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JPS6455487A - Fluid flow rate control valve - Google Patents

Fluid flow rate control valve

Info

Publication number
JPS6455487A
JPS6455487A JP25871487A JP25871487A JPS6455487A JP S6455487 A JPS6455487 A JP S6455487A JP 25871487 A JP25871487 A JP 25871487A JP 25871487 A JP25871487 A JP 25871487A JP S6455487 A JPS6455487 A JP S6455487A
Authority
JP
Japan
Prior art keywords
valve rod
valve
rise
voltage
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25871487A
Other languages
Japanese (ja)
Other versions
JPH0612146B2 (en
Inventor
Akira Saito
Akio Nagami
Satoru Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17324073&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS6455487(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP62258714A priority Critical patent/JPH0612146B2/en
Publication of JPS6455487A publication Critical patent/JPS6455487A/en
Publication of JPH0612146B2 publication Critical patent/JPH0612146B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)

Abstract

PURPOSE:To prevent generation of metal particulates due to metal-to-metal contact by forming a space inside a valve rod, putting therein an element varying in length when a voltage is applied and applying voltage to the element to force the valve rod to rise. CONSTITUTION:When an DC voltage is applied to an laminated piezoelectric element 8 via lead wires 8a and 8b, said element 8 strains to stretch slightly. The laminated piezoelectric element 8 has the lower end thereof put and firmed on a bridge 13 so that at the time of the stretch of said element 8, the lower end face of an adjusting bolt 18 screwed up on the upper part of a valve rod 12 supercedes the load of a press spring 14 to rise together with the valve rod 12. Since a diaphragm 7 also rises along with the rise of said valve rod 12, both a valve seat 3 and the lower face of the diaphragm 7 are opened so that fluid flows from a valve port 3a into a fluid chamber 10 to open a valve.
JP62258714A 1987-10-14 1987-10-14 Normally closed type flow control valve Expired - Lifetime JPH0612146B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62258714A JPH0612146B2 (en) 1987-10-14 1987-10-14 Normally closed type flow control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62258714A JPH0612146B2 (en) 1987-10-14 1987-10-14 Normally closed type flow control valve

Publications (2)

Publication Number Publication Date
JPS6455487A true JPS6455487A (en) 1989-03-02
JPH0612146B2 JPH0612146B2 (en) 1994-02-16

Family

ID=17324073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62258714A Expired - Lifetime JPH0612146B2 (en) 1987-10-14 1987-10-14 Normally closed type flow control valve

Country Status (1)

Country Link
JP (1) JPH0612146B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100439667B1 (en) * 2000-05-08 2004-07-12 에스엠시 가부시키가이샤 Piezoelectric fluid control valve
CN105940251A (en) * 2014-02-24 2016-09-14 株式会社富士金 Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
JP2017057911A (en) * 2015-09-16 2017-03-23 タカノ株式会社 Piezo valve
US10248137B2 (en) * 2014-07-15 2019-04-02 Hitachi Metals, Ltd. Method for controlling flow rate of fluid, mass flow rate control device for executing method, and mass flow rate control system utilizing mass flow rate control device
JP2020128823A (en) * 2020-06-03 2020-08-27 タカノ株式会社 Piezo valve
WO2022201614A1 (en) 2021-03-23 2022-09-29 株式会社リンテック Normally-closed flow rate control valve

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6606079B2 (en) 2013-09-04 2019-11-13 株式会社堀場エステック Interlace lifting mechanism

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1656214A (en) * 1925-11-17 1928-01-17 Masson Pierre Diaphragm valve for automobiles
US3589391A (en) * 1968-05-06 1971-06-29 Ettore Pagliaro Electrically operated fluid flow control valve device
US3680986A (en) * 1970-11-09 1972-08-01 Louis F Kutik Pump with mechanical assist
JPS52119523A (en) * 1976-03-31 1977-10-07 Toto Ltd Valve
JPS5316127B1 (en) * 1971-02-26 1978-05-30
FR2425599A1 (en) * 1978-05-10 1979-12-07 Commissariat Energie Atomique Fluid flow control valve - uses voltage applied across piezoelectric element to lift valve member off seat
JPS58152986A (en) * 1982-03-05 1983-09-10 Nippon Soken Inc Piezo-electric valve device
JPS5980582A (en) * 1982-10-29 1984-05-10 Gasutaa:Kk Heat responsive type flow controlling device
JPS6078179A (en) * 1983-10-04 1985-05-02 Shoketsu Kinzoku Kogyo Co Ltd Hydraulic control valve
JPS60184475U (en) * 1984-05-18 1985-12-06 リンナイ株式会社 Temperature compensated flow control valve
JPS61127983A (en) * 1984-11-27 1986-06-16 Esutetsuku:Kk Fluid control valve
JPS61223381A (en) * 1985-03-22 1986-10-03 ズルツアー　アクチエンゲゼルシャフト Pilot valve
JPS61244976A (en) * 1985-04-23 1986-10-31 Fujikin:Kk Fluid interrupting/releasing device
US4669660A (en) * 1985-01-15 1987-06-02 Kernforschungszentrum Karlsruhe Pulse valve
JPS62177384A (en) * 1986-01-31 1987-08-04 Hitachi Metals Ltd Piezoelectric driven valve
JPH0434275A (en) * 1990-05-26 1992-02-05 Stec Kk Normally closed type fluid control valve

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1656214A (en) * 1925-11-17 1928-01-17 Masson Pierre Diaphragm valve for automobiles
US3589391A (en) * 1968-05-06 1971-06-29 Ettore Pagliaro Electrically operated fluid flow control valve device
US3680986A (en) * 1970-11-09 1972-08-01 Louis F Kutik Pump with mechanical assist
JPS5316127B1 (en) * 1971-02-26 1978-05-30
JPS52119523A (en) * 1976-03-31 1977-10-07 Toto Ltd Valve
FR2425599A1 (en) * 1978-05-10 1979-12-07 Commissariat Energie Atomique Fluid flow control valve - uses voltage applied across piezoelectric element to lift valve member off seat
JPS58152986A (en) * 1982-03-05 1983-09-10 Nippon Soken Inc Piezo-electric valve device
JPS5980582A (en) * 1982-10-29 1984-05-10 Gasutaa:Kk Heat responsive type flow controlling device
JPS6078179A (en) * 1983-10-04 1985-05-02 Shoketsu Kinzoku Kogyo Co Ltd Hydraulic control valve
JPS60184475U (en) * 1984-05-18 1985-12-06 リンナイ株式会社 Temperature compensated flow control valve
JPS61127983A (en) * 1984-11-27 1986-06-16 Esutetsuku:Kk Fluid control valve
US4669660A (en) * 1985-01-15 1987-06-02 Kernforschungszentrum Karlsruhe Pulse valve
JPS61223381A (en) * 1985-03-22 1986-10-03 ズルツアー　アクチエンゲゼルシャフト Pilot valve
JPS61244976A (en) * 1985-04-23 1986-10-31 Fujikin:Kk Fluid interrupting/releasing device
JPS62177384A (en) * 1986-01-31 1987-08-04 Hitachi Metals Ltd Piezoelectric driven valve
JPH0434275A (en) * 1990-05-26 1992-02-05 Stec Kk Normally closed type fluid control valve
JPH0577907B2 (en) * 1990-05-26 1993-10-27 S Tec Inc

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100439667B1 (en) * 2000-05-08 2004-07-12 에스엠시 가부시키가이샤 Piezoelectric fluid control valve
CN105940251A (en) * 2014-02-24 2016-09-14 株式会社富士金 Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
US10248137B2 (en) * 2014-07-15 2019-04-02 Hitachi Metals, Ltd. Method for controlling flow rate of fluid, mass flow rate control device for executing method, and mass flow rate control system utilizing mass flow rate control device
JP2017057911A (en) * 2015-09-16 2017-03-23 タカノ株式会社 Piezo valve
JP2020128823A (en) * 2020-06-03 2020-08-27 タカノ株式会社 Piezo valve
WO2022201614A1 (en) 2021-03-23 2022-09-29 株式会社リンテック Normally-closed flow rate control valve
KR20230125845A (en) 2021-03-23 2023-08-29 가부시키가이샤 린텍쿠 Normally Closed Flow Control Valve
US11867317B1 (en) 2021-03-23 2024-01-09 Lintec Co., Ltd. Normally-closed flow rate control valve

Also Published As

Publication number Publication date
JPH0612146B2 (en) 1994-02-16

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