JPS60211071A - Vacuum depositing apparatus - Google Patents

Abstract

PURPOSE:To make a wire to pass through a pipe easily without causing the buckling by removing plastic hysteresis through a leveler in case of supplying the metallic wire as vapor depositing material to an evaporation source through the pipe in a vapor depositing apparatus. CONSTITUTION:Metallic wire 12 such as Cu and Al as vapor depositing material in a vapor depositing apparatus is unwound from a bobbin 15 and supplied to an evaporation source 13 to be heated and evaporated through a guide pipe 11 by means of rotation of driving rollers 14, 14'. Since the wire 12 is received with plastic hysteresis because it has been wound on the bobbin 15, it is impossible to be fed into the pipe 11 by causing buckling at the neighborhood of an inlet 11C of the guide pipe 11 and the vapor depositing operation may be interrupted, the plastic hysteresis is removed through a leveler 16 consisting of plural rollers. The wire 12 is supplied to the evaporation source 13 by passing through the pipe 11 easily and the vapor depositing operation is stably performed.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a wire rod feeding device for continuously feeding material to be evaporated as a wire onto a heating crucible that serves as an evaporation source during dry plating, such as vapor deposition. The present invention relates to a vacuum evaporation apparatus having the following.

Conventional structure and problems There is a method for forming a thin film of aluminum or copper continuously on the surface of a polyester film or polyimide film. A vacuum evaporation apparatus is used which is equipped with a wire supply device that can continuously supply evaporation material in the form of a wire.

Hereinafter, a conventional vacuum evaporation apparatus will be described with reference to the drawings.

FIG. 1 shows a wire supply device that is a configuration of a conventional vacuum evaporation device. In FIG. 1, 1 is a hollow cylindrical wire guide pipe, 2 is a wire that is an evaporation material made of metal or a compound, 3 is an evaporation source for heating and evaporating the supplied wire 2, and 4. Reference numeral 4' denotes a pair of drive rollers for pinching and conveying the wire 2, and 5 is a bobbin around which the wire 2 is wound.

A wire rod 2 conveyed from a pair of driving rollers 4 and 4' is guided by a pipe 1 and reaches an evaporation source 3.

A vacuum evaporation device that supplies the wire 2 to the evaporation source 3 in a high vacuum, melts and evaporates the wire 2, and causes the evaporated atoms or molecules to fly to the base material to form a thin film of metal or compound on the surface of the base material. , the wire 2 is guided into the pipe 1 by driving rollers 4, 4' and is supplied to the evaporation source 3.

However, in the above configuration, when the wire rod 2 is conveyed inside the pipe 1, since the wire rod 2 is wound around the bobbin, that is, the wire rod 2 is subjected to a plastic history, recovery phenomena such as springback may occur. Then, the wire rod 1 exerts a drag force against the inner wall of the pipe 1 due to its elastic force, and a friction force is generated on the wire rod 2 from the inner wall of the pipe 1 in the opposite direction to the conveying direction, causing the wire rod 2 to sit near the inlet 1C of the vibrator 10. Give in, wire rod 2
There was a problem in that it became impossible to convey the wire rod 2 into the piper 1, and it became impossible to continuously supply the wire rod 2 onto the evaporation source 3 for a long time. In our attempt, buckling occurred within 20 minutes after feeding wire 2.

As described above, the conventional vacuum evaporation apparatus has the drawback that it is difficult to continuously supply the wire rod 2, which is the evaporation material, to the evaporation source 3 at a constant conveyance speed for a long time. 7. Purpose of the Invention In view of the above drawbacks, the present invention provides a vacuum evaporation apparatus capable of continuously supplying a wire rod as an evaporation material to an evaporation source at a nearly constant conveyance speed for a long period of time. .

Composition of the Invention The vacuum evaporation apparatus of the present invention comprises a wire of a wire-like evaporation material made of metal or a compound, a pair of drive rollers that sandwich and send out the wire, and a wire that is sent out by the drive roller under a high degree of vacuum. An evaporation source for heating and evaporating the substrate material to be processed under pressure, a guide pipe for guiding the wire sent out by the pair of drive rollers to the evaporation source, and a rotation center position. At least a pair of conveyance rollers are arranged at a constant interval in the conveyance direction of the wire rod, and are arranged relative to the conveyance direction of the wire rod so as to generate a deforming force perpendicular to the conveyance direction on the wire rod. It has the unique effect of being able to continuously supply the wire rod, which is the evaporation material, to the evaporation source at a nearly constant supply rate for a long period of time.

DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 2 shows a vacuum evaporation apparatus in a first embodiment of the present invention. In Fig. 2, 11 is a hollow cylindrical wire guide pipe, 12 is a wire made of aluminum or copper and has a wire diameter of φ1.2 and is an evaporation material, and 13 is the wire 12 to be supplied. The evaporation sources 14 and 14' are a pair of drive rollers for sandwiching and conveying the wire 12, and at least one of the drive rollers 14, 14' is connected to the wire 12. The surface has been treated to increase the contact resistance. 1
5 is a bobbin around which the wire rod 12 is wound; 16 is a leveler having a conveying roller arranged so that the center of rotation is perpendicular to the conveying direction of the wire rod 12 and a deforming force is generated;
The cross section has a V-groove shape.

The operation of the vacuum evaporation apparatus configured as described above will be explained below.

By applying an appropriate load to the drive rollers 14, 14', a contact force is generated on the surface of the wire 12, and by rotating the drive rollers 14, 14', the surface of the wire 12 and the drive roller 14. The wire 12 is supplied in the direction of the evaporation source 13 due to the frictional force generated between it and the surface of i4'. In addition, the wire rod 12 wound around the bobbin 15 undergoes a plastic history such as cold plastic working, and stress is applied perpendicularly to the conveyance direction of the wire rod 12 by the conveyance roller of the dolphin and leveler 16, causing spring banks and the like. After being wire-drawn and work-hardened so as not to cause any damage, the wire is supplied to the drive rollers 14, 14'. Therefore, when the wire rod 12 wound around the bobbin 15 is transported and supplied to the evaporation source 13, it is possible to suppress the drag between the inner wall of the pipe 11 and the wire rod 12 due to recovery phenomena such as springback. Since the frictional force between the wire 12 and the inner wall of the pipe 11 can be greatly reduced, the wire 12 will not buckle near the inlet 11C of the pipe 11, and the wire 12 can be continuously supplied onto the evaporation source 13 for a long time. I was able to do that.

In other words, even if the wire rod 12 is continuously supplied for 280 minutes after being supplied, 1
No buckling occurred near 1C.

As described above, the positions of the rotation centers are spaced apart from each other in the conveyance direction of the wire rod 12, are arranged relative to the conveyance direction of the wire rod 12, and the wire rod By providing the leveler 16 with a conveyance roller capable of applying deformation stress to the wire rod 12, the wire rod 12 can be stably transferred to the evaporation source 13 for a long time at a constant conveyance speed, regardless of the material and plastic history of the wire rod 12. can be supplied.

Effects of the Invention As described above, the vacuum evaporation apparatus of the present invention comprises a wire of a wire-like evaporation material made of metal or a compound, a pair of drive rollers that sandwich and send out the wire, and a wire that is sent out by the drive roller. An evaporation source for heating and evaporating the substrate material to be processed under high vacuum pressure, a guide pipe for guiding the wire sent out by the pair of drive rollers to the evaporation source, and a rotation center. At least a pair of wire rods are arranged at regular intervals in the wire transport direction, and are arranged relative to the wire transport direction, so that deformation stress is generated perpendicular to the wire rod transport direction. By providing a leveler with a conveying roller,
It is possible to stably supply the wire to the evaporation source continuously for a long time at a nearly constant conveyance speed, regardless of the material or plastic history of the wire that is the evaporation material, and its practical effects are great. There is.

In this embodiment, deformation stress is generated in only one direction by the conveyance roller of the leveler 16, but deformation stress may also be generated in two or even three directions. good.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a conventional vacuum evaporation apparatus, and FIG. 2 is a schematic diagram of a vacuum evaporation apparatus according to an embodiment of the present invention. 11...Pipe, 12...Wire rod, 13
... Evaporation source, 14 ... Drive roller, 1
6...Leveler. Figure 1 Figure 2

Claims (1)

[Claims] A wire of a wire-shaped vapor-deposited material made of metal or a compound, a pair of drive rollers that sandwich and feed the wire, and a wire fed by the drive rollers to a workpiece under high vacuum pressure. An evaporation source for heating and evaporating vapor deposition onto a certain base material, a guide pipe for guiding the wire sent out by the pair of drive rollers to the evaporation source, and a center of rotation located in the direction of conveyance of the wire. A leveler having at least a pair of conveying rollers arranged at a constant interval and relative to the conveying direction of the wire rod so as to generate a deforming force perpendicular to the conveying direction on the wire rod. vacuum evaporation equipment.