200831291 九、發明說明： 【發明所屬之技術領域】 本發明係關於將基板及在支撐體上設有感光材料層之 長尺寸狀感光性薄膜輸送於一對壓合輥之間，將該感光材 料層貼附於該基板上，藉以製造感光性層積體之感光性層 積體之製造裝置及製造方法。 【先前技術】 例如，在液晶面板用基板、印刷配線用基板、PDP面 板用基板中，係將具有感光性樹脂層（感光性材料層）之感 光性薄片體（感光性薄膜）貼附於基板表面而構成。感光性 薄片體係於可撓性塑膠支撐體上依序層積感光性材料層及 保護膜所構成。 使用於此種感光性薄片體之貼附的製造裝置，通常係 採用使玻璃基板或樹脂基板等之基板各相隔既定的間隔進 行運送，同時對應於該基板上所貼附之感光性樹脂層的範 圍，從該感光性片體剝去保護膜的方法。 例如，在日本特開平1 1-34280號公報所揭示之製造裝 置中，如第9圖所示，從薄膜輥1送出之層積體薄膜（感光 性片體）la，係捲繞於導引輥2a，2b上而沿水平之薄膜運送 面延伸。在此導引輥2b上裝設有旋轉編碼器3，以輸出響 應層積體薄膜la之輸送量之數量的脈衝信號。 沿水平之薄膜運送面所延伸的層積體薄膜1 a，係捲繞 於吸輥4上，同時在該導引輥2b與該吸輥4之間設置半切 斷器5及覆膜剝離裝置6。 200831291 半切斷器5係具備於層積體薄膜la之運送方向相隔既 定間隔之一對的圓盤形切割刃5a，5 b°圓盤形切割刃5a，5b 係藉由沿層積體薄膜la之薄膜寬度方向移動’而將該層積 體薄膜la之覆膜（未圖示）的剝離部分及殘留部分之2處的 交界部分與其背面側之感光性樹脂層（未圖示）一體地切 覆膜剝離裝置6係在加壓輥8a，8b之間將從黏著帶輥7 所送出之黏著帶7a強力地壓接於覆膜之剝離部分之後’藉 由捲取輥9進行捲繞。藉此’覆膜之剝離部分被從感光性 樹脂層上剝離並與黏著帶7 a —起捲繞於捲取輥9上。 在吸輥4之下游配設有一對之層壓輥1 2a，1 2b，此層壓 輥12a，12b係將剝離覆膜後之層積體薄膜la的剝離部分重 疊地壓合於藉由基板運送裝置1 〇以既定之間隔所運送來 之複數個基板1 1的上面。在此層壓輥12a，12b之下游側配 置有支撐薄膜捲取輥1 3。貼附於基板1 1上之透光性支撐薄 膜（未圖示），係在使感光性樹脂層殘留於基板1 1上之狀態 下與覆膜之殘留部分一起捲繞於支撐薄膜捲取輥1 3上。 爲了將剝離覆膜後之層積體薄膜1 a的剝離部分正確地 貼附於基板1 1之所需範圍，需要以覆膜之剝離部分及殘留 部分的交界部分爲基準，將層積體薄膜1 a高精度地輸送至 層壓輥12a，12b之間。 然而，層積體薄膜1 a係將感光性樹脂層形成於可撓性 支撐膜上者，且在賦予張力之狀態下被運送，所以，恐有 因在運送中產生之伸長的影響而造成該交界部分之位置偏 200831291 移之擔憂。另外，層壓輥12a，12b係在將層積體薄膜la與 基板1 1加熱之狀態下進行貼附，所以，造成在層壓輥 12a，l 2 b附近的層積體薄膜la的伸長特別大。 在此情況時，在層壓輥1 2a，1 2b之間，若可檢測出該層 積體薄膜1 a的該交界部分之位置的話，便可調整此位置而 可進行高精度之貼附處理。然而，在維持由層壓輥12a，12b 夾持層積體薄膜1 a與基板1 1的狀態下檢測交界部分之位 置之情況，因層壓輥1 2a，1 2b會阻礙檢測，所以現實上並不 可行。 . 因此，遭到在取出所製造完成之感光性層積體以進行 檢查，且貼附位置精度降低之情況，需要進行調整層積體 薄膜la之輸送量等的處理，而造成製造效率降低，同時因 製造出超出允許範圍之感光性層積體而造成良率降低的不 利的指摘。 【發明內容】 本發明之目的在於，提供一種可容易且高精度地檢測 感光材料層對基板之貼附狀態，並經調整感光材料層之貼 附位置，而可有效地製造高品質之感光性層積體的感光性 層積體之製造裝置及製造方法。 本發明之感光性層積體之製造裝置，係將在支撐體上 依序層積感光材料層及保護膜而構成之長尺寸狀感光性薄 膜送出，在該保護膜上形成對應於剝離部分及殘留部分之 交界位置的加工部位，將該保護膜之該剝離部分加以剝 離，並與以既定之間隔所供給的基板一起連續地送至被加 200831291 熱之一對壓合輥之間，而在該基板之間配置該保護膜的該 殘留部分，同時利用將露出之該感光材料層貼附於該基板 上，以製造感光性層積體，其特徵爲具備： 檢測部，係配設於該壓合輥之下游側，以檢測該基板 之端部、及貼附於該基板上之該長尺寸狀感光性薄膜之該 加工部位；及 距離計算部，係用以計算該端部及該加工部位之間的 距離。 • 另外，本發明之製造感光性層積體之製造方法，係將 在支撐體上依序層積感光材料層及保護膜而構成之長尺寸 狀感光性薄膜送出，在該保護膜上形成對應於剝離部分及 殘留部分之交界位置的加工部位，將該保護膜之該剝離部 分加以剝離，並與以既定之間隔所供給的基板一起連續地 送至被加熱之一對壓合輥之間，而在該基板之間配置該保 護膜的該殘留部分，同時利用將露出之該感光材料層貼附 於該基板上，以製造感光性層積體，其特徵爲：該方法係 ® 由以下步驟所構成： 檢測該基板之端部、及貼附於該基板上之該長尺寸狀 感光性薄膜的該加工部位之步驟；及 計算該端部及該加工部位之間的距離之步驟。 在本發明中，藉由檢測基板之端部及貼附於此基板上 之長尺寸狀之感光性薄膜的加工部位，可容易且高精度地 檢測感光材料層對基板之貼附狀態。另外，藉由根據檢測 到之貼附狀態來調整感光材料層對基板之貼附位置，可有 200831291 效地製造高品質之感光性層積體。 根據以下之較佳實施形態例的說明並配合附添$ 面，應可更加瞭解上述之目的、特徵及優點。 【實施方式】 第1圖爲本發明第1實施形態之感光性層積體的製造 裝置20之槪略構成圖，此製造裝置20係在液晶或有機EL 用濾色器之製作步驟，進行將長尺寸狀之感光性薄膜 22a，22b之各感光性樹脂層28 (待後述）並排地熱轉寫於玻璃 基板2 4上的作業。感光性薄膜2 2 a, 2 2 b係分別設定爲既定 之寬度尺寸，例如，該感光性薄膜22a係構成爲比該感光 性薄膜22b之寬度更寬。 第2圖爲使用於製造裝置20之感光性薄膜22a，22b的 剖視圖。此感光性薄膜22a，22b係將可撓性基底薄膜（支撐 體）26、感光性樹脂層（感光材料層）28及保護膜30加以層 積而構成。 如第1圖所示，製造裝置20係具備：第1及第2薄膜 輸送機構32a，32b，係收容將感光性薄膜22 a, 22b捲繞成滾 筒狀的2根（可爲2根以上）之感光性薄膜輥23 a，23 b，並可 從各感光性薄膜輥 23a，23 b同步地輸送感光性薄膜 22a，22b ;第1及第2加工機構36a，36b ’係於送出之各感 光性薄膜22a，22b的保護膜30上形成半切斷部位34 ’此半 切斷部位34係爲可於寬度方向切斷之交界位置；和第1及 第2標籤黏著機構40a，40b，係將局部具有非黏著部38a之 黏著標籤38(參照第3圖）黏接於各保護膜30上。 200831291 在第丨及第2標籤黏著機構40 a，40b之下游配設有將各 感光性薄膜22a，22b從節拍輸送變更爲連續輸送用之第1 及第2轉換（reservoir)機構42a，42b、將保護膜30以既定長 度之間隔從各感光性薄膜22a，22b剝離的第1及第2剝離機 構44a，44b、在將玻璃基板24加熱爲既定之溫度的狀態下 運送至貼附位置的基板運送機構45、及將藉由剝離該保護 膜3 0後而露出之感光性樹脂層2 8 —體且並排地貼附於該 玻璃基板24上之貼附機構46。 # 在貼附機構46之貼附位置的上游附近，配設可直接檢 測屬各感光性薄膜22a，22b之交界位置的各個半切斷部位 34的第1及第2檢測機構47a，47b。 在第1及第2薄膜輸送機構32a, 3 2b的下游附近，分別 配設貼附大致使用完之感光性薄膜22a，22b的後端及新使 用之感光性薄膜22a，22b的前端用的各個貼附台49。在貼 附台49之下游配設薄膜終端位置檢測器5 1，用以控制感光 性薄膜輥23 a，2 3b之捲繞偏差引起之寬度方向的偏移。在 ® 此，使第1及第2薄膜輸送機構32a，32b於寬度方向移動來 進行薄膜終端位置調整，但亦可利用附設組合有輥子之位 置調整機構來進行。又，第1及第2薄膜輸送機構32a，32b， 亦可將裝塡感光性薄膜輥 23a，23b以輸送感光性薄膜 2 2a，22b之輸送軸，構成爲2軸或3軸等之多軸。 第1及第2加工機構36a，3 6b係配置於計算收容捲繞於 第1及第2薄膜輸送機構32a，3 2b之各感光性薄膜輥23 a，2 3b 的輥徑用的輥子對50之下游。第1及第2加工機構36a，3 6b 200831291 係分別具備單一之圓盤刃52，此圓盤刃5 2係行走於感光性 薄膜22a，2 2b之寬度方向，並於夾著保護膜30之殘留部分 3 Ob(第2圖）的既定之2處位置形成半切斷部位34 ° 如第2圖所示，半切斷部位3 4係至少需要切斷保護膜 30，實際上爲了確實地切斷此保護膜30’而將圓盤刃52 之切入深度設定爲達到感光性樹脂層28乃至於基底薄膜 26。圓盤刃52係可採用在不旋轉而固定之狀態下在感光性 薄膜22a，22b之寬度方向上移動而形成半切斷部位34的方 ♦ 式、或不於感光性薄膜22a，22b上滑行，而一面旋轉一面在 寬度方向上移動，以形成半切斷部位34的方式。此半切斷 部位3 4亦可取代圓盤刃5 2，除採用例如使用雷射光或超音 波之切割方式之外，亦可採用切割刀刃、剪斷刃（湯姆森刃） 等來形成之方式。 又，第1及第2加工機構36a，3 6b亦可在感光性薄膜 22a，22b之運送方向（箭頭A方向）僅隔開對應於殘留部分 3 Ob之寬度的距離L而分別配設2台，隔著保護膜3 0之殘 ^ 留部分30b(第2圖）而同時形成2個之半切斷部位34。 半切斷部位34係例如設定於分別進入兩側之玻璃基 板24各10mm的位置。由玻璃基板24間之半切斷部位34 所合夾之部分，係發揮在後述貼附機構46中將感光性樹脂 層28呈邊框狀地貼附於該玻璃基板24上時的遮罩之功能。 第1及第2標籤黏著機構40a，40b係爲了對應於玻璃基 板24之間而留下保護膜30之殘留部分30b，供給連結剝離 側前方之剝離部分30aa及剝離側後方之剝離部分30ab的 -11- 200831291 黏著標籤3 8。如第2圖所示，保護膜3 0係將合夾殘留部分 3 Ob而先剝離之部分作爲前方剝離部分3 〇 a a，並將後剝離 之部分作爲後方剝離部分30ab。 如第3圖所示，黏著標籤3 8係構成爲長方形，例如係 由與保護膜3 0相同之樹脂材料所形成。黏著標籤3 8係於 中央部具有未塗佈黏著劑之非黏著部（包含微黏著）3 8a，並 於此非黏著部3 8 a之兩側、即該黏著標籤3 8之長度方向兩 端部’具有黏著於前方之剝離部分30aa的第1黏著部38b 及黏著於後方之剝離部分3 0 ab的第2黏著部3 8 c。 如第1圖所示，第1及第2標籤黏著機構40a，40b係分 別具備各隔開既定之間隔而最多可貼附7片黏著標籤3 8的 吸附墊5 4 a〜5 4 g，同時在根據該吸附墊5 4 a〜5 4 g之該黏著 標籤38的貼_附位置，配置從下方保持感光性薄膜22a，22b 用之承載台56，且該承載台56係配置成可自由昇降。 第1及第2轉換機構42 a，42b係具備可朝箭頭方向自由 搖動之躍動輥60，用以吸收上游側之感光性薄膜22a，22b 的節拍運送及下游側之該感光性薄膜22a，22b的連續運送 之速度差。在第2轉換機構42b配置躍動輥（dancer roller) 61，用以將從第1及第2薄膜輸送機構32a，32b送出之各感 光性薄膜22a，22b至貼附機構46爲止之各運送路徑長度調 整爲相同。 配置於第1及第2轉換機構42a，42b之下游的第1及第 2剝離機構44 a, 44b，係分別具備吸入筒62 ’用以遮斷感光 性薄膜22 a，22b之輸送側的張力變動，以使層壓時之張力穩 200831291 定。在各吸入筒62之附近配置剝離輥63，同時透過 輥63而從感光性薄膜22a，22b以銳角之剝離角所剝 護膜30，係除殘留部分3〇b以外，分別捲繞於保護 部64上。 在第1及第2剝離機構44a，44b之下游側配設有 張力於感光性薄膜22a，22b之第1及第2張力控 66a, 66b。第1及第2張力控制機構66a，66b係分別 缸68，在該汽缸68之驅動作用下，分別藉由張力鬆 • 器70進行搖動移位，可調整各張力鬆緊調節器70 之感光性薄膜22 a，22b的張力。又，第1及第2張力 構66a，66b係可依需要來使用，亦可加以去除。 第1 έ第2檢測機構47a，47b係具備例如、雷射 及CCD照相機72a，7 2b，用以檢測形成於感光性薄膜 上之半切斷部位34。 基板運送機構45係具備以合夾玻璃基板24之 配置之複數組基板加熱部（例如，加熱器）74、及在 ® 方向上運送玻璃基板24的運送部76。在基板加熱 時常性地監視玻璃基板24之溫度，在異常時使運: 停止或產生警報，並發出異常資訊，在後步驟將異 璃基板24作爲NG品加以排出，而可靈活運用於品 或生產管理等。在運送部76配設未圖示之氣體浮J： 使玻璃基板24浮上而朝箭頭C方向運送。玻璃基彳 運送亦可以滾筒傳輸帶來進行。 玻璃基板24之溫度測定係以在基板加熱部74 此剝離 離之保 膜捲取 可賦予 制機構 具備汽 緊調節 所滑接 控制機 位移計 22a,22b 方式所 箭頭C 部74， 送部76 常之玻 質管理 :板，以 阪24之 內或貼 -13- 200831291 附位置正前方來進行位較佳。測定方法係除接觸式（例如熱 電耦）以外，亦可採用非接觸式。 在基板加熱部74之上游設置收容複數個玻璃基板24 用的基板儲料櫃7 1。收容於此基板儲料櫃7 1內之各玻璃基 板24，係由機器人75之手部75a上所設的吸附墊79所吸 住後被取出，並插入於基板加熱部74。 貼附機構46係具備上下配置，並加熱爲既定溫度之橡 膠輥（壓合輥）80a,80b。支撐輥 82a，82b係滑接於橡膠輥 8 0a，8 Ob。一方之支撐輥82b係藉由構成輥夾緊部83之加壓 汽缸84a，84b而被按壓於橡膠輥80b側。 在橡膠輥80a附近配設有可移動之接觸防止輥86，用 以防止感光性薄膜22a，22b接觸於該橡膠輥80a。在貼附機 構46之上游附近配設有將感光性薄膜22a，22b預備加熱爲 預定溫度用的預備加熱部87。此預備加熱部87係具備例如 紅外線桿形加熱器等之加熱手段。 玻璃基板24係透過從貼附機構46朝箭頭C方向延伸 之運送路徑88而進行運送。在此運送路徑8 8配設有薄膜 運送90a，9〇b及基板運送輥92。橡膠輥80a，80b與基板運送 輥92之間隔，係以設定爲一片玻璃基板24之長度以下爲 較佳。在基板運送輥92之下游附近配設，用以基板前端感 測器94感測運送來之玻璃基板24的前端部（下游側端部）。 另外，在接近於基板前端感測器94之下游側，如第4 圖所示，分別配設例如、由區域感測器所構成之3台CCD 照相機96a〜96c(檢測部），以分別檢測玻璃基板24之運送 200831291 方向兩端部及殘留在貼附於玻璃基板24之感光性樹脂層 28上的保護膜30的兩端部。該等之C CD照相機96a〜96 c， 係相隔既定之間隔配置於感光性薄膜22a，22b的寬度方 向。在各CCD照相機96a〜96c對向地配設照明光源98a〜 98c，用以使由不會對感光性樹脂層28感光之波長所構成 的光介由感光性薄膜22a，22b而照射於CCD照相機96a〜 9 6 c ° 在基板運送輥92之下游設有冷卻機構123及基底自動 剝離機構142。基底自動剝離機構142係用以將貼附於各相 隔既定間隔之各玻璃基板24上的長尺寸狀之基底薄膜26 連續地加以剝離者，其具備預剝離部1 44、較小徑之剝離輥 146、捲軸148及自動貼附機150。捲軸148係於驅動時作 轉矩控制而將張力賦予基底薄膜26，另一方面，以例如、 藉由在剝離輥146設置張力檢測器（未圖示），而進行張力之 反饋控制爲較佳。預剝離部1 44係具備可在玻璃基板24之 間作昇降的剝離桿156。 在基底自動剝離機構1 42之下游配設測定實際貼附於 玻璃基板24上的感光性樹脂層28之區域位置的測定器 1 5 8。此測定器1 5 8係具備例如、拍攝貼附有感光性樹脂層 28之玻璃基板24用之CCD等的照相機160。 另外，在基底自動剝離機構1 42之下游設置感光性層 積體儲料櫃132,以收容藉由測定器158而於感光性樹脂層 28測定出區域位置之複數個感光性層積體1 06。由基底自 動剝離機構142剝去基底薄膜26及殘留部分30b後之感光 200831291 性層積體106，係由機器人134之手部134a上所設的吸附 墊136所吸住後被取出，並收容於感光性層積體儲料櫃133 內。 又，在如上述構成之製造裝置20中，第1及第2薄膜 輸送機構32a，32b、第1及第2加工機構36a，3 6b、第1及 第2標籤黏著機構40a，40b、第1及第2轉換機構42a，42b、 第1及第2剝離機構44a，44b、第1及第2張力控制機構 66a，66b、和第1及第2檢測機構47 a，47b，係配置於貼附機 構46之上方，但亦可與此相反，將從該第1及第2薄膜輸 送機構32a，32b至第1及第2檢測機構47&，4713的各構件配 置於該貼附機構46之下方，並使感光性薄膜22a，22b之上 下翻轉而將感光性樹脂層28貼附於玻璃基板24之下側’ 並且，亦可將該製造裝置20整體構成爲直線狀。 如第1圖所示，製造裝置20係藉由層壓步驟控制部1 〇〇 而進行整體之控制，在此製造裝置20之各功能部’例如設 置層壓控制部1 02、基板加熱控制部1 04及半切斷控制部 1 0 8等，該等構件係藉由步驟內之網路而相互連接。又’層 壓步驟控制部1 00係與工廠網路相連接，進行來自未圖示 之工廠CPU的指示資訊（條件設定、生產資訊）的生產管 理、工作管理等生產用的資訊處理。 基板加熱控制部1 04係從上游步驟接受玻璃基板24 ’ 並控制將此玻璃基板24加熱至所需溫度後供給於貼附機 構46之動作，及該玻璃基板24之資訊的手動操作等。 層壓控制部1 02係作爲步驟整體之主項而進行各功能 200831291 部之控制，其構成一控制機構而可根據藉由第1及第2檢 測機構47a，47b所檢測到之感光性薄膜22a，22b之半切斷部 位34的位置資訊，來控制貼附位置之各交界位置與玻璃基 板24的相對位置及各交界位置彼此的相對位置。 半切斷控制部108係用以控制第1及第2加工機構 36a，36b，而在感光性薄膜22a，22b之既定位置形成半切斷 部位3 4。 第5圖爲顯示檢測藉由層壓控制部1 02及半切斷控制 部108而將感光性樹脂層28貼附於玻璃基板24上之貼附 狀態，以進行位置調整之功能的方塊圖。 層壓控制部102及半切斷控制部108係具備輥控制部 1 23，用以控制根據輥輸送脈衝來旋轉驅動橡膠輥80a的輥 驅動馬達120。輥控制部123係根據基板前端感測器94之 玻璃基板24的前端部之檢測信號、及雷射位移計或CCD 照相機72a，72b之半切斷部位34之檢測信號來控制橡膠輥 8 0 a之旋轉。 另外，層壓控制部1 02及半切斷控制部1 〇 8具有：貼 附位置運算部1 2 4，係根據由C C D照相機9 6 a〜9 6 c所檢測 到之玻璃基板24及保護膜30的兩端部，來計算保護膜30 對玻璃基板24之貼附位置；及貼附狀態判定部1 26，係根 據該貼附位置來判定貼附狀態。 貼附狀態判定部1 26係根據貼附狀態之判定結果，將 修正資料供給於輥輸送脈衝修正部丨28或半切斷位置修正 部1 3 0。輥輸送脈衝修正部1 2 8係根據修正資料來調整供給 200831291 於輥控制部1 23之輥輸送脈衝。另外，半切斷位置修正部 130係根據修正資料來調整加工機構控制部133之第1及第 2加工機構36a，36b的加工時點。 製造裝置20內係由隔板11〇區隔成第1無塵室ii2a 及第2無塵室112b。在第1無塵室112a收容有從第1及第 2薄膜輸送機構32a，32b至第1及第2張力控制機構66a，66b 的所有構件，並在第2無塵室1 1 2b收容有第1及第2檢測 機構47a，47b以後之構件。第1無塵室112a及第2無塵室 1 1 2b係經由貫穿部1 1 4而連通。 以下，針對上述構成之製造裝置20的動作及與本發明 之製造方法相關的部分進行說明。 首先，從裝設於第1及第2薄膜輸送機構3 2a，3 2b之各 感光性薄膜輥23a，23b送出感光性薄膜22a，22b。感光性薄 膜22a，2 2b係被運送至第1及第2加工機構36a，36b。 在第1及第2加工機構36a，3 6b中，圓盤刃52係移動 於感光性薄膜22a，22b之寬度方向，並從保護膜30切入該 感光性薄膜22a，22b，經過感光性樹脂層28至基底薄膜26， 以形成半切斷部位34(參照第2圖）。又，感光性薄膜22a，22b 係在對應於保護膜30之殘留部分30b的寬度L(第2圖）而朝 箭頭A方向運送後被停止，並在圓盤刃52之行走作用之下 形成半切斷部位34。藉此，在感光性薄膜22a，22b設有合夾 殘留部分30b之前方剝離部分30aa及後方剝離部分30ab。 又，殘留部分30b的寬度L，係以感光性薄膜22a，22b 不伸長爲前提，並以供給於貼附機構4 6之橡膠輥8 0 a，8 0 b 200831291 間之玻璃基板24間的距離爲基準所設定者。 然後，各感光性薄膜22a，22b係被運送至第1及第2 標籤黏著機構40a，40b，並將保護膜30之既定貼附部位配 置於承載台56上。在第1及第2標籤黏著機構40a，40b中， 藉由吸附墊54b〜54g吸附保持有既定片數之黏著標籤 38，各黏著標籤38係跨過保護膜30之殘留部分30b，而一 體地黏著於前方剝離部分30aa及後方剝離部分30ab上（參 照第3圖）。 # 例如，如第1圖所示，黏著有7片黏著標籤3 8之感光 性薄膜22 a，22b，係在藉由第1及第2轉換機構42a, 42b來 防止輸送側之張力變動後，被連續地運送至第1及第2剝 離機構44a，44b。在第1及第2剝離機構44a，44b中，感光 性薄膜Y 2 2a，22b之基底薄膜26係被吸入筒62所吸附保持， 同時將保護膜30留下殘留部分30b而從該感光性薄膜 22a，22b剝離。此保護膜30係透過剝離輥63而被剝離，並 捲繞於保護膜捲取部64上。 ® 在第1及第2剝離機構44a，44b之作用下，在將保護膜 30留下殘留部分30b而從基底薄膜26剝離之後，感光性薄 膜22a，22b係藉由第1及第2張力控制機構66 a，66b進行張 力調整，又，利用第1及第2檢測機構47a，47b之雷射位移 計或CCD照相機72a，72b進行半切斷部位34之檢測。 在此情況時，以感光性薄膜22a，22b不伸長爲前提，以 在雷射位移計或CCD照相機72a，72b檢測到後方剝離部分 30ab側的半切斷部位34(第2圖）時，配置有先行於橡膠輥 200831291 80a，80b間之既定位置的前方剝離部分30aa側之半切斷部 * 位34的方式，來設定第1及第2檢測機構47a，47b與貼附 機構46之間的運送路徑的長度。 在此，在雷射位移計或CCD照相機72a，72b檢測到後 方剝離部分30ab側的半切斷部位34之後，將感光性薄膜 22a，22b僅運送對應於保護膜30之殘留部分30b的寬度的 距離L後停止運送，並在基板運送機構45之作用下，在預 加熱之狀態下將玻璃基板24運送至貼附位置。玻璃基板24 # 係對應於並排之感光性薄膜22a，22b的感光性樹脂層28的 貼附部分，而暫時配置於橡膠輥80a，80b之間。 接著，藉由使支撐輥82b及橡膠輥80b上昇，以既定 之壓力將玻璃基板24夾入橡膠輥80a，80b之間。輥控制部 1 23 (第5圖）係根據輥輸送脈衝來驅動輥驅動馬達120，在 橡膠輥80a之旋轉作用下，朝箭頭C方向運送感光性薄膜 22a，22b及玻璃基板24。其結果，並排之各感光性樹脂層 28被轉寫（層壓）於此玻璃基板24上。在此情況時，若設定 ® 感光性薄膜 22a，22b爲不伸長者時，可將感光性薄膜 22a，22b之感光性樹脂層28，從後方剝離部分30ab側的半 切斷部位34被正確地轉寫於玻璃基板24之既定部位。 作爲層壓條件：速度爲l.Om/min〜10.0m/min，橡膠輥 80a，80b之溫度爲80°C〜140°C，橡膠輥80a，80b之橡膠硬 度爲40度〜90度，橡膠輥80a，8Ob之加壓（線壓）爲5 ON/cm 〜400N/cm 〇 基板前端感測器94係檢測玻璃基板24之前端，當結 -20 - 200831291 束透過橡膠輥80a，80b而將一片之感光性薄膜22a，22b層壓 於玻璃基板24上時，該橡膠輥80a之旋轉停止’另一方面’ 疊層有該感光性薄膜22a，22b之該玻璃基板24(以下稱爲貼 附基板24a)，係藉由基板運送輥92所夾持。此時’如後述’ 先行之玻璃基板24的後端部及感光性樹脂層28之後端部 的位置，係使用CCD照相機96a〜96c所檢測。 然後，橡膠輥80b朝離開橡膠輥80a之方向退避而解 除夾持，同時開始基板運送輥92之旋轉，並朝箭頭C方向 • 將貼附基板24a運送僅爲對應於保護膜30之殘留部分30b 的寬度的距離L，使保護膜30之後方的半切斷部位34移 動至橡膠輥8 0 a下方附近的既定位置。此時，如後述，完 成層壓處理之玻璃基板24的前端部及感光性樹脂層2 8之 前端部的位置，係使用CCD照相機96a〜96c而被檢測。 另一方面，經由基板運送機構45而成爲下一片之玻璃 基板24，則被朝向貼附位置運送。藉由重復進行以上之動 作，以連續地製造貼附基板24a。 ® 此時，如第4圖所示，貼附基板24a各個端部彼此係 由殘留部分30b所覆蓋。因此，在感光性樹脂層28被轉寫 於玻璃基板24上時，橡膠輥8〇a，80b不會被該感光性樹脂 層28所弄髒。 由貼附機構46所疊層後之貼附基板24a，在通過冷卻 機構1 22而被冷卻之後，移送至預剝離部1 44。在此預剝離 部144，剝離桿156上昇而暫時進入玻璃基板24之間，藉 此，將玻璃基板24之間的保護膜30頂起，從鄰接之玻璃 -21 - 200831291 基板2 4的後端及目U端加以剝離。 接著，在基底自動剝離機構1 4 2，在捲軸1 4 8之旋轉作 用下，連續地從貼附基板2 4 a捲繞基底薄膜2 6。又，故障 停止時的切斷、分離不良品時之切斷以後、開始新的層壓 處理後之貼附基板24a的基底薄膜26之前端、及捲繞於捲 軸148上之基底薄膜26的後端，係透過自動貼附機構150 而自動進行貼附。 剝離基底薄膜26後之貼附基板24a，係配置於對應於 # 測定器1 5 8之檢查站。在此檢查站，在玻璃基板24被定位 固定之狀態下，藉由4台之照相機1 60取入玻璃基板24與 感光性樹脂層28的影像。然後，藉由施以影像處理，以運 算貼附位置。 確認完感光性樹脂層28之貼附位置的貼附基板24a， 係藉由機器人1 3 4所取出，並作爲感光性層積體丨06而收 容於感光性層積體儲料櫃132內。 在以上之說明中，係以從第1及第2薄膜輸送機構 ® 32a，32b送出之感光性薄膜22a，22b不伸長地供給於貼附機 構46爲前提，但實際上具有可撓性之感光性薄膜22a，22b 受到張力或熱之影響會伸長一既定量，所以，仍有無法高 精度地將感光性樹脂層28轉寫於玻璃基板24之既定位置 的缺憾。 在此，參照第5至第7圖，說明感光性樹脂層28對玻 璃基板24之貼附位置的修正方法。 首先，完成一片份之層壓處理，當由基板前端感測器 -22- 200831291 94來檢測玻璃基板24之前端部時（步驟SI)，輥控制部123 係控制輥驅動馬達1 2 0，以使橡膠輥8 0 a之旋轉停止。藉 此，停止感光性薄膜22a，22b的運送（步驟S2)。 接著，將來自照明光源9 8 a〜9 8 c之照明光照射於玻璃 基板24及感光性樹脂層28的後端部，並由CCD照相機96a 〜9 6 c接受透過該些部分之照明光，以檢測顯示該後端部之 貼附狀態的影像資訊（步驟S3)。藉由CCD照相機96a〜96c 所檢測到之該影像資訊，係供給於貼附位置運算部1 24，並 • 藉由施以既定之影像處理來計算後端部之貼附位置（步驟 S4卜 在此情況時，如第7 (A)圖所示，貼附位置運算部1 24 係根據由CCD照相機96a〜96c所取得之影像資訊，來計算 玻璃基板24之後端部與貼附於此玻璃基板24上之感光性 薄膜 22a，22b的感光性樹脂層 28之後端部之間的距離 EB1，EB2及EA1,EA2。另外，貼附位置運算部124係計算玻 璃基板24之側部與感光性薄膜22 a，22b之間及感光性薄膜 • 22a，22b 之間的距離 EB3，EA3，EA4。 接著，在進行將感光性薄膜22a，22b僅運送與保護膜 3 0之殘留部分3 Ob的寬度對應之距離L的基板間運送而停 止運送之後（步驟S5)，再次使用CCD照相機96&〜96〇’以 檢測顯示玻璃基板24及感光性樹脂層28之前端部之貼附 狀態的影像資訊（步驟S 6)，於貼附位置運算部1 24計算前 端部之貼附位置（步驟S 7)。 在此情況時，如第7(B)圖所示’貼附位置運算部124 -23 - 200831291 係計算玻璃基板24之前端部與貼附於此玻璃基板24上之 感光性薄膜22a，22b的感光性樹脂層28之前端部之間的距 離FB1，FB2及FA1，FA2。另外，貼附位置運算部124係計 算玻璃基板24之側部與感光性薄膜22a，22b之間及感光性 薄膜22a，22b之間的距離FB3，FA3，FA4。 貼附狀態判定部1 26係根據藉由貼附位置運算部1 24 所計算出之各貼附位置，來判定感光性樹脂層2 8對玻璃基 板24之貼附狀態（步驟S 8)。 Φ 例如，若計算出之各距離EB1，EB2，EA1，EA2，FB1，FB2 及FA1，FA2皆在允許範圍時，則判定爲無位置偏移（步驟 S9)，不進行位置偏移之修正而繼續貼附處理。 另外，在各距離 EB1，EB2，EA1，EA2，FB1，FB2，FA1，FA2 之任一方超過允許範圍，但利用調整玻璃基板24與感光性 薄膜22a，22b之相對位置關係而可作在允許範圍內的情 況，貼附狀態判定部1 26判定爲玻璃基板24與感光性薄膜 22a，22b之間的位置偏移（步驟S10)，將修正進行基板間輸 ® 送之輥輸送脈衝的修正資料供給於輥輸送脈衝修正部 128。輥輸送脈衝修正部128係根據修正資料來修正輥輸送 脈衝，並供給於輥控制部1 23。輥控制部1 23係將對應於感 光性薄膜22a，22b之殘留部分30b之寬度L的距離僅修正根 據該修正資料的量後，運送感光性薄膜22a，22b (步驟S11)。 其結果，可將玻璃基板24之兩端部與感光性樹脂層28之 兩端部之間的位置偏移作在允許範圍內。 另外，在各距離 EB1，EB2，EA1，EA2，FB1，FB2，FA1，FA2 -24- 200831291 之任一方超過允許範圍，且即使調整玻璃基板24與感 薄膜22a，22b之相對位置關係，仍無法將位置偏移修正 許範圍內的情況，假定感光性薄膜22a，22b伸長允許範 上，或是，感光性薄膜22a，22b間之特性的差異大。在 況時，貼附狀態判定部1 26將修正半切斷部位34之位 修正資料供給於半切斷位置修正部1 3 0。半切斷位置修 1 3 0係將根據修正資料所修正之加工位置資料供給於 機構控制部1 3 3，加工機構控制部1 3 3係在根據修正後 工位置資料的位置形成半切斷部位34(步驟S 12)。 又，在貼附基板24a之側部與感光性薄膜22a，22b 部的距離EB3，EA4、及感光性薄膜22a，22b之間的距離 超過允許範圍之情況，例如，藉由將供給各感光性 22a，22b之運送系統或感光性薄膜22a，22b，根據該些 的修正資料而在與運送方向正交之方向上移動，便可 調整。 如上述，藉由調整感光性樹脂層28對玻璃基板 貼附位置，可製造高品質之貼附基板24a。 又，在第1實施形態中，雖使用2根之感光性表 2 3 a，2 3 b，但並不限於此種構成，亦可採用一根之感3 膜輥或3根以上之感光性薄膜輥。另外’在以下說曰J 2實施形態中亦相同。 第8圖爲本發明第2實施形態之製造裝置300 & 構成圖。又，對與第1實施形態之製造裝置20相同二 要素，則賦予相同之元件符號，並省略其詳細說明。 光性 在允 圍以 此情 置的 正部 加工 之加 之側 .EA3 薄膜 距離 進行 24之 :膜輥 :性薄 I之第 丨槪略 :構成 -25- 200831291 製造裝置300係具有配置於貼附機構46之下游，可將 各玻璃基板24之間的感光性薄膜22a，22b —體地切斷之基 板間切斷機構48。 在此種構成之製造裝置300中，與上述第1實施形態 相同，利用貼附機構4 6所疊層之貼附基板2 4 a，係被朝箭 頭C方向運送。當貼附基板24a間到達對應於基板間切斷 機構48之位置時，此基板間切斷機構48 —面以與該貼附 基板24a相同之運送速度朝箭頭C方向移動，一面在該貼 Φ 附基板24a之間將· 2根感光性薄膜22a，22b —體地切斷。 在切斷之後，基板間切斷機構48返回既定之待機位 置，另一方面，在貼附基板24a上依序剝離（一片片地剝離） 基底薄膜26及殘留部分30b，以製造感光性層積體106。 【圖式簡單說明】 第1圖爲本發明之第1實施形態的製造裝置之槪略構 成圖。 第2圖爲使用於該製造裝置之長尺寸狀之感光性薄膜 ® 的剖視圖。 第3圖爲該長尺寸狀之感光性薄膜上黏接有黏著標籤 之狀態的說明圖。 第4圖爲貼附機構及配置於其下游側以檢測貼附狀態 之檢測部的說明圖。 第5圖爲檢測貼附狀態以進行位置調整之功能的方塊 圖。 第6圖爲檢測貼附狀態以進行修正處理之流程圖。 -26- 200831291200831291 IX. Description of the Invention: [Technical Field] The present invention relates to conveying a substrate and a long-length photosensitive film provided with a photosensitive material layer on a support between a pair of pressing rolls, and the photosensitive material A device and a manufacturing method for producing a photosensitive laminate of a photosensitive laminate by attaching a layer to the substrate. [Prior Art] For example, in a substrate for a liquid crystal panel, a substrate for a printed wiring, and a substrate for a PDP panel, a photosensitive sheet (photosensitive film) having a photosensitive resin layer (photosensitive material layer) is attached to the substrate. The surface is composed. The photosensitive sheet system is formed by sequentially laminating a photosensitive material layer and a protective film on a flexible plastic support. In a manufacturing apparatus for attaching such a photosensitive sheet, a substrate such as a glass substrate or a resin substrate is transported at a predetermined interval, and corresponds to a photosensitive resin layer attached to the substrate. The method of peeling off the protective film from the photosensitive sheet. In the manufacturing apparatus disclosed in Japanese Laid-Open Patent Publication No. Hei No. 1-34280, as shown in Fig. 9, the laminated film (photosensitive sheet) la fed from the film roll 1 is wound around the guide. The rolls 2a, 2b extend over the horizontal film transport surface. A rotary encoder 3 is mounted on the guide roller 2b to output a pulse signal in response to the amount of conveyance of the laminated film la. The laminate film 1 a extending along the horizontal film transport surface is wound around the suction roll 4, and a half cutter 5 and a film peeling device 6 are disposed between the guide roll 2b and the suction roll 4. . 200831291 The half cutter 5 is provided with a disc-shaped cutting edge 5a in which the transport direction of the laminate film la is separated by a predetermined interval, and the b b-shaped cutting edge 5a, 5b is formed by the laminated film la The film is moved in the width direction of the film, and the boundary portion between the peeled portion and the remaining portion of the film (not shown) of the laminate film la is integrally cut with the photosensitive resin layer (not shown) on the back side thereof. The film peeling device 6 is wound by the winding roller 9 after the adhesive tape 7a fed from the adhesive tape roll 7 is strongly pressed against the peeling portion of the film between the pressure rollers 8a and 8b. Thereby, the peeled portion of the film is peeled off from the photosensitive resin layer and wound around the take-up roll 9 together with the adhesive tape 7a. A pair of laminating rolls 12a, 12b are disposed downstream of the suction roll 4, and the laminating rolls 12a, 12b are formed by laminating the peeled portions of the laminated film la after peeling off the film by the substrate. The transport device 1 is disposed on the upper surface of the plurality of substrates 1 1 at predetermined intervals. On the downstream side of the laminating rolls 12a, 12b, a support film take-up roll 13 is disposed. The light-transmitting support film (not shown) attached to the substrate 1 is wound around the support film take-up roll together with the remaining portion of the film while leaving the photosensitive resin layer on the substrate 11. 1 3 on. In order to accurately attach the peeled portion of the laminated film 1 a after peeling off the film to the desired range of the substrate 1 1 , it is necessary to laminate the laminated film based on the boundary portion between the peeled portion of the film and the remaining portion. 1 a is conveyed to the lamination rolls 12a, 12b with high precision. However, since the laminated thin film 1 a is formed by forming a photosensitive resin layer on the flexible supporting film and being conveyed in a state where tension is applied, there is a fear that the elongation occurs due to the influence of elongation during transportation. The position of the junction is biased towards 200831291. Further, the laminating rolls 12a and 12b are attached in a state where the laminate film la and the substrate 11 are heated, so that the laminate film la in the vicinity of the laminating rolls 12a, 12b is elongated. Big. In this case, if the position of the boundary portion of the laminated film 1 a can be detected between the laminating rolls 1 2a and 1 2b, the position can be adjusted to perform high-precision attachment treatment. . However, in the case where the position of the boundary portion is detected while the laminated film 1a and the substrate 11 are sandwiched by the laminating rolls 12a, 12b, since the laminating rolls 1 2a, 1 2b hinder the detection, it is practically Not feasible. . Therefore, when the photosensitive laminate which has been produced is taken out for inspection and the accuracy of the attachment position is lowered, it is necessary to adjust the amount of conveyance of the laminated film la, and the like, and the manufacturing efficiency is lowered. An unfavorable fingering that causes a decrease in yield due to the production of a photosensitive laminate outside the allowable range. SUMMARY OF THE INVENTION An object of the present invention is to provide an easy and highly accurate detection of a state in which a photosensitive material layer is attached to a substrate, and to adjust a bonding position of the photosensitive material layer, thereby efficiently producing a high-quality photosensitive property. A manufacturing apparatus and a manufacturing method of a photosensitive laminate of a laminate. In the apparatus for producing a photosensitive laminate of the present invention, a long-length photosensitive film formed by sequentially laminating a photosensitive material layer and a protective film on a support is fed, and a peeling portion is formed on the protective film. The processed portion of the boundary portion of the residual portion is peeled off from the peeled portion of the protective film, and continuously fed to the bonded roller at a predetermined interval, to be added between the pair of press rolls of 200831291 heat, and The remaining portion of the protective film is disposed between the substrates, and the exposed photosensitive layer is attached to the substrate to produce a photosensitive layered body. The detecting unit is provided with the detecting portion. a downstream side of the pressure roller for detecting an end portion of the substrate and the processed portion of the long-length photosensitive film attached to the substrate; and a distance calculating portion for calculating the end portion and the processing The distance between the parts. Further, in the method for producing a photosensitive laminate of the present invention, a long-length photosensitive film formed by sequentially laminating a photosensitive material layer and a protective film on a support is fed, and a corresponding film is formed on the protective film. The peeled portion of the protective film is peeled off at a processing portion at a boundary position between the peeling portion and the residual portion, and is continuously fed to the heated pair of pressing rolls together with the substrate supplied at a predetermined interval. The remaining portion of the protective film is disposed between the substrates, and the exposed photosensitive layer is attached to the substrate to produce a photosensitive laminate. The method is as follows: The step of detecting the end portion of the substrate and the processed portion of the long-length photosensitive film attached to the substrate; and calculating the distance between the end portion and the processed portion. In the present invention, by detecting the end portion of the substrate and the processed portion of the long-length photosensitive film attached to the substrate, the attached state of the photosensitive material layer to the substrate can be easily and accurately detected. Further, by adjusting the attachment position of the photosensitive material layer to the substrate in accordance with the detected attachment state, it is possible to efficiently produce a high-quality photosensitive laminate in 200831291. The above objects, features and advantages will become more apparent from the following description of the preferred embodiments and the appended claims. [Embodiment] FIG. 1 is a schematic configuration diagram of a manufacturing apparatus 20 for a photosensitive laminate according to a first embodiment of the present invention. The manufacturing apparatus 20 is a manufacturing step of a liquid crystal or a color filter for an organic EL. The photosensitive resin layers 28 (to be described later) of the long-length photosensitive films 22a and 22b are thermally transferred to the glass substrate 24 side by side. The photosensitive film 2 2 a, 2 2 b is set to have a predetermined width dimension. For example, the photosensitive film 22a is configured to be wider than the width of the photosensitive film 22b. Fig. 2 is a cross-sectional view of the photosensitive films 22a, 22b used in the manufacturing apparatus 20. The photosensitive films 22a and 22b are formed by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30. As shown in Fig. 1, the manufacturing apparatus 20 includes the first and second film transporting mechanisms 32a and 32b, and accommodates two (two or more) wound photosensitive sheets 22a and 22b in a roll shape. The photosensitive film rolls 23a, 23b are capable of synchronously transporting the photosensitive films 22a, 22b from the respective photosensitive film rolls 23a, 23b; the first and second processing means 36a, 36b' are attached to the respective photosensitive sheets The semi-cut portion 34 is formed on the protective film 30 of the flexible films 22a and 22b. The semi-cut portion 34 is a boundary position which can be cut in the width direction; and the first and second label adhesive mechanisms 40a and 40b are partially provided. The adhesive label 38 (see FIG. 3) of the non-adhesive portion 38a is adhered to each of the protective films 30. 200831291 The first and second conversion mechanisms 42a and 42b for changing the photosensitive films 22a and 22b from the tactile transport to the continuous transport are disposed downstream of the second and second label adhesive mechanisms 40a and 40b. The first and second peeling mechanisms 44a and 44b that peel the protective film 30 from the respective photosensitive films 22a and 22b at a predetermined length, and are transported to the substrate at the bonding position while heating the glass substrate 24 to a predetermined temperature. The transport mechanism 45 and the attaching mechanism 46 which is formed by peeling off the protective film 30 and exposing the photosensitive resin layer 28 to the glass substrate 24 are arranged side by side. # In the vicinity of the upstream of the attachment position of the attachment mechanism 46, the first and second detection mechanisms 47a and 47b for directly detecting the respective half-cut portions 34 belonging to the boundary positions of the photosensitive films 22a and 22b are disposed. In the vicinity of the downstream of the first and second film transporting mechanisms 32a, 32b, each of the rear ends of the photosensitive films 22a, 22b and the front ends of the newly used photosensitive films 22a, 22b are attached. Attachment table 49. A film end position detector 51 is disposed downstream of the attaching stage 49 for controlling the deviation in the width direction caused by the winding deviation of the photosensitive film rolls 23a, 23b. In the case where the first and second film transporting mechanisms 32a and 32b are moved in the width direction to adjust the film end position, the position adjusting mechanism in which the rollers are combined may be used. Further, the first and second film transporting mechanisms 32a and 32b may be configured such that the photosensitive film rolls 23a and 23b are transported to transport the photosensitive films 22a and 22b to a multi-axis such as two or three axes. . The first and second processing mechanisms 36a and 36b are disposed in a roller pair 50 for calculating the roll diameter of each of the photosensitive film rolls 23a and 2bb that are wound around the first and second film transporting mechanisms 32a and 32b. Downstream. Each of the first and second processing mechanisms 36a, 3 6b, 200831291 includes a single disk blade 52 that travels in the width direction of the photosensitive films 22a and 22b and sandwiches the protective film 30. The half-cut portion 34 is formed at a predetermined position of the remaining portion 3 Ob (Fig. 2). As shown in Fig. 2, the half-cut portion 34 is required to cut at least the protective film 30, in order to actually cut the portion. The protective film 30' is set to have a depth of cut of the disk edge 52 so as to reach the photosensitive resin layer 28 or the base film 26. The disk blade 52 can be moved in the width direction of the photosensitive films 22a and 22b without being rotated and fixed to form the half-cut portion 34, or can be slid on the photosensitive films 22a and 22b. The one side of the rotation is moved in the width direction to form the half-cut portion 34. The half-cut portion 3 4 may be replaced by the disk edge 52, and may be formed by a cutting blade or a shearing blade (Thomson blade), in addition to a cutting method using, for example, laser light or ultrasonic waves. Further, the first and second processing mechanisms 36a and 36b may be provided with two sets of distances L corresponding to the width of the remaining portion 3 Ob in the transport direction (arrow A direction) of the photosensitive films 22a and 22b, respectively. The two half cut portions 34 are simultaneously formed via the residual portion 30b (Fig. 2) of the protective film 30. The half-cut portion 34 is set, for example, at a position of 10 mm each of the glass substrates 24 entering the both sides. The portion which is sandwiched by the half-cut portion 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in the attaching mechanism 46 to be described later. The first and second label adhesive mechanisms 40a and 40b are provided to leave the remaining portion 30b of the protective film 30 in correspondence with the glass substrate 24, and supply the peeling portion 30aa in front of the peeling side and the peeling portion 30ab in the rear side of the peeling side. 11- 200831291 Adhesive label 3 8. As shown in Fig. 2, the protective film 30 is a portion in which the remaining portion 3 Ob is folded, and the portion which is peeled off first is referred to as the front peeling portion 3 〇 a a , and the portion which is peeled off later is referred to as the rear peeling portion 30ab. As shown in Fig. 3, the adhesive label 38 is formed in a rectangular shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 is attached to the non-adhesive portion (including the micro-adhesive portion) 38 8 of the uncoated adhesive at the central portion, and the two ends of the non-adhesive portion 38 a, that is, the longitudinal ends of the adhesive label 38 The portion 'has a first adhesive portion 38b adhered to the front peeling portion 30aa and a second adhesive portion 38c that is adhered to the rear peeling portion 30ab. As shown in Fig. 1, the first and second label adhesive mechanisms 40a and 40b are provided with adsorption pads 5 4 a to 5 4 g each of which is spaced apart from each other by a predetermined interval, and can be attached to at most seven adhesive labels 38. The loading table 56 for holding the photosensitive films 22a, 22b from below is disposed at a position of the adhesive label 38 of the adsorption pad 5 4 a to 5 4 g, and the carrier 56 is configured to be freely movable . The first and second conversion mechanisms 42a and 42b are provided with a oscillating roller 60 that can be freely oscillated in the direction of the arrow, for absorbing the tangential transport of the upstream photosensitive films 22a and 22b and the photosensitive film 22a, 22b on the downstream side. The speed of continuous delivery is poor. The second conversion mechanism 42b is provided with a dancer roller 61 for each transport path length from the photosensitive films 22a and 22b sent from the first and second thin film transport mechanisms 32a and 32b to the attaching mechanism 46. Adjust to the same. The first and second peeling mechanisms 44a, 44b disposed downstream of the first and second conversion mechanisms 42a, 42b are provided with suction cylinders 62' for blocking the tension on the transport side of the photosensitive films 22a, 22b, respectively. Change so that the tension during lamination is stable at 200831291. The peeling roller 63 is disposed in the vicinity of each of the suction cylinders 62, and the film 30 is peeled off from the photosensitive films 22a and 22b at an acute angle by the peeling angle of the photosensitive film 22a, 22b, and is wound around the protective portion except for the residual portion 3〇b. 64 on. On the downstream side of the first and second peeling mechanisms 44a, 44b, first and second tension controls 66a, 66b for tensioning the photosensitive films 22a, 22b are disposed. The first and second tension control mechanisms 66a and 66b are cylinders 68, respectively. Under the driving action of the cylinders 68, the tensioning device 70 is oscillated and displaced, and the photosensitive film of each tension elastic adjuster 70 can be adjusted. 22 a, 22b tension. Further, the first and second tension structures 66a and 66b may be used as needed or may be removed. The first and second detecting means 47a, 47b are provided with, for example, laser and CCD cameras 72a, 72b for detecting the half-cut portion 34 formed on the photosensitive film. The substrate transport mechanism 45 includes a multi-array substrate heating unit (for example, a heater) 74 that sandwiches the glass substrate 24, and a transport unit 76 that transports the glass substrate 24 in the ® direction. When the substrate is heated, the temperature of the glass substrate 24 is constantly monitored, and when it is abnormal, it is stopped: an alarm is generated or an abnormality is generated, and the abnormal glass substrate 24 is discharged as an NG product in a later step, and can be flexibly applied to the product or Production management, etc. A gas float J (not shown) is disposed in the transport portion 76: The glass substrate 24 is floated and transported in the direction of the arrow C. Glass-based transport can also be carried out by roller transport. The temperature measurement of the glass substrate 24 is performed by the substrate heating unit 74. The film-holding and winding mechanism can be provided with a steam-tight adjustment. The slide-control machine displacement meter 22a, 22b is in the direction of the arrow C portion 74, and the delivery portion 76 is often The management of the glass: the board is better within the position of the Hans 24 or the front of the position -13-200831291. The measurement method is non-contact type in addition to contact type (for example, thermocouple). A substrate storage cabinet 7 1 for accommodating a plurality of glass substrates 24 is provided upstream of the substrate heating portion 74. Each of the glass substrates 24 housed in the substrate storage cabinet 7 1 is sucked by the adsorption pad 79 provided on the hand 75a of the robot 75, and then taken out and inserted into the substrate heating portion 74. The attaching mechanism 46 is provided with rubber rollers (pressing rolls) 80a, 80b which are arranged up and down and heated to a predetermined temperature. The support rollers 82a, 82b are slidably attached to the rubber rollers 80a, 8B1. One of the support rollers 82b is pressed against the rubber roller 80b side by the pressurizing cylinders 84a, 84b constituting the roller clamp portion 83. A movable contact preventing roller 86 is disposed in the vicinity of the rubber roller 80a to prevent the photosensitive films 22a, 22b from coming into contact with the rubber roller 80a. A preliminary heating unit 87 for preheating the photosensitive films 22a and 22b to a predetermined temperature is disposed in the vicinity of the upstream of the attaching mechanism 46. The preliminary heating unit 87 is provided with a heating means such as an infrared rod heater. The glass substrate 24 is transported through a transport path 88 extending from the attaching mechanism 46 in the direction of the arrow C. The transport path 8 8 is provided with film transport 90a, 9〇b and a substrate transport roller 92. The distance between the rubber rolls 80a, 80b and the substrate transfer roller 92 is preferably set to be equal to or less than the length of one piece of the glass substrate 24. The front end portion (downstream end portion) of the glass substrate 24 conveyed by the substrate leading end sensor 94 is disposed in the vicinity of the downstream of the substrate carrying roller 92. Further, on the downstream side of the substrate front end sensor 94, as shown in Fig. 4, three CCD cameras 96a to 96c (detection portions) composed of, for example, area sensors are respectively disposed to detect The glass substrate 24 is transported at both ends in the direction of 200831291 and at both ends of the protective film 30 adhered to the photosensitive resin layer 28 of the glass substrate 24. The C CD cameras 96a to 96c are disposed at a predetermined interval in the width direction of the photosensitive films 22a and 22b. Illumination light sources 98a to 98c are disposed opposite to each of the CCD cameras 96a to 96c so that light composed of wavelengths that do not absorb the photosensitive resin layer 28 is irradiated to the CCD camera via the photosensitive films 22a and 22b. 96a to 9 6 c ° A cooling mechanism 123 and a base automatic peeling mechanism 142 are provided downstream of the substrate conveyance roller 92. The substrate automatic peeling mechanism 142 is for continuously peeling off the long base film 26 attached to each of the glass substrates 24 spaced apart from each other at a predetermined interval, and is provided with a pre-peeling portion 144 and a peeling roller of a smaller diameter. 146, reel 148 and automatic attaching machine 150. The reel 148 is torque-controlled during driving to impart tension to the base film 26. On the other hand, for example, by providing a tension detector (not shown) on the peeling roller 146, feedback control of the tension is preferably performed. . The pre-peeling portion 1 44 is provided with a peeling bar 156 that can be raised and lowered between the glass substrates 24. A measuring device 158 for measuring the position of the region of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the substrate automatic peeling mechanism 1 42. The measuring device 158 includes, for example, a camera 160 that captures a CCD or the like for the glass substrate 24 to which the photosensitive resin layer 28 is attached. Further, a photosensitive laminate storage cabinet 132 is disposed downstream of the substrate automatic peeling mechanism 1 42 to accommodate a plurality of photosensitive laminates 106 which are measured at the photosensitive resin layer 28 by the measuring device 158. . The photosensitive 200831291 layered body 106 after the base film 26 and the residual portion 30b are peeled off by the substrate automatic peeling mechanism 142 is sucked by the adsorption pad 136 provided on the hand 134a of the robot 134, and then taken out and housed in The photosensitive laminate storage cabinet 133 is inside. Further, in the manufacturing apparatus 20 having the above configuration, the first and second thin film transporting mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, and the first and second label adhesive mechanisms 40a and 40b and the first And the second conversion mechanisms 42a and 42b, the first and second separation mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b are attached to the attachment. The upper portion of the mechanism 46 is disposed, but the members of the first and second film transporting mechanisms 32a and 32b to the first and second detecting mechanisms 47 & 4713 are disposed below the attaching mechanism 46. The photosensitive films 22a and 22b are turned upside down and the photosensitive resin layer 28 is attached to the lower side of the glass substrate 24, and the entire manufacturing apparatus 20 may be linearly formed. As shown in Fig. 1, the manufacturing apparatus 20 is controlled as a whole by the lamination step control unit 1 . Here, the functional units of the manufacturing apparatus 20 are provided, for example, a lamination control unit 102 and a substrate heating control unit. 1 04 and a half-cut control unit 108, etc., these components are connected to each other by a network within the steps. Further, the pressure step control unit 100 is connected to the factory network, and performs information processing such as production management and work management of instruction information (condition setting, production information) from a factory CPU (not shown). The substrate heating control unit 104 receives the glass substrate 24' from the upstream step, controls the operation of supplying the glass substrate 24 to the desired temperature after heating the glass substrate 24, and the manual operation of the information of the glass substrate 24. The lamination control unit 102 performs control of each function 200831291 as a main item of the entire step, and constitutes a control unit, and can detect the photosensitive film 22a by the first and second detecting mechanisms 47a and 47b. The position information of the half cut portion 34 of the 22b is used to control the relative position of each of the joint positions of the attaching position and the glass substrate 24 and the relative positions of the respective boundary positions. The half cut control unit 108 controls the first and second processing mechanisms 36a and 36b to form a half cut portion 34 at a predetermined position of the photosensitive films 22a and 22b. Fig. 5 is a block diagram showing the function of detecting the state in which the photosensitive resin layer 28 is attached to the glass substrate 24 by the lamination control unit 102 and the half-cut control unit 108, and the position is adjusted. The lamination control unit 102 and the half-cut control unit 108 are provided with a roller control unit 213 for controlling the roller drive motor 120 that rotationally drives the rubber roller 80a in accordance with the roller transport pulse. The roller control unit 123 controls the rubber roller 80 a based on the detection signal of the front end portion of the glass substrate 24 of the substrate distal end sensor 94 and the detection signal of the laser displacement gauge or the half cut portion 34 of the CCD cameras 72a and 72b. Rotate. Further, the lamination control unit 102 and the half-cut control unit 1A 8 have a bonding position calculating unit 1 2 4 based on the glass substrate 24 and the protective film 30 detected by the CCD cameras 9 6 a to 9 6 c. The attached position of the protective film 30 to the glass substrate 24 is calculated at both ends, and the attached state determining unit 1 26 determines the attached state based on the attached position. The attaching state determining unit 1 26 supplies the corrected data to the roller transport pulse correcting unit 28 or the half-cut position correcting unit 1 130 based on the result of the determination of the attached state. The roller transport pulse correcting unit 1 2 8 adjusts the roller transport pulse supplied to the roller control unit 1 23 in accordance with the correction data. Further, the half cutting position correcting unit 130 adjusts the machining timing of the first and second machining mechanisms 36a and 36b of the machining mechanism control unit 133 based on the correction data. The inside of the manufacturing apparatus 20 is partitioned by the partition 11 into the first clean room ii2a and the second clean room 112b. In the first clean room 112a, all the members from the first and second film transport mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b are housed, and the second clean room 1 1 2b is housed in the second clean room 1 1 2b. 1 and the second detecting means 47a, 47b and subsequent members. The first clean room 112a and the second clean room 1 1 2b communicate via the penetrating portion 1 1 4 . Hereinafter, the operation of the manufacturing apparatus 20 having the above configuration and the portion related to the manufacturing method of the present invention will be described. First, the photosensitive films 22a and 22b are fed from the photosensitive film rolls 23a and 23b provided in the first and second film transporting mechanisms 3 2a and 32b. The photosensitive films 22a, 22b are transported to the first and second processing mechanisms 36a, 36b. In the first and second processing mechanisms 36a and 36b, the disk edge 52 is moved in the width direction of the photosensitive films 22a and 22b, and the photosensitive films 22a and 22b are cut from the protective film 30 to pass through the photosensitive resin layer. 28 to the base film 26 to form a half cut portion 34 (see Fig. 2). Further, the photosensitive films 22a and 22b are conveyed in the direction of the arrow A in accordance with the width L (second drawing) of the remaining portion 30b of the protective film 30, and are stopped under the action of the disk edge 52. Broken part 34. Thereby, the photosensitive film 22a, 22b is provided with the peeling part 30aa and the back peeling part 30ab in front of the clamp residual part 30b. Further, the width L of the residual portion 30b is based on the premise that the photosensitive films 22a and 22b are not elongated, and the distance between the glass substrates 24 supplied between the rubber rollers 8 0 a, 8 0 b 200831291 of the attaching mechanism 46 Set for the benchmark. Then, the photosensitive films 22a and 22b are transported to the first and second label attaching mechanisms 40a and 40b, and the predetermined attached portions of the protective film 30 are placed on the stage 56. In the first and second label adhesive mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorption pads 54b to 54g, and the adhesive labels 38 are straddle the residual portion 30b of the protective film 30, and integrally Adhered to the front peeling portion 30aa and the rear peeling portion 30ab (see Fig. 3). # For example, as shown in Fig. 1, the photosensitive films 22a, 22b to which the seven adhesive labels 38 are adhered are prevented by the first and second conversion mechanisms 42a, 42b from changing the tension on the transport side. It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, the base film 26 of the photosensitive films Y 2 2a and 22b is sucked and held by the suction tube 62, and the protective film 30 leaves the residual portion 30b from the photosensitive film. 22a, 22b peeled off. This protective film 30 is peeled off by the peeling roller 63, and is wound around the protective film take-up portion 64. ® After the first and second peeling mechanisms 44a, 44b, the photosensitive film 22a, 22b is controlled by the first and second tensions after the protective film 30 leaves the residual portion 30b and is peeled off from the base film 26. The mechanisms 66a, 66b perform tension adjustment, and the half-cut portions 34 are detected by the laser displacement meters or the CCD cameras 72a, 72b of the first and second detecting means 47a, 47b. In this case, when the photosensitive film 22a, 22b is not stretched, when the half-cut portion 34 (Fig. 2) on the side of the rear peeling portion 30ab is detected by the laser displacement meter or the CCD cameras 72a, 72b, The transport path between the first and second detecting mechanisms 47a, 47b and the attaching mechanism 46 is set so as to advance the semi-cutting portion * position 34 on the side of the front peeling portion 30aa at a predetermined position between the rubber rollers 200831291 80a and 80b. length. Here, after the laser displacement gauges or the CCD cameras 72a, 72b detect the half-cut portions 34 on the side of the rear peeling portion 30ab, the photosensitive films 22a, 22b are transported only by the distance corresponding to the width of the residual portion 30b of the protective film 30. After L is stopped, the glass substrate 24 is transported to the attaching position by the substrate transport mechanism 45 under the preheating state. The glass substrate 24# is temporarily disposed between the rubber rolls 80a and 80b in correspondence with the attached portion of the photosensitive resin layer 28 of the photosensitive films 22a and 22b which are arranged in parallel. Then, by raising the support roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a, 80b at a predetermined pressure. The roller control unit 1 23 (fifth diagram) drives the roller drive motor 120 in accordance with the roller feed pulse, and conveys the photosensitive films 22a and 22b and the glass substrate 24 in the direction of the arrow C by the rotation of the rubber roller 80a. As a result, the photosensitive resin layers 28 which are arranged side by side are transferred (laminated) on the glass substrate 24. In this case, when the photosensitive film 22a and 22b are not stretched, the photosensitive resin layer 28 of the photosensitive films 22a and 22b can be correctly rotated from the half-cut portion 34 on the side of the rear peeling portion 30ab. It is written on a predetermined portion of the glass substrate 24. As a lamination condition: the speed is l. Om/min~10. 0m/min, the temperature of the rubber rolls 80a, 80b is 80 ° C ~ 140 ° C, the rubber hardness of the rubber rolls 80a, 80b is 40 degrees ~ 90 degrees, and the pressure (line pressure) of the rubber rolls 80a, 8Ob is 5 ON /cm ~ 400 N / cm The substrate front end sensor 94 detects the front end of the glass substrate 24, and laminates a piece of photosensitive film 22a, 22b to the glass substrate 24 when the bundle -20 - 200831291 passes through the rubber rolls 80a, 80b. In the upper case, the rotation of the rubber roller 80a is stopped, and the glass substrate 24 (hereinafter referred to as the attachment substrate 24a) on which the photosensitive films 22a and 22b are laminated is sandwiched by the substrate conveyance roller 92. . At this time, the position of the rear end portion of the glass substrate 24 and the rear end portion of the photosensitive resin layer 28 as described later is detected by the CCD cameras 96a to 96c. Then, the rubber roller 80b is retracted away from the rubber roller 80a to release the nip, and the rotation of the substrate transport roller 92 is started, and the direction of the arrow C is performed. • The attached substrate 24a is transported only to the residual portion 30b corresponding to the protective film 30. The distance L of the width moves the half-cut portion 34 behind the protective film 30 to a predetermined position near the lower side of the rubber roller 80a. At this time, as will be described later, the positions of the front end portion of the glass substrate 24 and the front end portion of the photosensitive resin layer 28 which have been subjected to the lamination treatment are detected using the CCD cameras 96a to 96c. On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45. By repeating the above operations, the attached substrate 24a is continuously manufactured. ® At this time, as shown in Fig. 4, the respective end portions of the attached substrate 24a are covered by the residual portion 30b. Therefore, when the photosensitive resin layer 28 is transferred onto the glass substrate 24, the rubber rollers 8a, 80b are not soiled by the photosensitive resin layer 28. The attached substrate 24a laminated by the attaching mechanism 46 is cooled by the cooling mechanism 224, and then transferred to the pre-separation portion 1144. In the pre-separation portion 144, the peeling bar 156 is raised to temporarily enter between the glass substrates 24, whereby the protective film 30 between the glass substrates 24 is lifted up from the adjacent glass - 21 - 31,291, the rear end of the substrate 24 And the U end of the mesh is stripped. Next, the base film 26 is continuously wound from the attached substrate 24a under the rotation of the spool 14 by the substrate automatic peeling mechanism 142. Further, after the cutting at the time of the stop of the failure or the cutting of the defective product, the front end of the base film 26 of the attached substrate 24a after the start of the new lamination process, and the back of the base film 26 wound on the reel 148 The end is automatically attached by the automatic attaching mechanism 150. The attached substrate 24a after the base film 26 is peeled off is disposed in an inspection station corresponding to the #1. In the inspection station, the image of the glass substrate 24 and the photosensitive resin layer 28 is taken in by the four cameras 160 in a state where the glass substrate 24 is positioned and fixed. Then, by applying image processing, the attached position is calculated. The attached substrate 24a at the attachment position of the photosensitive resin layer 28 is taken out by the robot 134 and accommodated in the photosensitive laminate storage cabinet 132 as the photosensitive laminate 丨06. In the above description, the photosensitive films 22a and 22b fed from the first and second film transporting mechanisms® 32a and 32b are supplied to the attaching mechanism 46 without being stretched, but actually have flexibility. Since the films 22a and 22b are stretched by a certain amount by the influence of tension or heat, there is still a possibility that the photosensitive resin layer 28 cannot be transferred to a predetermined position of the glass substrate 24 with high precision. Here, a method of correcting the attachment position of the photosensitive resin layer 28 to the glass substrate 24 will be described with reference to the fifth to seventh drawings. First, a one-part lamination process is performed. When the front end of the glass substrate 24 is detected by the substrate front end sensor-22-200831291 94 (step S1), the roller control unit 123 controls the roller drive motor 1 2 0 to The rotation of the rubber roller 80 a is stopped. Thereby, the conveyance of the photosensitive films 22a and 22b is stopped (step S2). Then, the illumination light from the illumination light sources 9 8 a to 9 8 c is applied to the rear end portions of the glass substrate 24 and the photosensitive resin layer 28, and the illumination light transmitted through the portions is received by the CCD cameras 96a to 96c. The image information showing the attached state of the rear end portion is detected (step S3). The image information detected by the CCD cameras 96a to 96c is supplied to the attached position calculating unit 14 24, and the attached position of the rear end portion is calculated by applying predetermined image processing (step S4) In this case, as shown in Fig. 7(A), the attaching position calculating unit 1 24 calculates the rear end portion of the glass substrate 24 and attaches it to the glass substrate based on the image information acquired by the CCD cameras 96a to 96c. The distances EB1, EB2, EA1, and EA2 between the rear end portions of the photosensitive resin layers 28 of the photosensitive films 22a and 22b on the second surface of the film 24, the affixing position calculating unit 124 calculates the side portion of the glass substrate 24 and the photosensitive film. The distance between 22a, 22b and the photosensitive film 22a, 22b is EB3, EA3, EA4. Next, the photosensitive film 22a, 22b is transported only to the width of the residual portion 3 Ob of the protective film 30. After the transport between the substrates of the distance L is stopped and the transport is stopped (step S5), the CCD camera 96 & 〇 96 〇 ' is used again to detect the image information of the attached state of the front end portions of the glass substrate 24 and the photosensitive resin layer 28 (steps) S 6), shipped at the attached location The portion 1 24 calculates the attachment position of the distal end portion (step S7). In this case, as shown in Fig. 7(B), the attachment position calculating unit 124-23 - 200831291 calculates the front end portion of the glass substrate 24 and The distances FB1, FB2 and FA1, FA2 between the front ends of the photosensitive resin layers 28 of the photosensitive films 22a and 22b on the glass substrate 24 are attached. The attachment position calculating unit 124 calculates the glass substrate 24. The distance FB3, FA3, and FA4 between the side portion and the photosensitive films 22a and 22b and the photosensitive films 22a and 22b. The attached state determining unit 1 26 is calculated based on the attached position calculating unit 146. The attaching position of each of the photosensitive resin layers 28 to the glass substrate 24 is determined (step S8). Φ For example, if the distances EB1, EB2, EA1, EA2, FB1, FB2, and FA1 are calculated, When FA2 is within the allowable range, it is determined that there is no positional shift (step S9), and the attachment processing is continued without correcting the positional offset. In addition, at each distance EB1, EB2, EA1, EA2, FB1, FB2, FA1 , one of FA2 exceeds the allowable range, but the adjustment glass substrate 24 and the photosensitive film are utilized. When the relative positional relationship of 22a and 22b is within the allowable range, the attaching state determining unit 1 26 determines the positional shift between the glass substrate 24 and the photosensitive films 22a and 22b (step S10), and performs correction. The correction data of the roller transport pulse sent between the substrates is supplied to the roller transport pulse correcting unit 128. The roller transport pulse correcting unit 128 corrects the roller transport pulse based on the correction data and supplies it to the roller control unit 123. The roller control unit 1 23 conveys the distance between the width L of the remaining portion 30b of the photosensitive films 22a and 22b only by the amount of the correction data, and then transports the photosensitive films 22a and 22b (step S11). As a result, the positional deviation between both end portions of the glass substrate 24 and both end portions of the photosensitive resin layer 28 can be made within an allowable range. Further, any one of the distances EB1, EB2, EA1, EA2, FB1, FB2, FA1, FA2 - 24 - 200831291 exceeds the allowable range, and even if the relative positional relationship between the glass substrate 24 and the photosensitive films 22a, 22b is adjusted, In the case where the positional deviation is corrected within the range, it is assumed that the photosensitive films 22a, 22b are allowed to extend, or the difference in characteristics between the photosensitive films 22a, 22b is large. In the case of the case, the attachment state determination unit 126 supplies the correction data of the corrected half-cut portion 34 to the half-cut position correction unit 130. The half-cutting position repairing 130 is supplied to the mechanism control unit 133 by the machining position data corrected according to the correction data, and the machining mechanism control unit 133 forms the half-cutting portion 34 at the position based on the corrected working position data ( Step S12). Moreover, the distance between the side portions of the attached substrate 24a and the distances EB3 and EA4 of the photosensitive films 22a and 22b and the photosensitive films 22a and 22b exceed the allowable range, for example, by supplying each photosensitive property. The transport system or the photosensitive films 22a and 22b of 22a and 22b can be adjusted by moving in the direction orthogonal to the transport direction based on the correction data. As described above, by adjusting the position at which the photosensitive resin layer 28 is attached to the glass substrate, a high-quality attached substrate 24a can be manufactured. Further, in the first embodiment, two photosensitive sheets 2 3 a and 2 3 b are used, but the configuration is not limited thereto, and one photosensitive roller or three or more photosensitive layers may be used. Film roll. In addition, the same applies to the following description of the J 2 embodiment. Fig. 8 is a view showing the configuration of a manufacturing apparatus 300 and an apparatus according to a second embodiment of the present invention. The same components as those of the manufacturing apparatus 20 of the first embodiment are denoted by the same reference numerals, and their detailed descriptions are omitted. The luminosity is on the side of the positive processing that allows for this situation . EA3 film distance is 24: film roll: thinness I: constitutive -25 - 200831291 manufacturing apparatus 300 has a photosensitive film disposed between the glass substrates 24 and disposed downstream of the attaching mechanism 46 22a, 22b - an inter-substrate cutting mechanism 48 that is physically cut. In the manufacturing apparatus 300 of such a configuration, as in the first embodiment, the attached substrate 24a stacked by the attaching mechanism 46 is transported in the direction of the arrow C. When the position between the attached substrates 24a corresponds to the inter-substrate cutting mechanism 48, the inter-substrate cutting mechanism 48 is moved in the direction of the arrow C at the same transport speed as the attached substrate 24a, and the substrate is attached to the substrate. The two photosensitive films 22a and 22b are physically cut between 24a. After the cutting, the inter-substrate cutting mechanism 48 returns to the predetermined standby position, and on the other hand, the base film 26 and the residual portion 30b are sequentially peeled off (sliced piece by piece) on the attached substrate 24a to manufacture a photosensitive laminate. 106. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the configuration of a manufacturing apparatus according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing a long-length photosensitive film ® used in the manufacturing apparatus. Fig. 3 is an explanatory view showing a state in which an adhesive label is adhered to the long-length photosensitive film. Fig. 4 is an explanatory view of the attaching mechanism and the detecting portion disposed on the downstream side thereof to detect the attached state. Fig. 5 is a block diagram showing the function of detecting the attached state for position adjustment. Fig. 6 is a flow chart for detecting the attached state for correction processing. -26- 200831291
第7圖爲貼附於玻璃基 狀態的說明圖。 第8圖爲本發明第2實 圖。 第9圖爲習知技術之製造 【符號簡單說明】 2 0,30 0 製造 2 2 a ? 2 2 b 感光 24 玻璃 26 可撓 28 感光 30 保護 46 貼附 47a,47b 檢測 8 0 a , 8 0 b 橡膠 94 基板 9 6 a 〜9 6 c CCD 124 貼附 126 貼附 128 輥輸 130 半切 .上之2片感光性薄膜的貼附 s形態、之製造裝置的槪略構成 裝置的槪略構成圖。 裝置 性薄膜 基板 性基底薄膜 性樹脂層 膜 機構 機構 輥 前端感測器 照相機 位置運算部 狀態判定部 送脈衝修正部 斷位置修正部 -27-Fig. 7 is an explanatory view of the state attached to the glass base. Figure 8 is a second embodiment of the present invention. Figure 9 is the manufacture of the prior art [simplified symbol] 2 0,30 0 manufacturing 2 2 a ? 2 2 b photosensitive 24 glass 26 flexible 28 photosensitive 30 protection 46 attached 47a, 47b detection 8 0 a , 8 0 b Rubber 94 Substrate 9 6 a ~ 9 6 c CCD 124 Attachment 126 Attachment 128 Roller feed 130 Half cut. Attachment of two photosensitive films on the smear form, schematic structure of the device for manufacturing the device . Device Film Substrate Base Film Resin Layer Membrane Mechanism Mechanism Roller Front End Sensor Camera Position Calculation Unit Status Judgment Section Pulse Correction Section Broken Position Correction Section -27-