜与所述第一快轴准直透镜分别设于所述第一慢轴准直透镜的两侧;The semiconductor laser according to claim 2, wherein the first light-emitting module further comprises a first reflector, and the first reflector and the first fast axis collimating lens are respectively provided on the first Both sides of the slow axis collimating lens;所述第一反射镜用于接收自所述第一慢轴准直透镜出射的激光,并将接收的所述激光反射至所述透射端面。The first reflecting mirror is used for receiving the laser light emitted from the first slow axis collimating lens, and reflecting the received laser light to the transmission end surface.
- 根据权利要求3所述的半导体激光器,其特征在于,所述第二发光模块包括依次排列的第二半导体激光芯片、第二快轴准直透镜以及第二慢轴准直透镜,所述第二半导体激光芯片发出的激光可依次经过所述第二快轴准直透镜以及第二慢轴准直透镜。The semiconductor laser according to claim 3, wherein the second light emitting module comprises a second semiconductor laser chip, a second fast axis collimating lens, and a second slow axis collimating lens arranged in sequence, the second The laser light emitted by the semiconductor laser chip may sequentially pass through the second fast axis collimating lens and the second slow axis collimating lens.
- 根据权利要求4所述的半导体激光器,其特征在于,所述第二发光模块还包括第二反射镜,所述第二反射镜与所述第二快轴准直透镜分别设于所 述第二慢轴准直透镜的两侧;The semiconductor laser according to claim 4, wherein the second light-emitting module further comprises a second reflector, and the second reflector and the second fast-axis collimating lens are respectively provided in the second Both sides of the slow axis collimating lens;所述第二反射镜用于接收自所述第二慢轴准直透镜出射的激光,并将接收的所述激光反射至所述反射端面。The second reflecting mirror is used for receiving the laser light emitted from the second slow axis collimating lens, and reflecting the received laser light to the reflecting end surface.
- 根据权利要求4所述的半导体激光器,其特征在于,还包括反射器;The semiconductor laser according to claim 4, further comprising a reflector;所述第二发光模块还包括第二反射镜,所述第二反射镜与所述第二快轴准直透镜分别设于所述第二慢轴准直透镜的两侧,所述第二反射镜用于接收自所述第二慢轴准直透镜出射的激光,并将接收的所述激光反射至所述反射器;The second light-emitting module further includes a second reflector, and the second reflector and the second fast-axis collimator lens are respectively disposed on both sides of the second slow-axis collimator lens, and the second reflector The mirror is used for receiving the laser light emitted from the second slow axis collimating lens and reflecting the received laser light to the reflector;所述反射器用于接收自所述第二反射镜出射的激光,并将接收的所述激光反射至所述反射端面。The reflector is used for receiving the laser light emitted from the second mirror and reflecting the received laser light to the reflecting end surface.
- 根据权利要求4至6任一项所述的半导体激光器,其特征在于,所述第一发光模块与所述第二发光模块的数量均为两个以上,所述两个以上第一发光模块的各所述第一半导体激光芯片沿所述偏振合束器的高度方向错开设置,所述第二发光模块与所述第一发光模块一一对应,相互对应的所述第一半导体激光芯片与所述第二半导体激光芯片相对所述偏振合束器位于同一高度。The semiconductor laser according to any one of claims 4 to 6, wherein the number of the first light-emitting module and the number of the second light-emitting module are both more than two, and the number of the two or more first light-emitting modules Each of the first semiconductor laser chips is staggered along the height direction of the polarization beam combiner, the second light-emitting module corresponds to the first light-emitting module one-to-one, and the first semiconductor laser chip corresponds to each other. The second semiconductor laser chip is located at the same height relative to the polarization beam combiner.
- 根据权利要求7所述的半导体激光器,其特征在于,所述第一发光模块与所述第二发光模块相对设置,沿自所述第一反射镜指向偏振合束器的方向,所述第二发光模块与所述第一发光模块之间相互错开。7. The semiconductor laser according to claim 7, wherein the first light-emitting module and the second light-emitting module are arranged opposite to each other, along a direction from the first reflector to the polarization beam combiner, and the second The light-emitting module and the first light-emitting module are staggered with each other.
- 根据权利要求4至6任一项所述的半导体激光器,其特征在于,所述第一半导体激光芯片与所述第二半导体激光芯片相对设置;The semiconductor laser according to any one of claims 4 to 6, wherein the first semiconductor laser chip and the second semiconductor laser chip are arranged opposite to each other;沿自所述第一反射镜指向所述偏振合束器的方向,所述第一半导体激光芯片与所述第二半导体激光芯片之间相互错开;Along the direction from the first reflecting mirror to the polarization beam combiner, the first semiconductor laser chip and the second semiconductor laser chip are staggered from each other;沿自所述第一半导体激光芯片指向所述第一慢轴准直透镜的方向,所述第一半导体激光芯片位于所述第二半导体激光芯片与所述第二慢轴准直透镜之间。Along the direction from the first semiconductor laser chip to the first slow axis collimating lens, the first semiconductor laser chip is located between the second semiconductor laser chip and the second slow axis collimating lens.
- 根据权利要求4至6任一项所述的半导体激光器,其特征在于,所述第一半导体激光芯片与所述第二半导体激光芯片相对设置;The semiconductor laser according to any one of claims 4 to 6, wherein the first semiconductor laser chip and the second semiconductor laser chip are arranged opposite to each other;沿自所述第一反射镜指向所述偏振合束器的方向,所述第一半导体激光芯片与所述第二半导体激光芯片之间相互错开;Along the direction from the first reflecting mirror to the polarization beam combiner, the first semiconductor laser chip and the second semiconductor laser chip are staggered from each other;沿自所述第一半导体激光芯片指向所述第一慢轴准直透镜的方向,所述第二半导体激光芯片位于所述第一半导体激光芯片与所述第一慢轴准直透镜之间。Along the direction from the first semiconductor laser chip to the first slow axis collimating lens, the second semiconductor laser chip is located between the first semiconductor laser chip and the first slow axis collimating lens.
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