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TW202305299A - Immersion-cooled heat-dissipation structure - Google Patents

Immersion-cooled heat-dissipation structure Download PDF

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TW202305299A
TW202305299A TW110127268A TW110127268A TW202305299A TW 202305299 A TW202305299 A TW 202305299A TW 110127268 A TW110127268 A TW 110127268A TW 110127268 A TW110127268 A TW 110127268A TW 202305299 A TW202305299 A TW 202305299A
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heat dissipation
porous metal
super
thermal interface
metal heat
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TW110127268A
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TWI804930B (en
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楊景明
彭晟書
葉子暘
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艾姆勒車電股份有限公司
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Abstract

An immersion-cooled heat-dissipation structure includes a porous metal heat dissipation material having a porosity that is greater than 8%, an integrated heat spreader, and a thermal interface material. The thermal interface material is located between the porous metal heat dissipation material and the integrated heat spreader to form a thermal connection there-between. A super-wetting layer is formed on a connecting surface between the porous metal heat dissipation material and the thermal interface material, and the water wetting angle of the super-wetting layer is less than 10DEG, or a super-hydrophobic layer is formed on a connecting surface between the porous metal heat dissipation material and the thermal interface material, and the water wetting angle of the super-hydrophobic layer is greater than 120DEG.

Description

浸沒式散熱結構Immersion cooling structure

本發明涉及一種散熱結構,具體來說是涉及一種浸沒式散熱結構。The invention relates to a heat dissipation structure, in particular to an immersion type heat dissipation structure.

浸沒式冷卻技術是將發熱元件(如伺服器、磁碟陣列等)直接浸沒在不導電的冷卻液中,以透過冷卻液吸熱氣化帶走發熱元件運作所產生之熱能。然而,如何透過浸沒式冷卻技術更加有效地進行散熱一直是業界所需要解決的問題。The immersion cooling technology is to immerse the heating element (such as server, disk array, etc.) directly in the non-conductive cooling liquid, so as to take away the heat energy generated by the heating element through the heat absorption and vaporization of the cooling liquid. However, how to dissipate heat more effectively through immersion cooling technology has always been a problem to be solved in the industry.

有鑑於此,本發明人本於多年從事相關產品之開發與設計,有感上述缺失之可改善,乃特潛心研究並配合學理之運用,終於提出一種設計合理且有效改善上述缺失之本發明。In view of this, the inventor has been engaged in the development and design of related products for many years, and felt that the above-mentioned defects can be improved, so he devoted himself to research and combined with the application of theories, and finally proposed an invention with a reasonable design and effective improvement of the above-mentioned defects.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種浸沒式散熱結構。The technical problem to be solved by the present invention is to provide an immersion heat dissipation structure for the deficiencies of the prior art.

為了解決上述的技術問題,本發明提供一種浸沒式散熱結構,包括:多孔金屬散熱材,其孔隙率>8%、集成散熱器、以及熱界面材;其中,所述熱界面材位於所述多孔金屬散熱材與所述集成散熱器之間以形成熱連接,並且所述多孔金屬散熱材與所述熱界面材的連接面上形成有一超潤濕層,所述超潤濕層對水的潤濕角<10°。In order to solve the above technical problems, the present invention provides an immersion heat dissipation structure, including: a porous metal heat dissipation material with a porosity > 8%, an integrated heat sink, and a thermal interface material; wherein the thermal interface material is located on the porous A thermal connection is formed between the metal heat dissipation material and the integrated heat sink, and a super-wetting layer is formed on the connecting surface of the porous metal heat dissipation material and the thermal interface material, and the super-wetting layer is wetted by water. Wet angle <10°.

在一優選實施例中,所述多孔金屬散熱材是以銅粉末燒結所形成的一多孔銅散熱材。In a preferred embodiment, the porous metal heat dissipation material is a porous copper heat dissipation material formed by sintering copper powder.

在一優選實施例中,所述熱界面材為一親水性導熱膠。In a preferred embodiment, the thermal interface material is a hydrophilic thermal conductive adhesive.

在一優選實施例中,所述超潤濕層為一厚度<10um的薄膜層。In a preferred embodiment, the super-wetting layer is a film layer with a thickness <10um.

為了解決上述的技術問題,本發明另提供一種浸沒式散熱結構,包括:多孔金屬散熱材,其孔隙率>8%、集成散熱器、以及熱界面材;其中,所述熱界面材位於所述多孔金屬散熱材與所述集成散熱器之間以形成熱連接,並且所述多孔金屬散熱材與所述熱界面材的連接面上形成有一超疏水層,所述超疏水層對水的潤濕角>120°。In order to solve the above technical problems, the present invention further provides an immersion heat dissipation structure, including: a porous metal heat dissipation material with a porosity > 8%, an integrated heat sink, and a thermal interface material; wherein the thermal interface material is located on the A thermal connection is formed between the porous metal heat dissipation material and the integrated heat sink, and a super-hydrophobic layer is formed on the connecting surface of the porous metal heat dissipation material and the thermal interface material, and the super-hydrophobic layer is wetted by water Angle > 120°.

在一優選實施例中,所述多孔金屬散熱材是以銅粉末燒結所形成的一多孔銅散熱材。In a preferred embodiment, the porous metal heat dissipation material is a porous copper heat dissipation material formed by sintering copper powder.

在一優選實施例中,所述熱界面材為一非親水性導熱膠。In a preferred embodiment, the thermal interface material is a non-hydrophilic thermal conductive adhesive.

在一優選實施例中,所述超疏水層為一厚度<10um的薄膜層。In a preferred embodiment, the super-hydrophobic layer is a film layer with a thickness <10um.

本發明的有益效果至少在於,本發明提供的浸沒式散熱結構,其可以通過「多孔金屬散熱材,其孔隙率>8%」、「所述熱界面材位於所述多孔金屬散熱材與所述集成散熱器之間以形成熱連接」、「所述多孔金屬散熱材與所述熱界面材的連接面上形成有一超潤濕層,所述超潤濕層對水的潤濕角<10°」、或「所述多孔金屬散熱材與所述熱界面材的連接面上形成有一超疏水層,所述超疏水層對水的潤濕角>120°」的技術方案,使得本發明提供的浸沒式散熱結構的多孔金屬散熱材的區域的氣泡生成量能有效增加,並且熱界面材可以透過超潤濕層或超疏水層增加與多孔金屬散熱材的連接性,進而更加提升傳熱效率。The beneficial effect of the present invention lies at least in that the submerged heat dissipation structure provided by the present invention can pass through the "porous metal heat dissipation material, its porosity > 8%", "the thermal interface material is located between the porous metal heat dissipation material and the Integrate radiators to form thermal connections", "A super-wetting layer is formed on the connecting surface of the porous metal heat dissipation material and the thermal interface material, and the wetting angle of the super-wetting layer to water is <10° ", or "a super-hydrophobic layer is formed on the connection surface between the porous metal heat dissipation material and the thermal interface material, and the wetting angle of the super-hydrophobic layer to water is >120°", so that the present invention provides The bubble generation in the area of the porous metal heat dissipation material of the immersion heat dissipation structure can be effectively increased, and the thermal interface material can increase the connectivity with the porous metal heat dissipation material through the super-wetting layer or the super-hydrophobic layer, thereby further improving the heat transfer efficiency.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following are specific examples to illustrate the implementation methods disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[第一實施例][first embodiment]

請參閱圖1所示,其為本發明的第一實施例,本發明實施例提供一種浸沒式散熱結構。如圖1所示,根據本發明實施例所提供的浸沒式散熱結構,基本上從上到下依序可以為多孔金屬散熱材10、熱界面材(Thermal Interface Material,TIM) 20、以及集成散熱器(Integrated Heat Spreader,IHS) 30。Please refer to FIG. 1 , which is the first embodiment of the present invention, which provides an immersion heat dissipation structure. As shown in FIG. 1, the submerged heat dissipation structure provided by the embodiment of the present invention can basically be a porous metal heat dissipation material 10, a thermal interface material (Thermal Interface Material, TIM) 20, and an integrated heat dissipation structure from top to bottom. Integrated Heat Spreader (IHS) 30 .

本實施例的多孔金屬散熱材10可以是以銅粉末燒結所形成的多孔銅散熱材,且可以是浸沒於兩相冷卻液(如電子氟化液)中,使得兩相冷卻液在吸熱氣化形成的氣泡數量能大大增加,進而大幅強化了散熱效果。進一步說,本實施例的多孔金屬散熱材10的孔隙率是>8%,使得兩相冷卻液在吸熱氣化形成的氣泡數量能確實大大增加。The porous metal heat dissipation material 10 of this embodiment can be a porous copper heat dissipation material formed by sintering copper powder, and can be immersed in a two-phase cooling liquid (such as electronic fluorinated liquid), so that the two-phase cooling liquid is gasified when it absorbs heat The number of air bubbles formed can be greatly increased, thereby greatly enhancing the heat dissipation effect. Furthermore, the porosity of the porous metal heat dissipation material 10 of this embodiment is >8%, so that the number of bubbles formed by the two-phase cooling liquid during the heat-absorbing gasification can indeed be greatly increased.

本實施例的集成散熱器30可用於接觸發熱元件,並且本實施例的熱界面材20位於多孔金屬散熱材10與集成散熱器30之間,用於提升集成散熱器30與多孔金屬散熱材10之間之熱連接,進而提升集成散熱器30至多孔金屬散熱材10的傳熱效率。The integrated heat sink 30 of this embodiment can be used to contact heating elements, and the thermal interface material 20 of this embodiment is located between the porous metal heat sink 10 and the integrated heat sink 30, and is used to lift the integrated heat sink 30 and the porous metal heat sink 10 The heat connection between the integrated heat sink 30 and the porous metal heat dissipation material 10 is further improved.

在本實施例中,熱界面材20為導熱膠,且為親水性導熱膠,例如以親水性環氧樹脂為基底的導熱膠。因此,為了增加集成散熱器30與多孔金屬散熱材10之間之熱連接,本實施例的多孔金屬散熱材10與熱界面材20的連接面上形成有一超潤濕層15,其可以是透過材料本身或表面微觀結構來改變材料表面潤濕性,並且本實施例的超潤濕層15對水的潤濕角(wetting angle) θ1 <10°(例如圖2所示意),使得本實施例中的親水性的熱界面材20可以透過超高潤濕性的超潤濕層15增加與多孔金屬散熱材10的連接性,進而更加提升傳熱效率。 In this embodiment, the thermal interface material 20 is a thermally conductive adhesive, and is a hydrophilic thermally conductive adhesive, such as a hydrophilic epoxy resin-based thermally conductive adhesive. Therefore, in order to increase the thermal connection between the integrated heat sink 30 and the porous metal heat dissipation material 10, a super-wetting layer 15 is formed on the connection surface of the porous metal heat dissipation material 10 and the thermal interface material 20 of this embodiment, which can be through The wettability of the surface of the material is changed by the material itself or the microstructure of the surface, and the wetting angle (wetting angle) θ 1 of the super-wetting layer 15 of the present embodiment to water is <10° (such as shown in FIG. 2 ), so that this embodiment The hydrophilic thermal interface material 20 in this example can increase the connectivity with the porous metal heat dissipation material 10 through the ultra-high wettability super-wettable layer 15, thereby further improving the heat transfer efficiency.

進一步說,為了使親水性的熱界面材20得以透過超高潤濕性的超潤濕層15更加有效地增加與多孔金屬散熱材10的連接性與提升傳熱效率,本實施例的超潤濕層15為一厚度<10um的薄膜層。Furthermore, in order to allow the hydrophilic thermal interface material 20 to pass through the ultra-high wettability super-wetting layer 15 to more effectively increase the connectivity with the porous metal heat dissipation material 10 and improve the heat transfer efficiency, the super-wetting layer of this embodiment The wet layer 15 is a film layer with a thickness <10um.

[第二實施例][Second embodiment]

請參閱圖3所示,其為本發明的第二實施例,本實施例的浸沒式散熱結構與第一實施例大致相同,其差異說明如下。Please refer to FIG. 3 , which is the second embodiment of the present invention. The immersion heat dissipation structure of this embodiment is substantially the same as that of the first embodiment, and the differences are described as follows.

在本實施例中,熱界面材20為導熱膠,且為非親水性導熱膠,例如以非親水性矽油為基底的導熱膠。因此,為了增加集成散熱器30與多孔金屬散熱材10之間之熱連接,本實施例的多孔金屬散熱材10與熱界面材20的連接面上形成有一超疏水層17,其可以是透過材料本身或表面微觀結構來改變材料表面疏水性,並且本實施例的超疏水層17對水的潤濕角(wetting angle) θ2 >120°(例如圖4所示意),使得本實施例中的非親水性的熱界面材20可以透過超高疏水性的超疏水層17增加與多孔金屬散熱材10的連接性,進而更加提升傳熱效率。 In this embodiment, the thermal interface material 20 is a thermally conductive adhesive, and is a non-hydrophilic thermally conductive adhesive, such as a non-hydrophilic silicone oil-based thermally conductive adhesive. Therefore, in order to increase the thermal connection between the integrated heat sink 30 and the porous metal heat dissipation material 10, a superhydrophobic layer 17 is formed on the connecting surface of the porous metal heat dissipation material 10 and the thermal interface material 20 of this embodiment, which can be a transparent material itself or the surface microstructure to change the surface hydrophobicity of the material, and the superhydrophobic layer 17 of this embodiment has a wetting angle (wetting angle) θ 2 >120° (such as shown in Figure 4 ) to water, so that the superhydrophobic layer 17 in this embodiment The non-hydrophilic thermal interface material 20 can increase the connection with the porous metal heat dissipation material 10 through the super-hydrophobic super-hydrophobic layer 17, thereby further improving the heat transfer efficiency.

進一步說,為了使非親水性的熱界面材20得以透過超高疏水性的超疏水層17更加有效地增加與多孔金屬散熱材10的連接性與提升傳熱效率,本實施例的超疏水層17為一厚度<10um的薄膜層。Furthermore, in order to allow the non-hydrophilic thermal interface material 20 to pass through the super-hydrophobic super-hydrophobic layer 17 to more effectively increase the connectivity with the porous metal heat dissipation material 10 and improve the heat transfer efficiency, the super-hydrophobic layer of this embodiment 17 is a film layer with a thickness <10um.

綜合以上所述,本發明實施例提供的浸沒式散熱結構,其可以通過「多孔金屬散熱材10,其孔隙率>8%」、「所述熱界面材20位於所述多孔金屬散熱材10與所述集成散熱器30之間以形成熱連接」、「所述多孔金屬散熱材10與所述熱界面材20的連接面上形成有一超潤濕層15,所述超潤濕層15對水的潤濕角<10°」、或「所述多孔金屬散熱材10與所述熱界面材20的連接面上形成有一超疏水層17,所述超疏水層17對水的潤濕角>120°」的技術方案,使得本發明實施例提供的浸沒式散熱結構的多孔金屬散熱材10區域的氣泡生成量能有效增加,並且熱界面材20可以透過超潤濕層15或超疏水層17增加與多孔金屬散熱材10的連接性,進而更加提升傳熱效率。Based on the above, the submerged heat dissipation structure provided by the embodiment of the present invention can pass through "porous metal heat dissipation material 10, the porosity of which is > 8%", "the thermal interface material 20 is located between the porous metal heat dissipation material 10 and Between the integrated radiator 30 to form a thermal connection", "a super-wetting layer 15 is formed on the connecting surface of the porous metal heat dissipation material 10 and the thermal interface material 20, and the super-wetting layer 15 is resistant to water The wetting angle of <10°", or "a super-hydrophobic layer 17 is formed on the connecting surface of the porous metal heat dissipation material 10 and the thermal interface material 20, and the wetting angle of the super-hydrophobic layer 17 to water is > 120° °” technical solution, so that the air bubble generation in the porous metal heat dissipation material 10 region of the submerged heat dissipation structure provided by the embodiment of the present invention can be effectively increased, and the thermal interface material 20 can increase through the superwetting layer 15 or the superhydrophobic layer 17 The connectivity with the porous metal heat dissipation material 10 further improves the heat transfer efficiency.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The content disclosed above is only a preferred feasible embodiment of the present invention, and does not therefore limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

10:多孔金屬散熱材 15:超潤濕層 17:超疏水層 20:熱界面材 30:集成散熱器 θ1:潤濕角 θ2:潤濕角 10: Porous metal heat dissipation material 15: Super-wetting layer 17: Super-hydrophobic layer 20: Thermal interface material 30: Integrated radiator θ 1: Wetting angle θ 2: Wetting angle

圖1為本發明第一實施例的浸沒式散熱結構側視示意圖。FIG. 1 is a schematic side view of an immersion heat dissipation structure according to a first embodiment of the present invention.

圖2為本發明第一實施例的超潤濕層的潤濕角量測示意圖。FIG. 2 is a schematic diagram of the measurement of the wetting angle of the super-wetting layer according to the first embodiment of the present invention.

圖3為本發明第二實施例的浸沒式散熱結構側視示意圖。FIG. 3 is a schematic side view of an immersion heat dissipation structure according to a second embodiment of the present invention.

圖4為本發明第二實施例的超疏水層的潤濕角量測示意圖。FIG. 4 is a schematic diagram of the measurement of the wetting angle of the superhydrophobic layer according to the second embodiment of the present invention.

10:多孔金屬散熱材 10: Porous metal heat sink

15:超潤濕層 15: super wetting layer

20:熱界面材 20: thermal interface material

30:集成散熱器 30: Integrated radiator

Claims (8)

一種浸沒式散熱結構,包括:多孔金屬散熱材,其孔隙率>8%、集成散熱器、以及熱界面材;其中,所述熱界面材位於所述多孔金屬散熱材與所述集成散熱器之間以形成熱連接,並且所述多孔金屬散熱材與所述熱界面材的連接面上形成有一超潤濕層,所述超潤濕層對水的潤濕角<10°。An immersion heat dissipation structure, comprising: a porous metal heat dissipation material with a porosity > 8%, an integrated heat sink, and a thermal interface material; wherein, the thermal interface material is located between the porous metal heat dissipation material and the integrated heat sink In order to form a thermal connection, and a super-wetting layer is formed on the connecting surface of the porous metal heat dissipation material and the thermal interface material, and the wetting angle of the super-wetting layer to water is less than 10°. 如請求項1所述的浸沒式散熱結構,其中,所述多孔金屬散熱材是以銅粉末燒結所形成的一多孔銅散熱材。The submerged heat dissipation structure according to claim 1, wherein the porous metal heat dissipation material is a porous copper heat dissipation material formed by sintering copper powder. 如請求項1所述的浸沒式散熱結構,其中,所述熱界面材為一親水性導熱膠。The immersion heat dissipation structure according to claim 1, wherein the thermal interface material is a hydrophilic thermal conductive adhesive. 如請求項1所述的浸沒式散熱結構,其中,所述超潤濕層為一厚度<10um的薄膜層。The immersion heat dissipation structure according to claim 1, wherein the super-wetting layer is a film layer with a thickness <10um. 一種浸沒式散熱結構,包括:多孔金屬散熱材,其孔隙率>8%、集成散熱器、以及熱界面材;其中,所述熱界面材位於所述多孔金屬散熱材與所述集成散熱器之間以形成熱連接,並且所述多孔金屬散熱材與所述熱界面材的連接面上形成有一超疏水層,所述超疏水層對水的潤濕角>120°。An immersion heat dissipation structure, comprising: a porous metal heat dissipation material with a porosity > 8%, an integrated heat sink, and a thermal interface material; wherein, the thermal interface material is located between the porous metal heat dissipation material and the integrated heat sink In order to form a thermal connection, and a super-hydrophobic layer is formed on the connection surface of the porous metal heat dissipation material and the thermal interface material, and the wetting angle of the super-hydrophobic layer to water is greater than 120°. 如請求項5所述的浸沒式散熱結構,其中,所述多孔金屬散熱材是以銅粉末燒結所形成的一多孔銅散熱材。The submerged heat dissipation structure according to claim 5, wherein the porous metal heat dissipation material is a porous copper heat dissipation material formed by sintering copper powder. 如請求項5所述的浸沒式散熱結構,其中,所述熱界面材為一非親水性導熱膠。The immersion heat dissipation structure according to claim 5, wherein the thermal interface material is a non-hydrophilic thermal conductive adhesive. 如請求項5所述的浸沒式散熱結構,其中,所述超疏水層為一厚度<10um的薄膜層。The immersion heat dissipation structure according to claim 5, wherein the super-hydrophobic layer is a film layer with a thickness <10um.
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