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WO2013042959A3 - Vacuum drying apparatus - Google Patents

Vacuum drying apparatus Download PDF

Info

Publication number
WO2013042959A3
WO2013042959A3 PCT/KR2012/007545 KR2012007545W WO2013042959A3 WO 2013042959 A3 WO2013042959 A3 WO 2013042959A3 KR 2012007545 W KR2012007545 W KR 2012007545W WO 2013042959 A3 WO2013042959 A3 WO 2013042959A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating liquid
vacuum drying
housing
drying apparatus
dried
Prior art date
Application number
PCT/KR2012/007545
Other languages
French (fr)
Korean (ko)
Other versions
WO2013042959A2 (en
Inventor
전영준
이민철
Original Assignee
주식회사 테라세미콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110095919A external-priority patent/KR101334163B1/en
Priority claimed from KR1020110111118A external-priority patent/KR101317286B1/en
Application filed by 주식회사 테라세미콘 filed Critical 주식회사 테라세미콘
Publication of WO2013042959A2 publication Critical patent/WO2013042959A2/en
Publication of WO2013042959A3 publication Critical patent/WO2013042959A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

Disclosed is a vacuum drying apparatus. The vacuum drying apparatus according to the present invention dries an object using a pressure difference and heat, thus enabling the solvent mixed with a coating liquid coated on the object to be excellently dried. When a large amount of solvent is dried, a coating liquid may be hardened to the core thereof, and therefore, problems of the coating liquid leaning to one side or of generating pores caused by the solvent remaining at the coating liquid may be reduced. Consequently, reliability of the dried object can be improved. In addition, a connector is arranged in a housing to transmit power from an external source to a heater installed within the housing, and the space between the connector and the housing is completely sealed to achieve further excellent efficiency in drying the solvent mixed with the coating liquid coated on the object.
PCT/KR2012/007545 2011-09-22 2012-09-20 Vacuum drying apparatus WO2013042959A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1020110095919A KR101334163B1 (en) 2011-09-22 2011-09-22 Vacuum dry apparatus
KR10-2011-0095919 2011-09-22
KR10-2011-0111118 2011-10-28
KR1020110111118A KR101317286B1 (en) 2011-10-28 2011-10-28 Vacuum dry apparatus

Publications (2)

Publication Number Publication Date
WO2013042959A2 WO2013042959A2 (en) 2013-03-28
WO2013042959A3 true WO2013042959A3 (en) 2013-05-30

Family

ID=47915014

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2012/007545 WO2013042959A2 (en) 2011-09-22 2012-09-20 Vacuum drying apparatus

Country Status (2)

Country Link
TW (1) TW201321696A (en)
WO (1) WO2013042959A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103353209B (en) * 2013-06-20 2015-04-29 京东方科技集团股份有限公司 Vacuum drying device and photolithographic process
US9969725B2 (en) 2014-04-21 2018-05-15 Merck Sharp & Dohme Corp. Pharmaceutical salts of an orexin receptor antagonist
CN107362953A (en) * 2017-09-01 2017-11-21 深圳市华星光电半导体显示技术有限公司 Photoresistance roasting plant

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10311676A (en) * 1997-05-14 1998-11-24 Shibaura Eng Works Co Ltd Vacuum drying apparatus
KR20070055829A (en) * 2005-11-28 2007-05-31 엘지.필립스 엘시디 주식회사 Vacuum curing thermosetting device
KR100787873B1 (en) * 2006-07-07 2007-12-27 (주)나노테크 Substrate Drying Equipment and Drying Method
KR100859975B1 (en) * 2008-02-20 2008-09-25 씨디에스(주) Multistage Vacuum Drying Device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10311676A (en) * 1997-05-14 1998-11-24 Shibaura Eng Works Co Ltd Vacuum drying apparatus
KR20070055829A (en) * 2005-11-28 2007-05-31 엘지.필립스 엘시디 주식회사 Vacuum curing thermosetting device
KR100787873B1 (en) * 2006-07-07 2007-12-27 (주)나노테크 Substrate Drying Equipment and Drying Method
KR100859975B1 (en) * 2008-02-20 2008-09-25 씨디에스(주) Multistage Vacuum Drying Device

Also Published As

Publication number Publication date
WO2013042959A2 (en) 2013-03-28
TW201321696A (en) 2013-06-01

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