JPS60177410A - Production of main magnetic pole of magnetic head - Google Patents
Production of main magnetic pole of magnetic headInfo
- Publication number
- JPS60177410A JPS60177410A JP3390584A JP3390584A JPS60177410A JP S60177410 A JPS60177410 A JP S60177410A JP 3390584 A JP3390584 A JP 3390584A JP 3390584 A JP3390584 A JP 3390584A JP S60177410 A JPS60177410 A JP S60177410A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic material
- thin film
- matter
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は磁気ヘッド、詳しくは磁性体の前面に非磁性体
を接合してなる2つの補強部材の間に、高透磁率の磁性
薄膜を挟持して構成した主磁極を用いた垂直記録方式に
よる磁気ヘッドに係夛、特にその主磁極の製造方法に関
する。[Detailed description of the invention] [Technical field to which the invention pertains] The present invention relates to a magnetic head, specifically, a magnetic thin film with high magnetic permeability is provided between two reinforcing members made by bonding a non-magnetic material to the front surface of a magnetic material. The present invention relates to a perpendicular recording type magnetic head using a sandwiched main pole, and particularly to a method of manufacturing the main pole.
第1図は従来の垂直記録方式による磁気ヘッドの第1例
を示す説明図で、主、補助の両磁極を用いた例である。FIG. 1 is an explanatory diagram showing a first example of a conventional magnetic head using the perpendicular recording method, and is an example using both main and auxiliary magnetic poles.
この第1例は2つのセラミック等の非磁性体3からなる
補強部材の間にパーマロイ、非晶質合金等のような高透
磁率の磁性薄膜2を挟持して主磁極4を構成し、これに
対向して補助磁極5を配設すると共に、この補助磁極5
にコイル6を巻装してなル、垂直に磁化容易軸をもつ記
録媒体1ft主。In this first example, a main magnetic pole 4 is constructed by sandwiching a magnetic thin film 2 with high magnetic permeability such as permalloy, amorphous alloy, etc. between two reinforcing members made of non-magnetic material 3 such as ceramic. An auxiliary magnetic pole 5 is disposed opposite to the auxiliary magnetic pole 5.
A coil 6 is wound around the 1 ft main recording medium having a perpendicular axis of easy magnetization.
補助磁極4,5間を走行させることにより記録媒体1に
信号を記録し、あるいは記録した信号を再生することが
できるものである。By running the magnetic pole between the auxiliary magnetic poles 4 and 5, a signal can be recorded on the recording medium 1, or a recorded signal can be reproduced.
第2図は従来の第2例を示す説明図で、主磁極のみを用
いた例である。この第2例はフェライト等の軟磁性体7
の前面に非磁性体3を接合してなる2つの補強部材の間
に、高透磁率の磁性薄膜2を挟持して主磁極4を構成し
、この主磁極4にコイル6を巻装してな力、主磁極4の
非磁性体3側に沿って走行する記録媒体1に信号を記録
したシ、記録した信号を再生したりすることができる。FIG. 2 is an explanatory diagram showing a second conventional example, in which only the main magnetic pole is used. This second example is a soft magnetic material 7 such as ferrite.
A main magnetic pole 4 is constructed by sandwiching a high permeability magnetic thin film 2 between two reinforcing members made by bonding a non-magnetic material 3 to the front surface of the main magnetic pole 4, and a coil 6 is wound around the main magnetic pole 4. It is possible to record a signal on the recording medium 1 running along the non-magnetic material 3 side of the main magnetic pole 4 and to reproduce the recorded signal.
第5図は従来の第3例を示す説明図で、これも主磁極の
みを用いた例である。この第3例は軟磁性体7の前面に
巻線溝12を設け、かつこの軟磁性体7の前面に非磁性
体3を接合して構成した補強部材と、同様に構成した補
強部材との間に、高透磁率の磁性薄膜2を挟持すると共
に、前記両補強部材の巻線溝12 、12に跨がってコ
イル13を設けてなる。 なお、14 、14は再生効
率を向上させるためのリターンバス部、15は巻線を施
こす支柱部である。FIG. 5 is an explanatory diagram showing a third conventional example, which is also an example using only the main magnetic pole. This third example includes a reinforcing member constructed by providing a winding groove 12 on the front surface of a soft magnetic material 7 and bonding a non-magnetic material 3 to the front surface of the soft magnetic material 7, and a reinforcing member constructed in the same manner. A magnetic thin film 2 with high magnetic permeability is sandwiched therebetween, and a coil 13 is provided spanning the winding grooves 12, 12 of both reinforcing members. In addition, 14 and 14 are return bus parts for improving reproduction efficiency, and 15 is a support part on which winding is applied.
現在、第1図の磁気ヘッドにおいても第2図。Currently, the magnetic head shown in FIG. 1 is also shown in FIG.
第5図の磁気ヘッドと同様に磁性薄膜2を軟磁性体7で
補強し、先端部のみを非磁性体3でガードする構造の主
磁極4が用いられている。Similar to the magnetic head shown in FIG. 5, a main pole 4 is used in which the magnetic thin film 2 is reinforced with a soft magnetic material 7 and only the tip portion is guarded with a non-magnetic material 3.
従来、第2図示のような主磁極は次のような工程で製造
されている。Conventionally, a main magnetic pole as shown in the second figure has been manufactured by the following process.
即ち、第3図(a)に示すように非磁性体3と軟磁性体
7を用い、第3図(b)に示すように軟磁性体7の前面
に非磁性体3を接着剤層8を介して接合して補強部材を
構成し、この補強部材の側面を研磨して平面に仕上げる
。次に第3図(C)に示すようにこの補強部材の仕上げ
面(側面)に高透磁率の磁性薄膜2をスパッタ等で形成
し、エツチングによシ所望の形状にパターン化した後、
第3図(d)に示すようにこの補強部材の磁性薄膜2側
の面に上記と同様の工程で作製した補強部材を接合して
主磁極4を形成し、最後に第3図(e)に示すようにこ
の主磁極4の非磁性体3の先端面を軟磁性体7の近傍ま
で研磨し整面に仕上げる。That is, as shown in FIG. 3(a), a non-magnetic material 3 and a soft magnetic material 7 are used, and as shown in FIG. are joined to form a reinforcing member, and the side surfaces of this reinforcing member are polished to a flat surface. Next, as shown in FIG. 3(C), a high permeability magnetic thin film 2 is formed on the finished surface (side surface) of this reinforcing member by sputtering or the like, and is patterned into a desired shape by etching.
As shown in FIG. 3(d), a reinforcing member produced in the same process as above is bonded to the surface of this reinforcing member on the magnetic thin film 2 side to form the main magnetic pole 4, and finally, as shown in FIG. 3(e). As shown in FIG. 2, the end surface of the non-magnetic material 3 of the main pole 4 is polished to a level near the soft magnetic material 7.
このような工程で磁気ヘッドの主磁極を製造する場合に
は、高透磁率の磁性薄膜2を形成する基板としての補強
部材を作成する第3図(b)の工程で補強部材の側面、
即ち非磁性体3、接着剤層8、及び軟磁性体7の面を同
時に研磨しなければならない。しかるに、その研磨面に
形成される高透磁率の磁性薄膜2はたとえば0.3μm
n〜2μmと薄いため、その接合面付近を平坦に保つ必
要があり、接着剤層8が存在するため平坦化が雌かしく
なり、しいては薄膜2の磁気特性の劣化をまねく欠点が
あるばかりでなく、接合強度が不充分であるため、非磁
性体3のブロックと軟磁性体7のブロックを接合して複
合ブロックを作り、この複合ブロックを切断して補強部
材を得る場合にはその切断時等に剥離するおそれがある
。When manufacturing the main pole of a magnetic head using such a process, the side surface of the reinforcing member,
That is, the surfaces of the nonmagnetic material 3, adhesive layer 8, and soft magnetic material 7 must be polished at the same time. However, the magnetic thin film 2 with high magnetic permeability formed on the polished surface has a thickness of, for example, 0.3 μm.
Since it is thin (n~2 μm), it is necessary to keep the area near the bonding surface flat, and the presence of the adhesive layer 8 makes flattening difficult, which has the drawback of causing deterioration of the magnetic properties of the thin film 2. However, since the joining strength is insufficient, when a composite block is made by joining a block of non-magnetic material 3 and a block of soft magnetic material 7, and the reinforcing member is obtained by cutting this composite block, the cutting is necessary. There is a risk that it may peel off over time.
本発明は上記の欠点を改良するためになされたもので、
補強部材を構成する非磁性体と磁性体の接合強度を向上
させることができると共に、高透磁率の磁性薄膜を形成
する基板としての補強部材の側面を必要な面精度に仕上
げることができる高密度記録用に適した磁気ヘッドの主
磁極製造方法を提供することを目的とする。The present invention has been made to improve the above-mentioned drawbacks.
High density that can improve the bonding strength between the non-magnetic material and the magnetic material that make up the reinforcing member, and also finish the side surface of the reinforcing member as a substrate on which a high permeability magnetic thin film is formed to the required surface accuracy. An object of the present invention is to provide a method for manufacturing a main pole of a magnetic head suitable for recording.
上記の目的を達成する本発明方法は、第4図示のように
磁性体7の前面に接合溝9を形成し、この接合溝9側に
ガラスの如き溶帛(容易な非磁性体3を配置し、この非
磁性体を溶融することにより磁性体7の前面に非磁性体
3を接合して補強部材を構成し、この補強部材の側面に
高透磁率の磁性薄膜2を形成した後、この磁性薄膜2側
の面に上記と同様に構成した補強部材の側面を接合して
主磁極4を製造する構成とする。In the method of the present invention to achieve the above object, a bonding groove 9 is formed on the front surface of the magnetic material 7 as shown in the fourth figure, and a molten material such as glass (an easy non-magnetic material 3 is placed on the side of the bonding groove 9). Then, by melting this non-magnetic material, the non-magnetic material 3 is bonded to the front surface of the magnetic material 7 to form a reinforcing member, and after forming a high permeability magnetic thin film 2 on the side surface of this reinforcing member, this The main magnetic pole 4 is manufactured by joining the side surface of a reinforcing member configured in the same manner as described above to the surface on the magnetic thin film 2 side.
以下第4図によって本発明方法の一実施例全詳細に説明
する。An embodiment of the method of the present invention will be explained in detail below with reference to FIG.
まず、第4図(a)に示すようにフェライト等の軟磁性
体7のブロックの前面10ヲ研磨して鏡面仕上けする。First, as shown in FIG. 4(a), the front surface 10 of a block of soft magnetic material 7 such as ferrite is polished to a mirror finish.
次に第4図(b)に示すようにこの前面10に接合溝9
を形成し、第4図(C)に示すようにこの接合溝9側に
非磁性体であるガラス3を配置し、このガラス3を溶融
することによ勺軟磁性体7のブロックの前面にガラス3
を接合して複合ブロックを形成する。次に第4図(d)
に示すようにこの複合ブロックのガラス3の上面を研磨
して平面に仕上げる。Next, as shown in FIG. 4(b), a joining groove 9 is formed on this front surface 10.
As shown in FIG. 4(C), glass 3, which is a non-magnetic material, is placed on the side of this joining groove 9, and by melting this glass 3, a soft magnetic material 7 is formed on the front surface of the block. glass 3
are joined to form a composite block. Next, Figure 4(d)
As shown in the figure, the upper surface of the glass 3 of this composite block is polished to a flat surface.
しかる後、第4図(e)に示すようにこの複合ブロック
を切断してその側面11ヲ研磨し鏡面仕上げしてこれを
補強部材とする。次いで第4図(f)に示すようにこの
補強部材の仕上げ面(側面)11にパーマロイ等のよう
な高透磁率の磁性薄膜2をスパッタ等で形成し、エツチ
ングによって所望の形状にパターン化した後、第4図(
g) K示すようにこの補強部材の磁性薄膜2側の面に
上記と同様の工程で得られた補強部材の側面を接合して
主磁極4全形成し、最後に第4図(h)に示すようにこ
の主磁極4の先端面(ガラス3の先端面)を研磨し整面
に仕上げる。Thereafter, as shown in FIG. 4(e), this composite block is cut, its side surfaces 11 are polished to a mirror finish, and this is used as a reinforcing member. Next, as shown in FIG. 4(f), a high permeability magnetic thin film 2 such as permalloy was formed on the finished surface (side surface) 11 of this reinforcing member by sputtering or the like, and was patterned into a desired shape by etching. After, Figure 4 (
g) As shown in K, the side surface of the reinforcing member obtained in the same process as above is joined to the surface of this reinforcing member on the magnetic thin film 2 side to form the entire main magnetic pole 4, and finally, as shown in Fig. 4 (h). As shown, the end surface of the main pole 4 (the end surface of the glass 3) is polished to a smooth surface.
上述のように本発明方法によれば、補強部材を構成する
非磁性体3と磁性体7の接合をガラスの如き非磁性体3
を溶融することにより行っているので、接合強度をガラ
スの如き非磁性体3と磁性体7の相互拡散と接合溝9の
存在によシ従来よりも向上できると共に、非磁性体3と
磁性体7の接合部に接着剤層を含まないため、高透磁率
の磁性薄膜2を形成する基板としての補強部材の側面を
必要な面精度の平面に研磨仕上げすることができ、磁性
薄膜2の磁気特性を損なうおそれがないから、高密度記
録用に適した磁気ヘッドを提供することができる。As described above, according to the method of the present invention, the non-magnetic material 3 and the magnetic material 7 constituting the reinforcing member are bonded together using the non-magnetic material 3 such as glass.
Since this is done by melting the non-magnetic material 3 and the magnetic material 7, the bonding strength can be improved compared to the conventional method due to the mutual diffusion of the non-magnetic material 3 such as glass and the magnetic material 7 and the presence of the bonding groove 9. 7 does not contain an adhesive layer, the side surface of the reinforcing member, which serves as a substrate on which the high permeability magnetic thin film 2 is formed, can be polished to a flat surface with the required surface accuracy, and the magnetic thin film 2 Since there is no risk of deteriorating the characteristics, a magnetic head suitable for high-density recording can be provided.
第1図は従来の磁気ヘッドの第1例を示す説明図、第2
図は同じくその第2例を示す説明図!3図(a)〜(e
)は第2図の主磁極を製造する場合の従来方法の説明図
、第4図(a)〜(h)は第2図に相当する主磁極全製
造する場合の本発明方法の説明図、第5図は従来の磁気
ヘッドの第3例を示す説明図である。
2・・・・・・高透磁率の磁性薄膜、 3・・・・・・
非磁性体、4・・・・・・主磁極、 6・・・・・・コ
イル、 7・・・・・・(軟)磁性体、 9・・・・・
・接合溝。
!f、S、H′:+・パ1
代理人 弁理士 石 戸)、 元
い 、、l
?
(e) 6手9
7 7
淳q謂
(!J) (hン
淳5区FIG. 1 is an explanatory diagram showing a first example of a conventional magnetic head;
The figure is an explanatory diagram showing the second example as well! Figure 3 (a) to (e)
) is an explanatory diagram of the conventional method for manufacturing the main magnetic pole shown in FIG. 2, and FIGS. 4(a) to (h) are explanatory diagrams of the method of the present invention for manufacturing the entire main magnetic pole corresponding to FIG. FIG. 5 is an explanatory diagram showing a third example of a conventional magnetic head. 2...Magnetic thin film with high magnetic permeability, 3...
Non-magnetic material, 4... Main magnetic pole, 6... Coil, 7... (Soft) magnetic material, 9...
・Joint groove. ! f, S, H': +・Pa1 Agent Patent attorney Ishito), Motoi ,,l? (e) 6 moves 9 7 7 Jun (!J) (h Jun 5 ward
Claims (1)
ラスの如き溶融容易な非磁性体を配置し、この非磁性体
を溶融することにより磁性体の前面に非磁性体を接合し
て補強部材を構成し、この補強部材の側面に高透磁率の
磁性薄膜を形成した後、この磁性薄膜側の面に上記と同
様に構成した補強部材の側面を接合して主磁極を製造す
ることを特徴とする磁気ヘッドの主磁極製造方法。A bonding groove is formed on the front surface of the magnetic material, a non-magnetic material that is easily melted such as glass is placed on the surface on the side of the bonding groove, and the non-magnetic material is bonded to the front surface of the magnetic material by melting the non-magnetic material. After forming a high permeability magnetic thin film on the side surface of this reinforcing member, the side surface of the reinforcing member configured in the same manner as above is bonded to the surface on this magnetic thin film side to manufacture the main pole. A method of manufacturing a main pole of a magnetic head, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3390584A JPS60177410A (en) | 1984-02-23 | 1984-02-23 | Production of main magnetic pole of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3390584A JPS60177410A (en) | 1984-02-23 | 1984-02-23 | Production of main magnetic pole of magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60177410A true JPS60177410A (en) | 1985-09-11 |
Family
ID=12399529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3390584A Pending JPS60177410A (en) | 1984-02-23 | 1984-02-23 | Production of main magnetic pole of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60177410A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6078752A (en) * | 1996-10-09 | 2000-06-20 | Canon Kabushiki Kaisha | Illuminating device and photographing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5774812A (en) * | 1980-06-18 | 1982-05-11 | Sanyo Electric Co Ltd | Manufacture of magnetic head for vertical magnetic recording |
-
1984
- 1984-02-23 JP JP3390584A patent/JPS60177410A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5774812A (en) * | 1980-06-18 | 1982-05-11 | Sanyo Electric Co Ltd | Manufacture of magnetic head for vertical magnetic recording |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6078752A (en) * | 1996-10-09 | 2000-06-20 | Canon Kabushiki Kaisha | Illuminating device and photographing apparatus |
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