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JPS6430943A - Accurate vibro-isolating method - Google Patents

Accurate vibro-isolating method

Info

Publication number
JPS6430943A
JPS6430943A JP62182866A JP18286687A JPS6430943A JP S6430943 A JPS6430943 A JP S6430943A JP 62182866 A JP62182866 A JP 62182866A JP 18286687 A JP18286687 A JP 18286687A JP S6430943 A JPS6430943 A JP S6430943A
Authority
JP
Japan
Prior art keywords
vibro
vibration
brake
stage
isolating bed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62182866A
Other languages
Japanese (ja)
Inventor
Toshio Kasahara
Shiro Hasegawa
Katsuaki Nanba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SWCC Corp
Original Assignee
Showa Electric Wire and Cable Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Electric Wire and Cable Co filed Critical Showa Electric Wire and Cable Co
Priority to JP62182866A priority Critical patent/JPS6430943A/en
Publication of JPS6430943A publication Critical patent/JPS6430943A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Atmospheric Sciences (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To prevent a vibro-isolating bed from large vibrating braking an equipment, when it is driven, in its own vibration and displacement by driving a brake by a start signal, received from a power driving mechanism in a side of the vibro-isolating bed, to be released after the predetermined time. CONSTITUTION:Previously transmitting a stage start signal from stage driving mechanisms 2', 2' in a sample stage 7, when the stage 7 is driven, a computer 6 applies a brake 4 in accordance with the start signal, preventing a vibro- isolating bed 1 from large vibrating and releasing the brake 4 after the end of driving. While even without the signal, detecting by a sensor 5 a vibration and acceleration of previously assigned value or more for the generation of large floor vibration, the brake 4 is shockingly applied only for the previously assigned time width thereafter slowly released. By the method thus obtained, removing a vibration applied to a supporting structure or the vibro-isolating bed or the like while expectedly controlling an equipment, providing a power driving mechanism, in its own generated vibration and displacement when the equipment is driven, the vibro-isolating bed is prevented from large vibrating.
JP62182866A 1987-07-22 1987-07-22 Accurate vibro-isolating method Pending JPS6430943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182866A JPS6430943A (en) 1987-07-22 1987-07-22 Accurate vibro-isolating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182866A JPS6430943A (en) 1987-07-22 1987-07-22 Accurate vibro-isolating method

Publications (1)

Publication Number Publication Date
JPS6430943A true JPS6430943A (en) 1989-02-01

Family

ID=16125809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182866A Pending JPS6430943A (en) 1987-07-22 1987-07-22 Accurate vibro-isolating method

Country Status (1)

Country Link
JP (1) JPS6430943A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196115A (en) * 1996-01-22 1997-07-29 Kongo Kk Base isolator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6127328A (en) * 1984-07-18 1986-02-06 Mitsubishi Heavy Ind Ltd Vibration insulation supporter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6127328A (en) * 1984-07-18 1986-02-06 Mitsubishi Heavy Ind Ltd Vibration insulation supporter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196115A (en) * 1996-01-22 1997-07-29 Kongo Kk Base isolator

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