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KR970700931A - Solid state micromachining mass spectrometry universal gas detection sensor (SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR) - Google Patents

Solid state micromachining mass spectrometry universal gas detection sensor (SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR)

Info

Publication number
KR970700931A
KR970700931A KR1019960703946A KR19960703946A KR970700931A KR 970700931 A KR970700931 A KR 970700931A KR 1019960703946 A KR1019960703946 A KR 1019960703946A KR 19960703946 A KR19960703946 A KR 19960703946A KR 970700931 A KR970700931 A KR 970700931A
Authority
KR
South Korea
Prior art keywords
detection sensor
solid state
gas detection
universal gas
micromachining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019960703946A
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1994/013509 external-priority patent/WO1996016430A1/en
Application filed filed Critical
Publication of KR970700931A publication Critical patent/KR970700931A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1019960703946A 1994-11-22 1996-07-22 Solid state micromachining mass spectrometry universal gas detection sensor (SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR) Withdrawn KR970700931A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1994/013509 WO1996016430A1 (en) 1993-09-22 1994-11-22 Solid state micro-machined mass spectrograph universal gas detection sensor

Publications (1)

Publication Number Publication Date
KR970700931A true KR970700931A (en) 1997-02-12

Family

ID=22243314

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960703946A Withdrawn KR970700931A (en) 1994-11-22 1996-07-22 Solid state micromachining mass spectrometry universal gas detection sensor (SOLID STATE MICRO-MACHINED MASS SPECTROGRAPH UNIVERSAL GAS DETECTION SENSOR)

Country Status (5)

Country Link
EP (1) EP0745268B1 (en)
JP (1) JPH09511614A (en)
KR (1) KR970700931A (en)
AU (1) AU687960B2 (en)
DE (1) DE69414136D1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2438892A (en) * 2006-06-08 2007-12-12 Microsaic Systems Ltd Microengineered vacuum interface for an electrospray ionization system
EP1959476A1 (en) * 2007-02-19 2008-08-20 Technische Universität Hamburg-Harburg Mass spectrometer
CN107180740A (en) * 2017-04-26 2017-09-19 上海交通大学 Improve the two-dimentional angular resolution proton spectrometer of spatial resolution
CA3094495A1 (en) 2018-03-23 2019-09-26 Adaptas Solutions Pty Ltd Particle detector having improved performance and service life
US10948456B1 (en) * 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5304799A (en) * 1992-07-17 1994-04-19 Monitor Group, Inc. Cycloidal mass spectrometer and ionizer for use therein
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5401963A (en) * 1993-11-01 1995-03-28 Rosemount Analytical Inc. Micromachined mass spectrometer

Also Published As

Publication number Publication date
AU687960B2 (en) 1998-03-05
EP0745268B1 (en) 1998-10-21
DE69414136D1 (en) 1998-11-26
EP0745268A1 (en) 1996-12-04
JPH09511614A (en) 1997-11-18
AU1259195A (en) 1996-06-17

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 19960722

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid